[Scan]
initial_time=2016-02-15T18:25:19
final_time=2016-02-15T18:25:39
ip_count=19
run=1030
dataset=2
scan=129
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.0879E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=6.84631E-10
ql2_vset=
ql2_vmon=-7.98106E-1
ql2_imon=3.26359E-10
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=6.22773E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.54764E-10
mult1=-9.85557E-9
mult2=-2.77277E-9
rf_tmon=-3.26055E-3
rf_agc=3.43629E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=4.02105E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65773E0
bslens_imon=2.49089E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19905E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05133E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53472E1
cs_ef1b_imon=2.97045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02063E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=2.50255E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38398E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0381E1
cs_ea2_imon=1.55624E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=2.98378E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=4.04632E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=2.87566E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=1.89908E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63365E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=1.22134E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93525E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=3.06019E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=7.6232E-10
tplens_vset=1.4E-1
tplens_vmon=1.61019E0
tplens_imon=-2.09222E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.48703E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.58184E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98407E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.10283E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=1.87997E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3391E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54127E-1
os_ea2_imon=-5.33668E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00673E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.19353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6336E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.33754E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.31226E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.25974E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68107E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.0285E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=2.75683E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-1.87348E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.47071E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=1.90313E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.63155E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=7.38281E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50081E0
defgridb_imon=6.18236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33819E1
os_fil1_imon=3.89325E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.03471E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6492E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30764E1
cs_fil1_imon=9.99849E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61921E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66942E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.95763E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.578E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71207E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22372E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.52569E-2
chamber_ion_pmon=1.70173E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.59002E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.16321E-1	-7.97653E-1	-9.13141E0	-9.14216E0	5.48363E-3	9.31025E-2	2.73069E1	-3.26549E1	-3.26152E1	2.67938E1	1.69955E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.53216E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.16369E-1	-7.98011E-1	-9.13115E0	-9.14202E0	5.24521E-3	9.28402E-2	2.73039E1	-3.26771E1	-3.26278E1	2.67553E1	1.70023E-8	2.52099E-3	2.52099E-3	6.32936E-3	2.51832E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.16035E-1	-7.9813E-1	-9.13138E0	-9.14209E0	5.26905E-3	9.31025E-2	2.73175E1	-3.2662E1	-3.26313E1	2.6792E1	1.70096E-8	2.52045E-3	2.52045E-3	6.30192E-3	2.51723E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.15797E-1	-7.97749E-1	-9.13107E0	-9.14202E0	5.24521E-3	9.31978E-2	2.73117E1	-3.26254E1	-3.26338E1	2.6828E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16035E-1	-7.98082E-1	-9.1311E0	-9.1419E0	5.50747E-3	9.3174E-2	2.73153E1	-3.2647E1	-3.26296E1	2.6786E1	1.70246E-8	2.52169E-3	2.52169E-3	6.30202E-3	2.51924E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.1594E-1	-7.98297E-1	-9.13122E0	-9.14218E0	5.29289E-3	9.30071E-2	2.72997E1	-3.26579E1	-3.26092E1	2.68148E1	1.70023E-8	2.52538E-3	2.52538E-3	6.30192E-3	2.51395E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.15964E-1	-7.98106E-1	-9.13098E0	-9.14211E0	5.45979E-3	9.30071E-2	2.72799E1	-3.26344E1	-3.26266E1	2.68472E1	1.70023E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.50523E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.16178E-1	-7.97653E-1	-9.13124E0	-9.14185E0	5.36442E-3	9.26018E-2	2.72991E1	-3.26801E1	-3.26567E1	2.6783E1	1.7017E-8	2.52867E-3	2.52867E-3	6.31837E-3	2.51613E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09325E0	-8.16011E-1	-7.97844E-1	-9.13119E0	-9.1418E0	5.26905E-3	9.29117E-2	2.73207E1	-3.26536E1	-3.26332E1	2.67284E1	1.70096E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.5227E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09371E0	-8.16488E-1	-7.97844E-1	-9.13115E0	-9.14185E0	5.10216E-3	9.29117E-2	2.73069E1	-3.26374E1	-3.26386E1	2.68599E1	1.70168E-8	2.52139E-3	2.52139E-3	6.34099E-3	2.50847E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16512E-1	-7.97892E-1	-9.13131E0	-9.1418E0	4.98295E-3	9.30548E-2	2.73009E1	-3.26669E1	-3.26098E1	2.6814E1	1.69949E-8	2.51225E-3	2.51225E-3	6.32386E-3	2.52928E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16369E-1	-7.97987E-1	-9.13091E0	-9.14223E0	4.93526E-3	9.29356E-2	2.73159E1	-3.2653E1	-3.26446E1	2.67025E1	1.69811E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.52569E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.16607E-1	-7.98297E-1	-9.13126E0	-9.14199E0	5.126E-3	9.29594E-2	2.73364E1	-3.26531E1	-3.2659E1	2.69001E1	1.69949E-8	2.53087E-3	2.53087E-3	6.31288E-3	2.5227E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.16345E-1	-7.98297E-1	-9.13115E0	-9.14192E0	5.34058E-3	9.32932E-2	2.73291E1	-3.26747E1	-3.2629E1	2.66652E1	1.70173E-8	2.51203E-3	2.51203E-3	6.3074E-3	2.5128E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16178E-1	-7.97749E-1	-9.13129E0	-9.14202E0	5.36442E-3	9.31263E-2	2.73003E1	-3.26422E1	-3.26386E1	2.68995E1	1.69949E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.51832E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16035E-1	-7.98202E-1	-9.13136E0	-9.1418E0	5.17368E-3	9.3317E-2	2.73303E1	-3.26609E1	-3.2617E1	2.67686E1	1.70096E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.51613E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16011E-1	-7.98249E-1	-9.13095E0	-9.14195E0	5.26905E-3	9.32693E-2	2.72817E1	-3.2638E1	-3.26458E1	2.67577E1	1.69801E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.51395E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.1656E-1	-7.98202E-1	-9.13129E0	-9.14211E0	5.29289E-3	9.2864E-2	2.7298E1	-3.26738E1	-3.26378E1	2.68112E1	1.70244E-8	2.51771E-3	2.51771E-3	6.34037E-3	2.50741E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16607E-1	-7.97844E-1	-9.13105E0	-9.14185E0	5.48363E-3	9.29832E-2	2.73063E1	-3.26753E1	-3.26422E1	2.68215E1	1.7017E-8	2.52428E-3	2.52428E-3	6.34588E-3	2.52489E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.16536E-1	-7.98106E-1	-9.1311E0	-9.14197E0	5.22137E-3	9.30786E-2	2.73051E1	-3.26585E1	-3.26119E1	2.68107E1	1.70173E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.52569E-2