[Scan]
initial_time=2016-02-15T18:06:07
final_time=2016-02-15T18:06:27
ip_count=19
run=1030
dataset=2
scan=112
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-8.17227E-1
ql1_imon=7.32791E-10
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=3.00813E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=7.14743E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.60558E-10
mult1=-9.83671E-9
mult2=-2.65274E-9
rf_tmon=-4.65662E-3
rf_agc=3.31413E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=3.89934E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66857E0
bslens_imon=2.58573E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.99819E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53532E1
cs_ef1b_imon=2.97369E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04923E1
cs_ea1_imon=2.50327E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3466E0
lens1_imon=2.72377E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03796E1
cs_ea2_imon=1.56745E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84761E1
cs_ef1a_imon=2.98162E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.97623E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.86845E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15129E1
os_ea1_imon=1.89413E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25564E0
cs_ionrep_imon=1.23545E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.0555E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=7.46191E-10
tplens_vset=1.4E-1
tplens_vmon=1.59955E0
tplens_imon=-2.67032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26224E1
iondef3_imon=1.48887E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.58302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98562E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.0406E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28336E0
ionrepsh_imon=1.88918E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33776E1
lens5b_imon=2.1872E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74387E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.59884E-1
os_ea2_imon=-3.80294E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.18488E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61437E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42764E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=2.86125E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.31096E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.26263E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.09918E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.01349E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=2.83885E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11032E0
cs_ionaccel_imon=-1.88069E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.97521E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.6577E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93735E3
defgrida_imon=6.69145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.11617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42032E0
defgridb_imon=6.21716E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33864E1
os_fil1_imon=5.05853E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60534E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66456E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30804E1
cs_fil1_imon=9.99561E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62095E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67126E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01532E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.45787E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.50534E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.81826E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22422E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.50959E-2
chamber_ion_pmon=1.69875E-8
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.34064E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.17156E-1	-7.9813E-1	-9.13091E0	-9.14211E0	5.57899E-3	9.30071E-2	2.73249E1	-3.26609E1	-3.26296E1	2.67943E1	1.70173E-8	2.51739E-3	2.51739E-3	6.34518E-3	2.51709E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16631E-1	-7.98011E-1	-9.13098E0	-9.14211E0	5.19753E-3	9.34124E-2	2.73131E1	-3.26474E1	-3.26389E1	2.67608E1	1.70173E-8	2.52061E-3	2.52061E-3	6.29665E-3	2.51709E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.17013E-1	-7.98202E-1	-9.13122E0	-9.14228E0	5.126E-3	9.36508E-2	2.73005E1	-3.2688E1	-3.26185E1	2.67433E1	1.70092E-8	2.51804E-3	2.51804E-3	6.32978E-3	2.51514E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.17156E-1	-7.98368E-1	-9.13112E0	-9.14192E0	5.14984E-3	9.3317E-2	2.73231E1	-3.26921E1	-3.2617E1	2.68947E1	1.701E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.5128E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.17251E-1	-7.98082E-1	-9.1311E0	-9.14178E0	5.34058E-3	9.30548E-2	2.72853E1	-3.26729E1	-3.2608E1	2.67728E1	1.69949E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.50959E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.17275E-1	-7.98655E-1	-9.13103E0	-9.14228E0	5.8651E-3	9.29832E-2	2.73222E1	-3.26608E1	-3.26189E1	2.68112E1	1.70246E-8	2.52169E-3	2.52169E-3	6.31817E-3	2.50424E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.17251E-1	-7.98583E-1	-9.13117E0	-9.14199E0	5.65052E-3	9.30071E-2	2.73039E1	-3.26543E1	-3.26104E1	2.67944E1	1.70023E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.50523E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.17347E-1	-7.98631E-1	-9.131E0	-9.14207E0	5.60284E-3	9.3317E-2	2.72949E1	-3.26759E1	-3.2623E1	2.681E1	1.70244E-8	2.5188E-3	2.5188E-3	6.29645E-3	2.52709E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.1718E-1	-7.9813E-1	-9.13093E0	-9.14228E0	5.36442E-3	9.32455E-2	2.73141E1	-3.26711E1	-3.26374E1	2.67902E1	1.70096E-8	2.51662E-3	2.51662E-3	6.34588E-3	2.51613E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.17299E-1	-7.97939E-1	-9.13093E0	-9.14226E0	5.57899E-3	9.31501E-2	2.73219E1	-3.27131E1	-3.26266E1	2.68238E1	1.7017E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.51395E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.1718E-1	-7.9844E-1	-9.13091E0	-9.1423E0	5.43594E-3	9.29594E-2	2.73128E1	-3.26573E1	-3.26172E1	2.6798E1	1.70096E-8	2.51334E-3	2.51334E-3	6.31288E-3	2.51613E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16822E-1	-7.98178E-1	-9.1311E0	-9.14221E0	5.48363E-3	9.30548E-2	2.73279E1	-3.26741E1	-3.26182E1	2.68058E1	1.70173E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.5128E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16917E-1	-7.98488E-1	-9.13112E0	-9.14202E0	5.19753E-3	9.3174E-2	2.73234E1	-3.2639E1	-3.26366E1	2.67595E1	1.7017E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.50305E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16989E-1	-7.98368E-1	-9.13098E0	-9.14176E0	5.34058E-3	9.29594E-2	2.73074E1	-3.26562E1	-3.26089E1	2.683E1	1.70173E-8	2.51417E-3	2.51417E-3	6.31278E-3	2.52354E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16798E-1	-7.97963E-1	-9.13122E0	-9.14204E0	5.50747E-3	9.31978E-2	2.73148E1	-3.26507E1	-3.26202E1	2.6853E1	1.70248E-8	2.51679E-3	2.51679E-3	6.29185E-3	2.51682E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16822E-1	-7.98106E-1	-9.13115E0	-9.14154E0	5.45979E-3	9.31263E-2	2.73051E1	-3.26614E1	-3.26331E1	2.67914E1	1.70005E-8	2.52686E-3	2.52686E-3	6.33065E-3	2.52464E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17108E-1	-7.97749E-1	-9.1311E0	-9.14183E0	5.4121E-3	9.30548E-2	2.72808E1	-3.26735E1	-3.26231E1	2.67769E1	1.70244E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.51613E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.1706E-1	-7.98535E-1	-9.13122E0	-9.14202E0	5.34058E-3	9.32455E-2	2.7335E1	-3.26778E1	-3.26198E1	2.67945E1	1.70104E-8	2.52131E-3	2.52131E-3	6.31798E-3	2.51169E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17156E-1	-7.98249E-1	-9.13119E0	-9.1419E0	5.62668E-3	9.32932E-2	2.72892E1	-3.26803E1	-3.26437E1	2.68683E1	1.70318E-8	2.51915E-3	2.51915E-3	6.34099E-3	2.51292E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.17227E-1	-7.98106E-1	-9.13124E0	-9.14216E0	5.38826E-3	9.31025E-2	2.73105E1	-3.26536E1	-3.26224E1	2.67956E1	1.69875E-8	2.52647E-3	2.52647E-3	6.32386E-3	2.50959E-2