[Scan]
initial_time=2016-02-15T18:12:20
final_time=2016-02-15T18:12:40
ip_count=19
run=1030
dataset=2
scan=126
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08754E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=6.88219E-10
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=2.99537E-10
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=6.21223E-10
ql4_vset=
ql4_vmon=-9.14223E0
ql4_imon=5.57184E-10
mult1=-9.921E-9
mult2=-2.66072E-9
rf_tmon=-4.39827E-3
rf_agc=3.34477E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=4.00555E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6708E0
bslens_imon=2.51429E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19943E1
lens5a_imon=1.98808E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12521E2
lens4a_imon=2.05144E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=2.97928E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02307E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04878E1
cs_ea1_imon=2.47996E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38398E0
lens1_imon=2.6459E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64455E1
os_ef1alow_imon=2.98657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0412E1
cs_ea2_imon=1.55954E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.98252E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.1244E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=2.86062E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15332E1
os_ea1_imon=1.89651E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63518E1
os_ef1bup_imon=3.0874E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24981E0
cs_ionrep_imon=1.22888E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93541E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01824E1
cs_anode1_imon=3.05983E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.30932E-10
tplens_vset=1.4E-1
tplens_vmon=1.61493E0
tplens_imon=-3.53623E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.50306E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26338E1
iondef2_imon=1.58285E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.98541E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.06194E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26992E0
ionrepsh_imon=1.88417E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.19646E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.13064E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.46316E-1
os_ea2_imon=-5.62E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00557E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71451E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61317E0
os_ef2alow_imon=-2.59968E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56429E-1
os_ef2bup_imon=-5.3432E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10736E1
os_restr2_imon=2.88008E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.31217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01558E1
cs_anode2_imon=2.25731E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72937E1
iondef1_imon=1.09206E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.07233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.04289E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=2.65634E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1396E0
cs_ionaccel_imon=-1.89961E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47232E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.17943E-1
window_imon=-1.08331E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39233E-4
mask2_vset=0.0E0
mask2_vmon=-1.86389E1
mask2_imon=-6.88678E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.54823E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.35007E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.26857E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43355E0
defgridb_imon=6.32539E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33819E1
os_fil1_imon=4.63657E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.16846E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64937E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3077E1
cs_fil1_imon=1.00071E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61939E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66764E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.09932E-2
os_fil2_imon=-2.5173E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.56909E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75522E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.30107E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.4879E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22344E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.52051E-2
