[Scan]
initial_time=2016-02-15T18:07:27
final_time=2016-02-15T18:07:47
ip_count=19
run=1030
dataset=2
scan=115
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=7.53045E-10
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=3.03483E-10
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=7.13897E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.5151E-10
mult1=-9.61758E-9
mult2=-2.66446E-9
rf_tmon=-4.59206E-3
rf_agc=3.24773E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=4.18162E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6355E0
bslens_imon=2.67114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.99857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53696E1
cs_ef1b_imon=2.96966E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04946E1
cs_ea1_imon=2.50182E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38518E0
lens1_imon=2.61706E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.98982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.55444E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84116E1
cs_ef1a_imon=2.98704E-5
olens2_vset=9.7E-1
olens2_vmon=9.70674E-1
olens2_imon=4.22442E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=2.88556E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1536E1
os_ea1_imon=1.8879E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63595E1
os_ef1bup_imon=3.084E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.22062E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=3.06662E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=7.55417E-10
tplens_vset=1.4E-1
tplens_vmon=1.63242E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26602E1
iondef2_imon=1.58761E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02966E2
lens6_imon=2.98483E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=4.16684E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=1.88466E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3376E1
lens5b_imon=2.20189E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74455E1
cs_ef2b_imon=3.12153E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.28892E-1
os_ea2_imon=-4.65174E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00634E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71153E1
cs_ef2a_imon=3.17991E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60944E0
os_ef2alow_imon=-2.55373E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51473E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=2.86645E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.31623E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01943E1
cs_anode2_imon=2.26384E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73116E1
iondef1_imon=1.09842E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68023E1
iondef4_imon=1.08295E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.0514E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=2.71034E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12029E0
cs_ionaccel_imon=-1.92123E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56434E1
einzel_imon=7.63224E-6
window_vset=0.0E0
window_vmon=2.04943E-1
window_imon=-1.00724E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82605E2
mask1_imon=2.3906E-4
mask2_vset=0.0E0
mask2_vmon=-1.86408E1
mask2_imon=-7.81352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.49817E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.80241E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.06918E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36848E0
defgridb_imon=6.26167E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33881E1
os_fil1_imon=4.27553E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.12727E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66586E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30797E1
cs_fil1_imon=9.97526E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62551E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66785E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98343E-2
os_fil2_imon=-2.50122E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.65523E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60766E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32648E-1
cs_fil2_imon=-2.2174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.81364E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22396E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.52354E-2
chamber_ion_pmon=1.701E-8
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.11335E-1
res40_imon=-2.57458E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.17132E-1	-7.97892E-1	-9.13112E0	-9.14176E0	5.07832E-3	9.32455E-2	2.72986E1	-3.26567E1	-3.26378E1	2.67349E1	1.69955E-8	2.5131E-3	2.5131E-3	6.30202E-3	2.50852E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.1718E-1	-7.98488E-1	-9.13098E0	-9.14202E0	5.34058E-3	9.33409E-2	2.72919E1	-3.26729E1	-3.26182E1	2.68514E1	1.69955E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.5021E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.17275E-1	-7.98512E-1	-9.13112E0	-9.14209E0	5.38826E-3	9.32217E-2	2.7288E1	-3.2649E1	-3.26113E1	2.67862E1	1.69949E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.52709E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.17227E-1	-7.98726E-1	-9.13072E0	-9.14204E0	5.36442E-3	9.32693E-2	2.72967E1	-3.26903E1	-3.2614E1	2.68478E1	1.70246E-8	2.5131E-3	2.5131E-3	6.31278E-3	2.51066E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.1706E-1	-7.97987E-1	-9.13093E0	-9.14207E0	5.34058E-3	9.3317E-2	2.72986E1	-3.2659E1	-3.26413E1	2.6792E1	1.70096E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.5227E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16679E-1	-7.98297E-1	-9.13088E0	-9.14202E0	5.55515E-3	9.27687E-2	2.73009E1	-3.26512E1	-3.26098E1	2.67746E1	1.69875E-8	2.52757E-3	2.52757E-3	6.29098E-3	2.52051E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16488E-1	-7.98416E-1	-9.13115E0	-9.14218E0	5.31673E-3	9.29356E-2	2.73131E1	-3.26272E1	-3.26285E1	2.67902E1	1.70096E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.52709E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16751E-1	-7.98178E-1	-9.13107E0	-9.14202E0	5.45979E-3	9.29832E-2	2.72991E1	-3.26663E1	-3.2596E1	2.67637E1	1.70244E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.51395E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16584E-1	-7.98631E-1	-9.13124E0	-9.14218E0	5.43594E-3	9.31978E-2	2.73201E1	-3.26506E1	-3.26416E1	2.68274E1	1.70096E-8	2.51662E-3	2.51662E-3	6.33486E-3	2.50305E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16178E-1	-7.98249E-1	-9.13107E0	-9.14202E0	5.57899E-3	9.3317E-2	2.72901E1	-3.26801E1	-3.26056E1	2.68298E1	1.70244E-8	2.51225E-3	2.51225E-3	6.33486E-3	2.52489E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16607E-1	-7.98225E-1	-9.13095E0	-9.14183E0	5.65052E-3	9.33409E-2	2.73105E1	-3.26573E1	-3.26266E1	2.67806E1	1.69949E-8	2.52757E-3	2.52757E-3	6.31288E-3	2.52928E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16631E-1	-7.98106E-1	-9.13091E0	-9.14187E0	5.50747E-3	9.30786E-2	2.72974E1	-3.26826E1	-3.26467E1	2.67932E1	1.7017E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.51177E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.17084E-1	-7.98512E-1	-9.13098E0	-9.14199E0	5.22137E-3	9.34124E-2	2.72997E1	-3.26783E1	-3.26428E1	2.68064E1	1.7017E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.5227E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16584E-1	-7.98082E-1	-9.13084E0	-9.14226E0	5.57899E-3	9.34124E-2	2.73222E1	-3.26832E1	-3.26107E1	2.67943E1	1.70173E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.51709E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.17013E-1	-7.98392E-1	-9.13112E0	-9.14209E0	5.29289E-3	9.30309E-2	2.73424E1	-3.2645E1	-3.2615E1	2.68051E1	1.69955E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.51709E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16655E-1	-7.98178E-1	-9.13115E0	-9.14192E0	5.24521E-3	9.30786E-2	2.73181E1	-3.26508E1	-3.26455E1	2.68004E1	1.69942E-8	2.52139E-3	2.52139E-3	6.33538E-3	2.52183E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16584E-1	-7.98655E-1	-9.13126E0	-9.14159E0	5.38826E-3	9.29594E-2	2.72937E1	-3.26567E1	-3.26218E1	2.68082E1	1.69883E-8	2.5131E-3	2.5131E-3	6.31278E-3	2.50638E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.17037E-1	-7.98631E-1	-9.13131E0	-9.14171E0	5.65052E-3	9.30786E-2	2.72402E1	-3.26425E1	-3.27458E1	2.67788E1	1.70244E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.51395E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16584E-1	-7.97987E-1	-9.13126E0	-9.14168E0	5.57899E-3	9.32932E-2	2.72973E1	-3.26747E1	-3.26368E1	2.68286E1	1.70318E-8	2.52538E-3	2.52538E-3	6.34588E-3	2.52051E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16607E-1	-7.98345E-1	-9.13138E0	-9.14183E0	5.53131E-3	9.30071E-2	2.73116E1	-3.26602E1	-3.2616E1	2.68023E1	1.701E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.52354E-2