[Scan]
initial_time=2016-02-15T18:28:25
final_time=2016-02-15T18:28:45
ip_count=19
run=1030
dataset=2
scan=136
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=6.71101E-10
ql2_vset=
ql2_vmon=-7.97439E-1
ql2_imon=3.26681E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=5.60284E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.59974E-10
mult1=-9.6561E-9
mult2=-2.76053E-9
rf_tmon=-4.57251E-3
rf_agc=3.39164E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.50747E-3
ql5_imon=3.76379E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68932E0
bslens_imon=2.4696E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20166E1
lens5a_imon=1.98868E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05207E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53492E1
cs_ef1b_imon=2.98151E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.02286E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05368E1
cs_ea1_imon=2.50804E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3695E0
lens1_imon=2.77078E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64862E1
os_ef1alow_imon=2.98114E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03782E1
cs_ea2_imon=1.56739E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83406E1
cs_ef1a_imon=2.97894E-5
olens2_vset=9.7E-1
olens2_vmon=9.70888E-1
olens2_imon=3.94392E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=2.87723E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1544E1
os_ea1_imon=1.88988E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63528E1
os_ef1bup_imon=3.08175E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26189E0
cs_ionrep_imon=1.23572E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93325E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01962E1
cs_anode1_imon=3.06413E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.26402E-10
tplens_vset=1.4E-1
tplens_vmon=1.61144E0
tplens_imon=-3.76954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26074E1
iondef3_imon=1.50605E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26741E1
iondef2_imon=1.58649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98618E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=3.80015E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25271E0
ionrepsh_imon=1.87776E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33927E1
lens5b_imon=2.1907E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7455E1
cs_ef2b_imon=3.1137E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.86719E-1
os_ea2_imon=-4.50414E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00707E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.1853E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62891E0
os_ef2alow_imon=-2.57163E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.13377E-1
os_ef2bup_imon=-5.26318E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10707E1
os_restr2_imon=2.8618E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.31177E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01766E1
cs_anode2_imon=2.27209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72949E1
iondef1_imon=1.10607E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.09926E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.00714E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=3.09038E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12525E0
cs_ionaccel_imon=-1.91068E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47252E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.6401E-6
window_vset=0.0E0
window_vmon=2.20527E-1
window_imon=-1.01105E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82676E2
mask1_imon=2.39194E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-7.17289E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.38403E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.43641E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.38403E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48629E0
defgridb_imon=6.20868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33821E1
os_fil1_imon=3.05176E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.40916E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65087E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30799E1
cs_fil1_imon=1.00005E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62935E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66889E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01603E-2
os_fil2_imon=-2.51127E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.4454E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60484E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30245E-1
