[Scan]
initial_time=2016-02-15T18:09:14
final_time=2016-02-15T18:09:33
ip_count=19
run=1030
dataset=2
scan=119
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08864E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=7.39276E-10
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=3.26431E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=6.38795E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=5.79667E-10
mult1=-9.82467E-9
mult2=-2.73658E-9
rf_tmon=-4.65662E-3
rf_agc=3.39104E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=4.10771E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.76978E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19978E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=2.97153E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=2.47743E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37492E0
lens1_imon=2.75916E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.56461E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84052E1
cs_ef1a_imon=2.98054E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=4.14681E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=2.87782E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15423E1
os_ea1_imon=1.89697E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27333E0
cs_ionrep_imon=1.22554E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=3.04793E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=7.44939E-10
tplens_vset=1.4E-1
tplens_vmon=1.61371E0
tplens_imon=-1.07759E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.48604E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26434E1
iondef2_imon=1.56745E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98565E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.06182E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29103E0
ionrepsh_imon=1.8998E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.71682E-1
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.19065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59756E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45767E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=2.86521E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.32052E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.26515E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.10945E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68366E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.0746E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=2.84123E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09891E0
cs_ionaccel_imon=-1.94196E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.51125E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-9.50867E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.57276E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.56403E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.18342E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48824E0
defgridb_imon=6.14284E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33878E1
os_fil1_imon=4.9384E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.98976E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66395E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3079E1
cs_fil1_imon=1.00029E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62168E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6699E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.27767E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55343E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41252E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22291E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.5021E-2
chamber_ion_pmon=1.70173E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.35576E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16488E-1	-7.98512E-1	-9.13112E0	-9.14218E0	5.57899E-3	9.32693E-2	2.7337E1	-3.26608E1	-3.2626E1	2.67555E1	1.70028E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.52139E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16727E-1	-7.98488E-1	-9.13131E0	-9.14209E0	5.36442E-3	9.31978E-2	2.7321E1	-3.26695E1	-3.26199E1	2.68469E1	1.70173E-8	2.51739E-3	2.51739E-3	6.29128E-3	2.52569E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16631E-1	-7.98249E-1	-9.13131E0	-9.14214E0	5.38826E-3	9.3317E-2	2.72968E1	-3.26661E1	-3.2659E1	2.68134E1	1.70017E-8	2.51693E-3	2.51693E-3	6.3074E-3	2.52183E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16679E-1	-7.98297E-1	-9.13124E0	-9.14185E0	5.24521E-3	9.33647E-2	2.72968E1	-3.26762E1	-3.26272E1	2.67577E1	1.69955E-8	2.52061E-3	2.52061E-3	6.29665E-3	2.51066E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16441E-1	-7.98297E-1	-9.13103E0	-9.14166E0	5.60284E-3	9.32693E-2	2.72927E1	-3.26638E1	-3.26148E1	2.68178E1	1.70318E-8	2.52384E-3	2.52384E-3	6.32356E-3	2.52785E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16727E-1	-7.98106E-1	-9.13134E0	-9.14178E0	5.48363E-3	9.35078E-2	2.72763E1	-3.26603E1	-3.2638E1	2.68123E1	1.70173E-8	2.51954E-3	2.51954E-3	6.32896E-3	2.53E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16727E-1	-7.98011E-1	-9.13115E0	-9.14214E0	5.19753E-3	9.35316E-2	2.73291E1	-3.26873E1	-3.262E1	2.67945E1	1.70023E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.51177E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.16774E-1	-7.98678E-1	-9.13124E0	-9.14195E0	5.29289E-3	9.31263E-2	2.72751E1	-3.26536E1	-3.25906E1	2.68117E1	1.70244E-8	2.52099E-3	2.52099E-3	6.33486E-3	2.51395E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16464E-1	-7.98345E-1	-9.13098E0	-9.14195E0	5.34058E-3	9.35793E-2	2.72931E1	-3.26326E1	-3.2638E1	2.68034E1	1.7017E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.50959E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16393E-1	-7.98416E-1	-9.13103E0	-9.14195E0	5.48363E-3	9.32693E-2	2.73311E1	-3.26767E1	-3.26431E1	2.67842E1	1.70023E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.50959E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16727E-1	-7.98202E-1	-9.13093E0	-9.14214E0	5.17368E-3	9.33409E-2	2.73129E1	-3.26687E1	-3.26188E1	2.67908E1	1.70173E-8	2.51417E-3	2.51417E-3	6.34518E-3	2.51066E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16321E-1	-7.98392E-1	-9.13081E0	-9.14223E0	5.53131E-3	9.32217E-2	2.73075E1	-3.26579E1	-3.26512E1	2.68064E1	1.69949E-8	2.52867E-3	2.52867E-3	6.32386E-3	2.50523E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16774E-1	-7.98535E-1	-9.13081E0	-9.14207E0	5.53131E-3	9.30071E-2	2.73257E1	-3.26573E1	-3.26531E1	2.67848E1	1.70096E-8	2.52318E-3	2.52318E-3	6.29645E-3	2.52489E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16464E-1	-7.98416E-1	-9.13103E0	-9.14192E0	5.22137E-3	9.32932E-2	2.73213E1	-3.26561E1	-3.26362E1	2.67427E1	1.69738E-8	2.51847E-3	2.51847E-3	6.3074E-3	2.51924E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.16417E-1	-7.98154E-1	-9.13103E0	-9.14209E0	5.31673E-3	9.31263E-2	2.73267E1	-3.26627E1	-3.26248E1	2.67902E1	1.70096E-8	2.51552E-3	2.51552E-3	6.29645E-3	2.52709E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09364E0	-8.16584E-1	-7.98059E-1	-9.1311E0	-9.14202E0	4.88758E-3	9.33409E-2	2.73027E1	-3.26777E1	-3.2653E1	2.68522E1	1.69949E-8	2.52209E-3	2.52209E-3	6.28552E-3	2.52051E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.16727E-1	-7.98178E-1	-9.13103E0	-9.14218E0	5.05447E-3	9.31025E-2	2.73087E1	-3.26374E1	-3.25978E1	2.68719E1	1.70023E-8	2.5199E-3	2.5199E-3	6.34588E-3	2.51613E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16774E-1	-7.98416E-1	-9.13091E0	-9.14207E0	5.26905E-3	9.31263E-2	2.73511E1	-3.26756E1	-3.25009E1	2.66869E1	1.70173E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.49997E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09387E0	-8.16584E-1	-7.98678E-1	-9.13095E0	-9.14202E0	5.07832E-3	9.30548E-2	2.7301E1	-3.26502E1	-3.26496E1	2.67992E1	1.69949E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.51613E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16655E-1	-7.98798E-1	-9.13117E0	-9.14218E0	5.4121E-3	9.32455E-2	2.73099E1	-3.26434E1	-3.2611E1	2.68366E1	1.70173E-8	2.52061E-3	2.52061E-3	6.33977E-3	2.5021E-2