[Scan]
initial_time=2016-02-15T18:09:40
final_time=2016-02-15T18:10:00
ip_count=19
run=1030
dataset=2
scan=120
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=7.05373E-10
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=3.08251E-10
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=6.56283E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.6746E-10
mult1=-9.84219E-9
mult2=-2.61351E-9
rf_tmon=-4.9755E-3
rf_agc=3.361E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=3.86453E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6397E0
bslens_imon=2.53415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19598E1
lens5a_imon=1.98596E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53466E1
cs_ef1b_imon=2.97838E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05138E1
cs_ea1_imon=2.48416E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38458E0
lens1_imon=2.75765E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.54219E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.99351E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.1846E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=2.86665E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15366E1
os_ea1_imon=1.90376E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22446E0
cs_ionrep_imon=1.23324E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=3.05082E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=7.39408E-10
tplens_vset=1.4E-1
tplens_vmon=1.61199E0
tplens_imon=-1.94802E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26301E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.5941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98573E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.89421E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26952E0
ionrepsh_imon=1.87997E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33898E1
lens5b_imon=2.19612E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74357E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.53526E-1
os_ea2_imon=-3.49815E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06144E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.17623E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60116E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3916E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10685E1
os_restr2_imon=2.8753E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.31587E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.26047E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.08544E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.09422E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.03229E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=2.61974E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0941E0
cs_ionaccel_imon=-1.8915E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47338E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.73109E-6
window_vset=0.0E0
window_vmon=2.01125E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-6.91381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=6.98626E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.20256E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29329E0
defgridb_imon=6.10666E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33848E1
os_fil1_imon=4.55398E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.6654E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6629E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30764E1
cs_fil1_imon=1.00017E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61723E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66693E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02212E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.63806E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65922E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.48577E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.7582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22397E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.51709E-2
chamber_ion_pmon=1.70028E-8
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40058E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91127E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16584E-1	-7.98535E-1	-9.13107E0	-9.14216E0	5.17368E-3	9.31263E-2	2.73069E1	-3.26667E1	-3.2636E1	2.67619E1	1.7017E-8	2.52099E-3	2.52099E-3	6.33486E-3	2.51613E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16417E-1	-7.97963E-1	-9.13122E0	-9.14207E0	5.36442E-3	9.30786E-2	2.7301E1	-3.26708E1	-3.26213E1	2.68221E1	1.69955E-8	2.51525E-3	2.51525E-3	6.32896E-3	2.52354E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16751E-1	-7.98011E-1	-9.13098E0	-9.14187E0	5.34058E-3	9.31978E-2	2.73098E1	-3.26679E1	-3.2603E1	2.67475E1	1.701E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.5128E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16488E-1	-7.98559E-1	-9.13174E0	-9.14192E0	5.36442E-3	9.31978E-2	2.72974E1	-3.26744E1	-3.26431E1	2.6843E1	1.69955E-8	2.5131E-3	2.5131E-3	6.3074E-3	2.51494E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16417E-1	-7.9844E-1	-9.13131E0	-9.14197E0	5.17368E-3	9.29117E-2	2.73129E1	-3.26603E1	-3.26272E1	2.67662E1	1.70173E-8	2.52169E-3	2.52169E-3	6.29665E-3	2.52569E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.17013E-1	-7.98225E-1	-9.13119E0	-9.14214E0	5.57899E-3	9.34362E-2	2.73082E1	-3.26872E1	-3.26132E1	2.68202E1	1.70244E-8	2.52647E-3	2.52647E-3	6.32386E-3	2.50959E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16536E-1	-7.98464E-1	-9.13131E0	-9.14202E0	5.57899E-3	9.3317E-2	2.72856E1	-3.26579E1	-3.26024E1	2.67812E1	1.70092E-8	2.52027E-3	2.52027E-3	6.27954E-3	2.51514E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16584E-1	-7.98392E-1	-9.13122E0	-9.1419E0	5.65052E-3	9.33409E-2	2.72961E1	-3.26356E1	-3.26362E1	2.68209E1	1.70028E-8	2.52276E-3	2.52276E-3	6.3074E-3	2.50424E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16679E-1	-7.98988E-1	-9.13129E0	-9.14176E0	5.67436E-3	9.32932E-2	2.73123E1	-3.26446E1	-3.262E1	2.67932E1	1.69949E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.52709E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16846E-1	-7.98321E-1	-9.13117E0	-9.14173E0	5.4121E-3	9.32693E-2	2.73039E1	-3.26488E1	-3.265E1	2.68178E1	1.69949E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.52928E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16536E-1	-7.9813E-1	-9.13098E0	-9.14192E0	5.84126E-3	9.31978E-2	2.73309E1	-3.26735E1	-3.2608E1	2.68024E1	1.7017E-8	2.52867E-3	2.52867E-3	6.32936E-3	2.5227E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.1687E-1	-7.97892E-1	-9.13095E0	-9.14176E0	5.19753E-3	9.30548E-2	2.73159E1	-3.26567E1	-3.26254E1	2.6786E1	1.69949E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.51832E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16655E-1	-7.98178E-1	-9.13117E0	-9.14185E0	5.57899E-3	9.29832E-2	2.7311E1	-3.26809E1	-3.26077E1	2.68142E1	1.70023E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.50305E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16679E-1	-7.97987E-1	-9.13107E0	-9.14199E0	5.74589E-3	9.32932E-2	2.73216E1	-3.26658E1	-3.26505E1	2.67986E1	1.70173E-8	2.51847E-3	2.51847E-3	6.33977E-3	2.50424E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.16679E-1	-7.98321E-1	-9.13122E0	-9.14185E0	5.84126E-3	9.30309E-2	2.72998E1	-3.26514E1	-3.26467E1	2.67908E1	1.70092E-8	2.51915E-3	2.51915E-3	6.28511E-3	2.51737E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16751E-1	-7.98583E-1	-9.13105E0	-9.14195E0	5.57899E-3	9.30548E-2	2.73063E1	-3.26664E1	-3.2645E1	2.67589E1	1.70028E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.51494E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16941E-1	-7.97987E-1	-9.1311E0	-9.14237E0	5.53131E-3	9.31025E-2	2.73122E1	-3.26708E1	-3.26313E1	2.6801E1	1.70168E-8	2.51693E-3	2.51693E-3	6.31299E-3	2.51737E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16369E-1	-7.98368E-1	-9.13141E0	-9.14178E0	5.55515E-3	9.30786E-2	2.73664E1	-3.27393E1	-3.25511E1	2.68383E1	1.701E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.51066E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.1625E-1	-7.98583E-1	-9.13115E0	-9.14161E0	5.65052E-3	9.3317E-2	2.73165E1	-3.26428E1	-3.26188E1	2.67631E1	1.69955E-8	2.51739E-3	2.51739E-3	6.26985E-3	2.51066E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16298E-1	-7.98345E-1	-9.13136E0	-9.14202E0	5.67436E-3	9.32217E-2	2.73051E1	-3.26555E1	-3.26301E1	2.68196E1	1.70028E-8	2.51847E-3	2.51847E-3	6.3074E-3	2.51709E-2