chamber_ion_pmon=1.70318E-8
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.61845E-1
res40_imon=-2.62401E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=266
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16655E-1	-7.97868E-1	-9.13115E0	-9.14192E0	5.43594E-3	9.30786E-2	2.73255E1	-3.26741E1	-3.2635E1	2.68004E1	1.7009E-8	2.52553E-3	2.52553E-3	6.32434E-3	2.51632E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16441E-1	-7.9782E-1	-9.131E0	-9.14209E0	5.22137E-3	9.30786E-2	2.73077E1	-3.26669E1	-3.26481E1	2.68021E1	1.69654E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.52051E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.16655E-1	-7.97915E-1	-9.13112E0	-9.14204E0	5.38826E-3	9.31025E-2	2.72973E1	-3.26536E1	-3.2629E1	2.67613E1	1.6984E-8	2.52029E-3	2.52029E-3	6.32518E-3	2.52849E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16226E-1	-7.98011E-1	-9.131E0	-9.14214E0	4.95911E-3	9.32455E-2	2.73003E1	-3.26398E1	-3.26416E1	2.6789E1	1.70246E-8	2.52492E-3	2.52492E-3	6.31278E-3	2.50638E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16154E-1	-7.97939E-1	-9.1311E0	-9.14209E0	5.48363E-3	9.33886E-2	2.73039E1	-3.26482E1	-3.26356E1	2.67824E1	1.70096E-8	2.51771E-3	2.51771E-3	6.34588E-3	2.51177E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.16417E-1	-7.97892E-1	-9.13079E0	-9.1419E0	5.31673E-3	9.31263E-2	2.73165E1	-3.26645E1	-3.26146E1	2.68142E1	1.70023E-8	2.5199E-3	2.5199E-3	6.33486E-3	2.51177E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16202E-1	-7.98059E-1	-9.13093E0	-9.14202E0	5.38826E-3	9.31978E-2	2.72805E1	-3.26621E1	-3.26086E1	2.6819E1	1.70096E-8	2.52154E-3	2.52154E-3	6.31014E-3	2.5227E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16441E-1	-7.97987E-1	-9.13105E0	-9.14226E0	5.14984E-3	9.29594E-2	2.72823E1	-3.26789E1	-3.26008E1	2.67962E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16393E-1	-7.98297E-1	-9.1311E0	-9.14214E0	5.36442E-3	9.30071E-2	2.73153E1	-3.26603E1	-3.26356E1	2.67794E1	1.70096E-8	2.52867E-3	2.52867E-3	6.31288E-3	2.51832E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16441E-1	-7.98106E-1	-9.13105E0	-9.14249E0	5.53131E-3	9.30071E-2	2.72895E1	-3.26585E1	-3.26416E1	2.678E1	1.69716E-8	2.52139E-3	2.52139E-3	6.33538E-3	2.5107E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16369E-1	-7.98035E-1	-9.131E0	-9.14209E0	5.48363E-3	9.30309E-2	2.73151E1	-3.26838E1	-3.26307E1	2.68341E1	1.70318E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.51395E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16107E-1	-7.98345E-1	-9.13105E0	-9.14211E0	5.126E-3	9.32455E-2	2.72824E1	-3.26578E1	-3.26456E1	2.6798E1	1.70028E-8	2.52492E-3	2.52492E-3	6.29665E-3	2.53649E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16011E-1	-7.97844E-1	-9.13098E0	-9.14214E0	5.05447E-3	9.32693E-2	2.72951E1	-3.26767E1	-3.2626E1	2.69061E1	1.70023E-8	2.52099E-3	2.52099E-3	6.33486E-3	2.51395E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16441E-1	-7.97844E-1	-9.13115E0	-9.1423E0	5.38826E-3	9.33886E-2	2.73155E1	-3.2655E1	-3.26417E1	2.67792E1	1.70096E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.50305E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16035E-1	-7.97844E-1	-9.13091E0	-9.14218E0	5.19753E-3	9.31978E-2	2.73051E1	-3.26336E1	-3.2619E1	2.67845E1	1.70104E-8	2.51919E-3	2.51919E-3	6.32328E-3	2.497E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16464E-1	-7.98035E-1	-9.13119E0	-9.14207E0	5.72205E-3	9.30786E-2	2.73081E1	-3.26735E1	-3.26062E1	2.67499E1	1.70241E-8	2.52293E-3	2.52293E-3	6.3245E-3	2.50732E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.16441E-1	-7.97987E-1	-9.13098E0	-9.14166E0	5.50747E-3	9.32217E-2	2.72684E1	-3.26687E1	-3.26464E1	2.68818E1	1.70244E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.50959E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16512E-1	-7.98392E-1	-9.13117E0	-9.14202E0	5.17368E-3	9.31025E-2	2.7308E1	-3.26787E1	-3.26057E1	2.67338E1	1.70017E-8	2.51804E-3	2.51804E-3	6.32978E-3	2.5107E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16345E-1	-7.98249E-1	-9.13115E0	-9.14216E0	5.26905E-3	9.33409E-2	2.73045E1	-3.26921E1	-3.26278E1	2.67421E1	1.70038E-8	2.51886E-3	2.51886E-3	6.3282E-3	2.52928E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16107E-1	-7.97987E-1	-9.13126E0	-9.14223E0	5.38826E-3	9.31263E-2	2.72937E1	-3.26338E1	-3.26549E1	2.6801E1	1.70318E-8	2.52647E-3	2.52647E-3	6.29645E-3	2.52051E-2