cs_fil2_imon=-1.89928E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20354E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22431E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.52489E-2
chamber_ion_pmon=1.70023E-8
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.85102E-1
res40_imon=-2.65242E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.16131E-1	-7.97796E-1	-9.13081E0	-9.14187E0	4.98295E-3	9.29832E-2	2.73039E1	-3.26619E1	-3.26081E1	2.68192E1	1.70023E-8	2.52647E-3	2.52647E-3	6.34037E-3	2.51832E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09665E0	-8.15606E-1	-7.97844E-1	-9.1311E0	-9.14199E0	5.126E-3	9.30309E-2	2.7317E1	-3.26541E1	-3.26291E1	2.67527E1	1.70246E-8	2.5131E-3	2.5131E-3	6.32356E-3	2.52785E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.15821E-1	-7.98106E-1	-9.13107E0	-9.14183E0	5.19753E-3	9.28164E-2	2.7301E1	-3.26538E1	-3.26353E1	2.67653E1	1.70168E-8	2.51915E-3	2.51915E-3	6.32978E-3	2.5196E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.15964E-1	-7.98106E-1	-9.13124E0	-9.14187E0	5.17368E-3	9.30309E-2	2.73135E1	-3.26512E1	-3.26434E1	2.684E1	1.70028E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.52139E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16059E-1	-7.97939E-1	-9.13136E0	-9.14216E0	5.17368E-3	9.32932E-2	2.72919E1	-3.26573E1	-3.26152E1	2.6825E1	1.7017E-8	2.52318E-3	2.52318E-3	6.30192E-3	2.5227E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16488E-1	-7.98249E-1	-9.13117E0	-9.1419E0	5.03063E-3	9.34362E-2	2.73316E1	-3.26779E1	-3.26195E1	2.67439E1	1.70244E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.50959E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.1625E-1	-7.98106E-1	-9.13095E0	-9.14183E0	5.29289E-3	9.30071E-2	2.72871E1	-3.2653E1	-3.26284E1	2.681E1	1.70246E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.50638E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16154E-1	-7.98416E-1	-9.13126E0	-9.14207E0	4.76837E-3	9.31978E-2	2.73075E1	-3.26771E1	-3.26561E1	2.67223E1	1.69875E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.50741E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.16441E-1	-7.97987E-1	-9.13157E0	-9.14185E0	5.00679E-3	9.30309E-2	2.72913E1	-3.26657E1	-3.26062E1	2.68719E1	1.69875E-8	2.52099E-3	2.52099E-3	6.26371E-3	2.52709E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16226E-1	-7.98082E-1	-9.13129E0	-9.14178E0	5.00679E-3	9.29594E-2	2.73309E1	-3.26591E1	-3.26332E1	2.68256E1	1.69875E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.50523E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.16059E-1	-7.97868E-1	-9.13141E0	-9.1419E0	4.55379E-3	9.30071E-2	2.73081E1	-3.26777E1	-3.26068E1	2.68298E1	1.7017E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.51395E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16345E-1	-7.97939E-1	-9.13126E0	-9.14183E0	4.98295E-3	9.30786E-2	2.72937E1	-3.26597E1	-3.26266E1	2.68154E1	1.7017E-8	2.52647E-3	2.52647E-3	6.3074E-3	2.53148E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16321E-1	-7.97915E-1	-9.13134E0	-9.14207E0	5.07832E-3	9.30786E-2	2.73315E1	-3.26561E1	-3.26254E1	2.66989E1	1.69883E-8	2.52492E-3	2.52492E-3	6.29665E-3	2.50424E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09673E0	-8.15868E-1	-7.97629E-1	-9.1311E0	-9.14207E0	5.19753E-3	9.32932E-2	2.72889E1	-3.26819E1	-3.26224E1	2.6878E1	1.70168E-8	2.51915E-3	2.51915E-3	6.30182E-3	2.5196E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09657E0	-8.15916E-1	-7.97582E-1	-9.13148E0	-9.14223E0	5.45979E-3	9.30071E-2	2.72931E1	-3.26717E1	-3.26362E1	2.67964E1	1.7017E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.50741E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.1594E-1	-7.98154E-1	-9.13146E0	-9.14195E0	5.34058E-3	9.3174E-2	2.72751E1	-3.26651E1	-3.2647E1	2.66965E1	1.70096E-8	2.51225E-3	2.51225E-3	6.33486E-3	2.51395E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.15773E-1	-7.9782E-1	-9.13143E0	-9.14204E0	5.29289E-3	9.3174E-2	2.73057E1	-3.26549E1	-3.2617E1	2.68581E1	1.7017E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.52051E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16059E-1	-7.97415E-1	-9.13131E0	-9.14185E0	4.98295E-3	9.30309E-2	2.73129E1	-3.26567E1	-3.26272E1	2.68274E1	1.70173E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.50424E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16202E-1	-7.97486E-1	-9.13146E0	-9.14195E0	5.126E-3	9.29117E-2	2.72945E1	-3.26608E1	-3.26431E1	2.68034E1	1.70244E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.53368E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16226E-1	-7.97439E-1	-9.13131E0	-9.14185E0	5.50747E-3	9.29117E-2	2.72949E1	-3.26741E1	-3.26074E1	2.6819E1	1.70023E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.52489E-2