[Scan]
initial_time=2016-02-15T18:27:32
final_time=2016-02-15T18:27:52
ip_count=19
run=1030
dataset=2
scan=134
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08751E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=6.81913E-10
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=2.97725E-10
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=6.29735E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=5.6181E-10
mult1=-9.55978E-9
mult2=-2.77251E-9
rf_tmon=-4.23004E-3
rf_agc=3.33336E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.92032E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=2.98162E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=2.49858E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37797E0
lens1_imon=2.59543E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03937E1
cs_ea2_imon=1.55985E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.98955E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=3.91853E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=2.87819E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=1.89259E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27072E0
cs_ionrep_imon=1.23216E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93553E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=3.05658E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=7.48861E-10
tplens_vset=1.4E-1
tplens_vmon=1.63482E0
tplens_imon=-1.29913E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.48703E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.60059E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98605E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=4.02606E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28574E0
ionrepsh_imon=1.89042E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.64942E-1
os_ea2_imon=-3.5342E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61437E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4877E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=2.87999E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.25722E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.09229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.98736E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=2.68221E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56537E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=1.72293E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82673E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.21698E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.51762E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.28187E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56097E0
defgridb_imon=6.18957E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33818E1
os_fil1_imon=5.73728E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.53326E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64914E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30798E1
cs_fil1_imon=9.9902E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62804E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66998E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93184E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.15753E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83968E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22473E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.51177E-2
chamber_ion_pmon=1.7017E-8
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.71305E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.16154E-1	-7.97963E-1	-9.13115E0	-9.14171E0	5.24521E-3	9.32693E-2	2.72987E1	-3.26359E1	-3.25976E1	2.68024E1	1.70096E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.5227E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16679E-1	-7.97844E-1	-9.13126E0	-9.14149E0	5.00679E-3	9.35316E-2	2.728E1	-3.26554E1	-3.26578E1	2.67801E1	1.70104E-8	2.52659E-3	2.52659E-3	6.3074E-3	2.50119E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16417E-1	-7.97844E-1	-9.13112E0	-9.14171E0	5.24521E-3	9.32932E-2	2.73252E1	-3.26472E1	-3.26148E1	2.67439E1	1.70168E-8	2.51581E-3	2.51581E-3	6.34099E-3	2.50626E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16178E-1	-7.98059E-1	-9.131E0	-9.1419E0	5.26905E-3	9.35316E-2	2.73139E1	-3.26632E1	-3.26012E1	2.68094E1	1.70028E-8	2.51203E-3	2.51203E-3	6.31278E-3	2.50638E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16751E-1	-7.97987E-1	-9.131E0	-9.14202E0	5.126E-3	9.32693E-2	2.73045E1	-3.26657E1	-3.26272E1	2.66887E1	1.70028E-8	2.51203E-3	2.51203E-3	6.32356E-3	2.52569E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16679E-1	-7.98488E-1	-9.13119E0	-9.14199E0	5.53131E-3	9.35555E-2	2.73057E1	-3.26644E1	-3.26012E1	2.6869E1	1.70318E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.50741E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16107E-1	-7.98011E-1	-9.13103E0	-9.14187E0	5.72205E-3	9.35078E-2	2.73105E1	-3.26554E1	-3.26284E1	2.67451E1	1.70028E-8	2.51632E-3	2.51632E-3	6.3074E-3	2.5021E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16178E-1	-7.97987E-1	-9.1311E0	-9.14183E0	5.43594E-3	9.35078E-2	2.73234E1	-3.26579E1	-3.26384E1	2.68989E1	1.70023E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.50741E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16536E-1	-7.98059E-1	-9.13117E0	-9.14204E0	5.62668E-3	9.32932E-2	2.73039E1	-3.26517E1	-3.26383E1	2.6813E1	1.70028E-8	2.52276E-3	2.52276E-3	6.33977E-3	2.51066E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.15821E-1	-7.98011E-1	-9.13143E0	-9.14187E0	5.45979E-3	9.35555E-2	2.72939E1	-3.26573E1	-3.26213E1	2.67974E1	1.70244E-8	2.50898E-3	2.50898E-3	6.30192E-3	2.52709E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16178E-1	-7.97892E-1	-9.1315E0	-9.14221E0	5.53131E-3	9.3317E-2	2.72997E1	-3.26549E1	-3.2632E1	2.68833E1	1.7017E-8	2.51334E-3	2.51334E-3	6.31288E-3	2.50523E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.16822E-1	-7.97725E-1	-9.1311E0	-9.14183E0	5.26905E-3	9.32217E-2	2.72919E1	-3.27101E1	-3.26188E1	2.67674E1	1.7017E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.50305E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.1625E-1	-7.97725E-1	-9.13129E0	-9.14207E0	5.31673E-3	9.31978E-2	2.73271E1	-3.26805E1	-3.26266E1	2.68773E1	1.7017E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.5227E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16393E-1	-7.98297E-1	-9.13112E0	-9.14209E0	5.05447E-3	9.33886E-2	2.73021E1	-3.26717E1	-3.26422E1	2.67619E1	1.69875E-8	2.52428E-3	2.52428E-3	6.34588E-3	2.52709E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-8.16488E-1	-7.97915E-1	-9.13119E0	-9.14204E0	5.67436E-3	9.32932E-2	2.72968E1	-3.26543E1	-3.26555E1	2.67379E1	1.7017E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.51613E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.16536E-1	-7.9844E-1	-9.13103E0	-9.14199E0	5.24521E-3	9.33886E-2	2.72835E1	-3.26765E1	-3.26194E1	2.67097E1	1.70023E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.51395E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16274E-1	-7.97963E-1	-9.13093E0	-9.14171E0	4.98295E-3	9.32693E-2	2.73279E1	-3.26765E1	-3.2602E1	2.68683E1	1.70096E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.52051E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16202E-1	-7.97892E-1	-9.13138E0	-9.14221E0	5.14984E-3	9.34839E-2	2.73183E1	-3.26621E1	-3.26218E1	2.68322E1	1.69949E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.52928E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.1656E-1	-7.98082E-1	-9.13124E0	-9.14195E0	5.22137E-3	9.30786E-2	2.73015E1	-3.26579E1	-3.26158E1	2.67091E1	1.70023E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.51613E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.16298E-1	-7.98059E-1	-9.13129E0	-9.1419E0	5.07832E-3	9.29117E-2	2.73105E1	-3.26657E1	-3.2635E1	2.67926E1	1.7017E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.51177E-2