[Scan]
initial_time=2016-02-15T18:13:13
final_time=2016-02-15T18:25:12
ip_count=19
run=1030
dataset=2
scan=128
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=6.82366E-10
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=3.44968E-10
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=5.53918E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=5.58269E-10
mult1=-9.74039E-9
mult2=-2.78448E-9
rf_tmon=-3.97168E-3
rf_agc=3.35799E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=4.12905E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6409E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.98307E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05161E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53694E1
cs_ef1b_imon=2.97657E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05054E1
cs_ea1_imon=2.51408E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41161E0
lens1_imon=2.71079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.55733E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=2.98594E-5
olens2_vset=9.7E-1
olens2_vmon=9.70674E-1
olens2_imon=4.22704E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=2.86918E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15528E1
os_ea1_imon=1.87997E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=1.23252E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=3.04685E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=7.42304E-10
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-4.21914E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.4964E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.584E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02971E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.14634E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25811E0
ionrepsh_imon=1.86807E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33778E1
lens5b_imon=2.19324E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.72752E-1
os_ea2_imon=-4.50754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.19389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60476E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.26546E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=2.86918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.2565E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.0876E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.04133E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=3.35681E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-1.87348E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.67342E-6
window_vset=0.0E0
window_vmon=2.2395E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-7.49045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.54503E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.3554E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.07639E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51886E0
defgridb_imon=5.97327E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33846E1
os_fil1_imon=4.30771E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.29299E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65051E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30789E1
cs_fil1_imon=1.00089E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62762E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66571E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.99846E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53548E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.25752E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22231E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.50959E-2
chamber_ion_pmon=1.70023E-8
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.47589E-1
res40_imon=-2.7096E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16655E-1	-7.97725E-1	-9.13093E0	-9.14209E0	5.126E-3	9.31025E-2	2.73151E1	-3.26773E1	-3.26325E1	2.67427E1	1.70244E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.52489E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16512E-1	-7.97987E-1	-9.13122E0	-9.14185E0	5.10216E-3	9.32693E-2	2.73326E1	-3.26511E1	-3.26334E1	2.68544E1	1.69738E-8	2.51739E-3	2.51739E-3	6.29665E-3	2.51924E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16441E-1	-7.9844E-1	-9.13129E0	-9.14204E0	5.29289E-3	9.33409E-2	2.72766E1	-3.26585E1	-3.26294E1	2.67802E1	1.70243E-8	2.51804E-3	2.51804E-3	6.32418E-3	2.52854E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16035E-1	-7.98321E-1	-9.13155E0	-9.14199E0	5.14984E-3	9.3317E-2	2.72955E1	-3.26633E1	-3.26224E1	2.67169E1	1.70104E-8	2.52342E-3	2.52342E-3	6.32858E-3	2.52012E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.15964E-1	-7.98202E-1	-9.1311E0	-9.14228E0	5.55515E-3	9.33409E-2	2.73016E1	-3.26673E1	-3.26148E1	2.68677E1	1.70028E-8	2.51632E-3	2.51632E-3	6.3074E-3	2.51066E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16154E-1	-7.98202E-1	-9.13124E0	-9.14221E0	5.22137E-3	9.33409E-2	2.72739E1	-3.26603E1	-3.26236E1	2.67968E1	1.70096E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.50523E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16011E-1	-7.98631E-1	-9.13107E0	-9.1423E0	5.26905E-3	9.34124E-2	2.72727E1	-3.26663E1	-3.25966E1	2.6807E1	1.70023E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.51613E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16083E-1	-7.98273E-1	-9.13107E0	-9.14211E0	5.36442E-3	9.30548E-2	2.73234E1	-3.26549E1	-3.26337E1	2.6792E1	1.69955E-8	2.52061E-3	2.52061E-3	6.33977E-3	2.51924E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.16345E-1	-7.98512E-1	-9.13107E0	-9.14204E0	5.05447E-3	9.32217E-2	2.72925E1	-3.26681E1	-3.26002E1	2.6818E1	1.70244E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.51177E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16274E-1	-7.98011E-1	-9.13072E0	-9.14207E0	5.00679E-3	9.29832E-2	2.73033E1	-3.26723E1	-3.26098E1	2.67992E1	1.70318E-8	2.51443E-3	2.51443E-3	6.34588E-3	2.51395E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16512E-1	-7.98082E-1	-9.13093E0	-9.1419E0	5.26905E-3	9.33647E-2	2.73051E1	-3.26651E1	-3.2632E1	2.6834E1	1.701E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.51494E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.16321E-1	-7.97939E-1	-9.13103E0	-9.14216E0	5.36442E-3	9.32217E-2	2.72998E1	-3.26726E1	-3.26496E1	2.67962E1	1.70318E-8	2.52209E-3	2.52209E-3	6.29098E-3	2.51613E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16345E-1	-7.98202E-1	-9.13131E0	-9.14202E0	5.38826E-3	9.31978E-2	2.73003E1	-3.26506E1	-3.26344E1	2.67505E1	1.70023E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.52709E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16607E-1	-7.98178E-1	-9.13131E0	-9.14183E0	5.55515E-3	9.34124E-2	2.73448E1	-3.26783E1	-3.26362E1	2.68172E1	1.70059E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.51942E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16536E-1	-7.98202E-1	-9.13155E0	-9.14195E0	5.34058E-3	9.32217E-2	2.73231E1	-3.26723E1	-3.26416E1	2.67668E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16417E-1	-7.98154E-1	-9.13126E0	-9.14226E0	5.36442E-3	9.34124E-2	2.73051E1	-3.26771E1	-3.26284E1	2.67866E1	1.70173E-8	2.52061E-3	2.52061E-3	6.28056E-3	2.53E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16631E-1	-7.97796E-1	-9.13153E0	-9.14185E0	5.126E-3	9.3317E-2	2.73222E1	-3.2672E1	-3.26219E1	2.67364E1	1.7017E-8	2.52647E-3	2.52647E-3	6.31837E-3	2.50523E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16631E-1	-7.97582E-1	-9.13153E0	-9.1419E0	5.26905E-3	9.29117E-2	2.73151E1	-3.26649E1	-3.26172E1	2.68316E1	1.70173E-8	2.51525E-3	2.51525E-3	6.32356E-3	2.53432E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16226E-1	-7.97796E-1	-9.13148E0	-9.14195E0	5.14984E-3	9.32217E-2	2.73116E1	-3.26531E1	-3.26502E1	2.67943E1	1.69955E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.5128E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16488E-1	-7.98178E-1	-9.13095E0	-9.14211E0	5.72205E-3	9.31978E-2	2.73225E1	-3.26627E1	-3.26242E1	2.68094E1	1.70023E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.50959E-2