[Scan]
initial_time=2016-02-15T18:11:27
final_time=2016-02-15T18:11:46
ip_count=19
run=1030
dataset=2
scan=124
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=6.96409E-10
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=3.04937E-10
ql3_vset=
ql3_vmon=-9.13074E0
ql3_imon=6.41871E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=5.29015E-10
mult1=-1.00655E-8
mult2=-2.6707E-9
rf_tmon=-5.81021E-3
rf_agc=3.22881E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=3.83735E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63009E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19869E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12514E2
lens4a_imon=2.05136E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.534E1
cs_ef1b_imon=2.98126E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05192E1
cs_ea1_imon=2.49065E-5
lens1_vset=-5.0E0
lens1_vmon=-5.399E0
lens1_imon=2.67474E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64969E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.53534E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8395E1
cs_ef1a_imon=2.98162E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=4.09198E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11544E1
os_restr1_imon=2.87278E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15474E1
os_ea1_imon=1.876E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=1.24297E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93571E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02145E1
cs_anode1_imon=3.05694E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=7.16531E-10
tplens_vset=1.4E-1
tplens_vmon=1.62461E0
tplens_imon=-2.56087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.50325E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26302E1
iondef2_imon=1.5786E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.07887E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23167E0
ionrepsh_imon=1.8897E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3385E1
lens5b_imon=2.16837E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74255E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.63139E-1
os_ea2_imon=-4.50754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00706E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71408E1
cs_ef2a_imon=3.19714E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59455E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73998E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=2.88215E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.32091E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01629E1
cs_anode2_imon=2.25182E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72853E1
iondef1_imon=1.09157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67523E1
iondef4_imon=1.05638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.03823E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=2.39658E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-1.69689E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47071E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56045E1
einzel_imon=7.89327E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-1.26081E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.54143E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.5789E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.25303E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52487E0
defgridb_imon=6.25085E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33886E1
os_fil1_imon=5.23272E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.07385E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66321E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30822E1
cs_fil1_imon=9.99453E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61267E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6692E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.93839E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56641E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.87019E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34645E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22491E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.51832E-2
chamber_ion_pmon=1.69949E-8
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.63206E-1
res40_imon=-2.65554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.16202E-1	-7.98011E-1	-9.13117E0	-9.14218E0	5.26905E-3	9.32932E-2	2.7308E1	-3.26691E1	-3.26384E1	2.6807E1	1.70244E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.50959E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09673E0	-8.16345E-1	-7.97653E-1	-9.13103E0	-9.14185E0	5.48363E-3	9.30786E-2	2.7299E1	-3.26627E1	-3.26383E1	2.67658E1	1.70028E-8	2.52492E-3	2.52492E-3	6.33436E-3	2.51494E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09719E0	-8.16202E-1	-7.97582E-1	-9.13074E0	-9.14207E0	5.29289E-3	9.33647E-2	2.73098E1	-3.26638E1	-3.2639E1	2.68059E1	1.70168E-8	2.51693E-3	2.51693E-3	6.31858E-3	2.51292E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.16154E-1	-7.97868E-1	-9.13093E0	-9.14168E0	5.26905E-3	9.32693E-2	2.73175E1	-3.26632E1	-3.26325E1	2.67451E1	1.70176E-8	2.51709E-3	2.51709E-3	6.31269E-3	2.51169E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16298E-1	-7.97629E-1	-9.13088E0	-9.14176E0	5.38826E-3	9.34124E-2	2.72835E1	-3.26747E1	-3.2623E1	2.68364E1	1.70023E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.50088E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.15797E-1	-7.97844E-1	-9.13091E0	-9.1418E0	5.34058E-3	9.29117E-2	2.73187E1	-3.26655E1	-3.26254E1	2.68214E1	1.70318E-8	2.52061E-3	2.52061E-3	6.32896E-3	2.52354E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16154E-1	-7.97844E-1	-9.13076E0	-9.14207E0	5.05447E-3	9.28402E-2	2.73051E1	-3.26753E1	-3.26164E1	2.67577E1	1.70023E-8	2.51443E-3	2.51443E-3	6.33486E-3	2.52051E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.1656E-1	-7.97629E-1	-9.13098E0	-9.14185E0	5.45979E-3	9.3174E-2	2.73255E1	-3.26783E1	-3.2638E1	2.67944E1	1.70244E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.50741E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16226E-1	-7.97701E-1	-9.13081E0	-9.14209E0	5.17368E-3	9.31263E-2	2.73021E1	-3.26464E1	-3.26224E1	2.68196E1	1.70023E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.52051E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16274E-1	-7.97892E-1	-9.13088E0	-9.14195E0	5.34058E-3	9.30786E-2	2.72805E1	-3.26543E1	-3.26284E1	2.6828E1	1.70246E-8	2.51847E-3	2.51847E-3	6.3074E-3	2.52785E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16321E-1	-7.97892E-1	-9.13122E0	-9.1418E0	5.26905E-3	9.31025E-2	2.73034E1	-3.26724E1	-3.26446E1	2.68499E1	1.70096E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.50305E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16441E-1	-7.98249E-1	-9.13131E0	-9.14166E0	5.4121E-3	9.3317E-2	2.73213E1	-3.26573E1	-3.26002E1	2.6789E1	1.69955E-8	2.51632E-3	2.51632E-3	6.3074E-3	2.5128E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16178E-1	-7.97772E-1	-9.13107E0	-9.14183E0	5.07832E-3	9.30309E-2	2.72841E1	-3.26723E1	-3.26374E1	2.68286E1	1.70062E-8	2.51809E-3	2.51809E-3	6.31827E-3	2.51445E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16369E-1	-7.9782E-1	-9.13126E0	-9.14195E0	5.31673E-3	9.34362E-2	2.7311E1	-3.26614E1	-3.26331E1	2.68586E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.1625E-1	-7.97772E-1	-9.131E0	-9.14192E0	4.93526E-3	9.3317E-2	2.72979E1	-3.265E1	-3.26212E1	2.67782E1	1.70096E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.5227E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16655E-1	-7.97796E-1	-9.13117E0	-9.14173E0	4.673E-3	9.29356E-2	2.73045E1	-3.26494E1	-3.2629E1	2.67776E1	1.69949E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.5227E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16631E-1	-7.97749E-1	-9.13091E0	-9.14173E0	5.38826E-3	9.29356E-2	2.73111E1	-3.26807E1	-3.2623E1	2.67914E1	1.7017E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.52051E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16441E-1	-7.97701E-1	-9.13091E0	-9.14237E0	5.17368E-3	9.29117E-2	2.72757E1	-3.26272E1	-3.26717E1	2.67879E1	1.70023E-8	2.52209E-3	2.52209E-3	6.32936E-3	2.51177E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16607E-1	-7.98321E-1	-9.13086E0	-9.14183E0	4.88758E-3	9.3174E-2	2.73234E1	-3.26602E1	-3.26437E1	2.67758E1	1.70246E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.52354E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16107E-1	-7.98297E-1	-9.13074E0	-9.14168E0	5.05447E-3	9.3174E-2	2.72853E1	-3.26302E1	-3.262E1	2.67523E1	1.69949E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.51832E-2