[Scan]
initial_time=2016-02-15T18:27:06
final_time=2016-02-15T18:27:25
ip_count=19
run=1030
dataset=2
scan=133
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08728E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=6.97577E-10
ql2_vset=
ql2_vmon=-7.97629E-1
ql2_imon=3.12209E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=5.56695E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.69928E-10
mult1=-9.40478E-9
mult2=-2.76833E-9
rf_tmon=-4.9401E-3
rf_agc=3.25304E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=4.32754E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6361E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20079E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53462E1
cs_ef1b_imon=2.97017E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05126E1
cs_ea1_imon=2.48849E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35754E0
lens1_imon=2.78289E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64746E1
os_ef1alow_imon=2.97466E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04213E1
cs_ea2_imon=1.5667E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84288E1
cs_ef1a_imon=2.9915E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.87049E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11579E1
os_restr1_imon=2.88559E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=1.89223E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63579E1
os_ef1bup_imon=3.07085E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27613E0
cs_ionrep_imon=1.20801E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01884E1
cs_anode1_imon=3.06748E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=7.31266E-10
tplens_vset=1.4E-1
tplens_vmon=1.59817E0
tplens_imon=-2.48877E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.48955E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2672E1
iondef2_imon=1.59229E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98393E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.09997E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30677E0
ionrepsh_imon=1.88862E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33832E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.11014E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.73954E-1
os_ea2_imon=-4.61569E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.19248E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.5991E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.20909E-1
os_ef2bup_imon=-5.30266E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=2.8665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.32127E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01846E1
cs_anode2_imon=2.25983E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73145E1
iondef1_imon=1.10274E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67529E1
iondef4_imon=1.0884E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.0535E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=3.11339E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11579E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47065E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56012E1
einzel_imon=7.56059E-6
window_vset=0.0E0
window_vmon=1.90775E-1
window_imon=-1.03237E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-7.1051E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=6.84928E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.60774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.19896E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33837E1
os_fil1_imon=4.54196E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.14108E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65039E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30826E1
cs_fil1_imon=1.00215E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62521E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66879E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.03502E-2
os_fil2_imon=-2.43795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.74433E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73527E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34223E-1
cs_fil2_imon=-2.02626E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.877E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2242E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.51832E-2
chamber_ion_pmon=1.70023E-8
