[Scan]
initial_time=2016-02-15T18:12:47
final_time=2016-02-15T18:13:06
ip_count=19
run=1030
dataset=2
scan=127
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=6.91831E-10
ql2_vset=
ql2_vmon=-7.97868E-1
ql2_imon=3.00109E-10
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=5.62406E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.61357E-10
mult1=-9.49936E-9
mult2=-2.70954E-9
rf_tmon=-4.60386E-3
rf_agc=3.35451E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.16315E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=1.98333E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05192E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=2.9845E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04776E1
cs_ea1_imon=2.50327E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37787E0
lens1_imon=2.69191E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.55647E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=3.00108E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=4.04179E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=2.85872E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15111E1
os_ea1_imon=1.87396E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.10632E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=1.23793E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93459E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=3.0519E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20597E0
olens4_imon=7.35652E-10
tplens_vset=1.4E-1
tplens_vmon=1.62551E0
tplens_imon=-3.59057E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26225E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26756E1
iondef2_imon=1.57948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02985E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.0828E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2928E0
ionrepsh_imon=1.89838E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34041E1
lens5b_imon=2.18649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.13551E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.60474E-1
os_ea2_imon=-5.18331E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.00478E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.17587E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62098E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43364E-1
os_ef2bup_imon=-5.17832E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=2.87674E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.30459E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01611E1
cs_anode2_imon=2.26443E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73122E1
iondef1_imon=1.09175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67468E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.05021E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=3.04401E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-1.83023E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56513E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.3296E-1
window_imon=-1.13827E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.08786E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.79055E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.39933E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43804E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33831E1
os_fil1_imon=5.11259E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.78263E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64871E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30814E1
cs_fil1_imon=1.00184E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6236E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66709E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12929E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.35886E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6572E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.64795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.55687E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22306E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.5227E-2
chamber_ion_pmon=1.70244E-8
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.07946E-1
res40_imon=-2.80331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16393E-1	-7.97772E-1	-9.13088E0	-9.14202E0	5.22137E-3	9.28402E-2	2.73021E1	-3.26543E1	-3.26301E1	2.68603E1	1.69875E-8	2.52538E-3	2.52538E-3	6.31288E-3	2.51395E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.16512E-1	-7.97343E-1	-9.13098E0	-9.1419E0	5.4121E-3	9.30309E-2	2.73088E1	-3.26548E1	-3.26291E1	2.66242E1	1.70028E-8	2.52384E-3	2.52384E-3	6.29665E-3	2.52785E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16298E-1	-7.98035E-1	-9.13091E0	-9.14214E0	5.43594E-3	9.3317E-2	2.73086E1	-3.26708E1	-3.26219E1	2.68551E1	1.69867E-8	2.52027E-3	2.52027E-3	6.32418E-3	2.51737E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.15821E-1	-7.98082E-1	-9.13086E0	-9.14223E0	4.93526E-3	9.33886E-2	2.73004E1	-3.26838E1	-3.26089E1	2.66838E1	1.70246E-8	2.51739E-3	2.51739E-3	6.33436E-3	2.52354E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16178E-1	-7.98225E-1	-9.13095E0	-9.14211E0	5.07832E-3	9.30309E-2	2.73285E1	-3.26705E1	-3.2629E1	2.68265E1	1.69955E-8	2.51417E-3	2.51417E-3	6.32356E-3	2.53E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16059E-1	-7.98154E-1	-9.13107E0	-9.14228E0	5.126E-3	9.31025E-2	2.72898E1	-3.26679E1	-3.26484E1	2.67878E1	1.70246E-8	2.52599E-3	2.52599E-3	6.31817E-3	2.50424E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16369E-1	-7.97915E-1	-9.13088E0	-9.14223E0	5.05447E-3	9.31978E-2	2.73057E1	-3.26458E1	-3.26074E1	2.6846E1	1.70173E-8	2.51847E-3	2.51847E-3	6.3074E-3	2.51924E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.16226E-1	-7.97939E-1	-9.13129E0	-9.14242E0	5.31673E-3	9.34601E-2	2.73219E1	-3.26651E1	-3.26182E1	2.67818E1	1.70023E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.50523E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.15821E-1	-7.97915E-1	-9.13122E0	-9.14221E0	5.17368E-3	9.30786E-2	2.72908E1	-3.26392E1	-3.262E1	2.68309E1	1.70243E-8	2.5225E-3	2.5225E-3	6.31858E-3	2.51292E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.1594E-1	-7.97749E-1	-9.13105E0	-9.1423E0	5.45979E-3	9.34362E-2	2.72811E1	-3.26705E1	-3.262E1	2.68016E1	1.70185E-8	2.51694E-3	2.51694E-3	6.31727E-3	2.52336E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16035E-1	-7.98225E-1	-9.13093E0	-9.14233E0	4.88758E-3	9.3317E-2	2.73311E1	-3.26608E1	-3.26225E1	2.67301E1	1.70023E-8	2.52209E-3	2.52209E-3	6.32936E-3	2.52051E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16202E-1	-7.97915E-1	-9.131E0	-9.14202E0	5.07832E-3	9.31263E-2	2.73141E1	-3.26482E1	-3.26392E1	2.67986E1	1.70028E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.51066E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16298E-1	-7.98035E-1	-9.13129E0	-9.14233E0	5.26905E-3	9.29832E-2	2.73051E1	-3.26868E1	-3.26172E1	2.6795E1	1.7017E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.51613E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16107E-1	-7.97892E-1	-9.13095E0	-9.14235E0	5.24521E-3	9.30786E-2	2.73183E1	-3.26675E1	-3.26278E1	2.6796E1	1.7017E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.51395E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.15868E-1	-7.98082E-1	-9.13131E0	-9.14228E0	5.17368E-3	9.32217E-2	2.72979E1	-3.2644E1	-3.26188E1	2.67862E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.51832E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16464E-1	-7.97844E-1	-9.13134E0	-9.14211E0	5.34058E-3	9.31501E-2	2.73171E1	-3.26741E1	-3.26464E1	2.68088E1	1.70318E-8	2.5188E-3	2.5188E-3	6.28552E-3	2.52489E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.16298E-1	-7.97558E-1	-9.13143E0	-9.14216E0	5.22137E-3	9.30309E-2	2.72955E1	-3.26771E1	-3.26645E1	2.68208E1	1.70028E-8	2.51525E-3	2.51525E-3	6.28592E-3	2.51709E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.15797E-1	-7.97677E-1	-9.13122E0	-9.14211E0	5.34058E-3	9.30548E-2	2.73005E1	-3.26619E1	-3.2633E1	2.68447E1	1.69949E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.53148E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16226E-1	-7.98059E-1	-9.13084E0	-9.14214E0	4.95911E-3	9.28402E-2	2.73057E1	-3.2664E1	-3.26487E1	2.67583E1	1.70028E-8	2.51847E-3	2.51847E-3	6.32896E-3	2.53432E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16298E-1	-7.97868E-1	-9.13107E0	-9.14216E0	5.29289E-3	9.31978E-2	2.73122E1	-3.26756E1	-3.26225E1	2.67468E1	1.70244E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.5227E-2