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.36731E-1
res40_imon=-2.42835E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16417E-1	-7.97653E-1	-9.13107E0	-9.14204E0	5.14984E-3	9.33409E-2	2.72823E1	-3.26717E1	-3.26266E1	2.68412E1	1.7017E-8	2.52867E-3	2.52867E-3	6.30192E-3	2.51832E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16393E-1	-7.97653E-1	-9.13062E0	-9.1418E0	5.38826E-3	9.3317E-2	2.7321E1	-3.26664E1	-3.2634E1	2.6855E1	1.69949E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.51395E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16846E-1	-7.97939E-1	-9.13093E0	-9.1419E0	5.22137E-3	9.31978E-2	2.73138E1	-3.26637E1	-3.26364E1	2.6737E1	1.70017E-8	2.5225E-3	2.5225E-3	6.31299E-3	2.52407E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16679E-1	-7.97653E-1	-9.13103E0	-9.14192E0	5.57899E-3	9.32455E-2	2.73147E1	-3.26518E1	-3.26296E1	2.68623E1	1.70033E-8	2.51709E-3	2.51709E-3	6.3074E-3	2.51801E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.15988E-1	-7.97653E-1	-9.13112E0	-9.14216E0	5.38826E-3	9.3174E-2	2.72841E1	-3.26609E1	-3.26272E1	2.67674E1	1.70244E-8	2.5199E-3	2.5199E-3	6.29098E-3	2.52051E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16393E-1	-7.97558E-1	-9.13119E0	-9.14221E0	5.22137E-3	9.31263E-2	2.72874E1	-3.26543E1	-3.26608E1	2.67677E1	1.7017E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.51613E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16274E-1	-7.97987E-1	-9.13129E0	-9.14204E0	5.4121E-3	9.30548E-2	2.73063E1	-3.26303E1	-3.26229E1	2.67895E1	1.701E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.51494E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16178E-1	-7.97892E-1	-9.13112E0	-9.14187E0	5.34058E-3	9.30786E-2	2.73033E1	-3.26843E1	-3.26146E1	2.68587E1	1.69867E-8	2.52473E-3	2.52473E-3	6.34099E-3	2.52854E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16202E-1	-7.98035E-1	-9.13136E0	-9.14192E0	5.50747E-3	9.27687E-2	2.72696E1	-3.26669E1	-3.26008E1	2.67151E1	1.70096E-8	2.51225E-3	2.51225E-3	6.31837E-3	2.52489E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16512E-1	-7.97796E-1	-9.13098E0	-9.14187E0	5.17368E-3	9.31263E-2	2.73277E1	-3.26509E1	-3.26069E1	2.68922E1	1.7017E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.50305E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16441E-1	-7.97892E-1	-9.13112E0	-9.14199E0	5.29289E-3	9.31978E-2	2.73375E1	-3.26585E1	-3.2626E1	2.67139E1	1.69891E-8	2.52131E-3	2.52131E-3	6.31798E-3	2.51379E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16154E-1	-7.97987E-1	-9.13086E0	-9.1418E0	5.14984E-3	9.29356E-2	2.73147E1	-3.26669E1	-3.262E1	2.67938E1	1.70017E-8	2.51693E-3	2.51693E-3	6.29624E-3	2.52407E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16393E-1	-7.98059E-1	-9.13117E0	-9.14199E0	5.48363E-3	9.29832E-2	2.73446E1	-3.26891E1	-3.26065E1	2.68941E1	1.70244E-8	2.52867E-3	2.52867E-3	6.28552E-3	2.51177E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16584E-1	-7.97796E-1	-9.13088E0	-9.14195E0	5.60284E-3	9.29832E-2	2.731E1	-3.26487E1	-3.2626E1	2.66935E1	1.70028E-8	2.52707E-3	2.52707E-3	6.30202E-3	2.51066E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16393E-1	-7.97939E-1	-9.13119E0	-9.14202E0	5.43594E-3	9.32455E-2	2.73098E1	-3.26537E1	-3.2639E1	2.66544E1	1.70092E-8	2.51804E-3	2.51804E-3	6.28511E-3	2.50626E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16298E-1	-7.97725E-1	-9.13134E0	-9.14204E0	5.03063E-3	9.32217E-2	2.73225E1	-3.26585E1	-3.26306E1	2.69171E1	1.70028E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.52139E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16321E-1	-7.97653E-1	-9.13107E0	-9.14161E0	5.22137E-3	9.3317E-2	2.73045E1	-3.26372E1	-3.2631E1	2.67508E1	1.70104E-8	2.51814E-3	2.51814E-3	6.30212E-3	2.51801E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16393E-1	-7.97677E-1	-9.13107E0	-9.14199E0	5.19753E-3	9.33647E-2	2.7324E1	-3.26555E1	-3.26437E1	2.68389E1	1.70005E-8	2.5199E-3	2.5199E-3	6.32483E-3	2.51074E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16059E-1	-7.97534E-1	-9.13117E0	-9.14168E0	5.38826E-3	9.36031E-2	2.73123E1	-3.26669E1	-3.2608E1	2.68052E1	1.70176E-8	2.51498E-3	2.51498E-3	6.32328E-3	2.52223E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16417E-1	-7.97629E-1	-9.13117E0	-9.14195E0	5.34058E-3	9.3317E-2	2.73145E1	-3.2672E1	-3.26236E1	2.67529E1	1.70023E-8	2.52209E-3	2.52209E-3	6.29645E-3	2.51832E-2