[Scan]
initial_time=2016-02-15T18:28:52
final_time=2016-02-15T18:29:12
ip_count=19
run=1030
dataset=2
scan=137
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08871E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=6.68085E-10
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=3.26145E-10
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=5.68426E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.85532E-10
mult1=-9.32806E-9
mult2=-2.80124E-9
rf_tmon=-5.0848E-3
rf_agc=3.30468E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=4.0406E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67211E0
bslens_imon=2.59281E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05022E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=2.98162E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05041E1
cs_ea1_imon=2.49371E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37079E0
lens1_imon=2.6282E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.97802E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.53984E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.99315E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.05788E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=2.87494E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=1.89272E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63473E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25918E0
cs_ionrep_imon=1.21244E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=3.06379E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=7.08008E-10
tplens_vset=1.4E-1
tplens_vmon=1.61784E0
tplens_imon=-3.55518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26321E1
iondef3_imon=1.50232E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.5855E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.058E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2751E0
ionrepsh_imon=1.88635E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33923E1
lens5b_imon=2.18684E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74591E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.51625E-1
os_ea2_imon=-4.90015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59395E0
os_ef2alow_imon=-2.66635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27747E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=2.86017E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.31096E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.26912E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73118E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6865E1
iondef4_imon=1.08377E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.02045E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=3.03328E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-1.92394E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=1.79501E-1
window_imon=-9.18431E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-6.33718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.60461E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.63835E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.21882E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=6.30919E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33848E1
os_fil1_imon=4.73418E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.91768E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65167E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30804E1
cs_fil1_imon=9.99093E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62059E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66898E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0913E-2
os_fil2_imon=-2.49178E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74453E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22354E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.52489E-2
chamber_ion_pmon=1.6958E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.78824E-1
res40_imon=-2.706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0968E0	-8.15916E-1	-7.97987E-1	-9.13093E0	-9.14211E0	4.8399E-3	9.32693E-2	2.73021E1	-3.26657E1	-3.26338E1	2.67644E1	1.70023E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.51395E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09727E0	-8.16011E-1	-7.97725E-1	-9.13079E0	-9.14202E0	5.34058E-3	9.32455E-2	2.7304E1	-3.26558E1	-3.26314E1	2.67763E1	1.70173E-8	2.52276E-3	2.52276E-3	6.32356E-3	2.52354E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.16274E-1	-7.97558E-1	-9.13093E0	-9.14197E0	5.14984E-3	9.29356E-2	2.72987E1	-3.26625E1	-3.26359E1	2.6887E1	1.69986E-8	2.51891E-3	2.51891E-3	6.32222E-3	2.51745E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16202E-1	-7.97606E-1	-9.13107E0	-9.14207E0	5.48363E-3	9.29356E-2	2.73093E1	-3.26446E1	-3.26422E1	2.67469E1	1.70246E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.50852E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09719E0	-8.16202E-1	-7.98273E-1	-9.13091E0	-9.1419E0	5.24521E-3	9.3317E-2	2.72919E1	-3.26675E1	-3.26248E1	2.68256E1	1.70096E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.51832E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16607E-1	-7.97772E-1	-9.13126E0	-9.14199E0	5.48363E-3	9.31025E-2	2.73213E1	-3.2647E1	-3.26014E1	2.67475E1	1.70318E-8	2.52276E-3	2.52276E-3	6.30202E-3	2.51709E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.16417E-1	-7.97653E-1	-9.13122E0	-9.14204E0	5.34058E-3	9.31025E-2	2.73147E1	-3.26627E1	-3.26158E1	2.68773E1	1.69791E-8	2.5225E-3	2.5225E-3	6.34099E-3	2.51514E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16417E-1	-7.97701E-1	-9.13122E0	-9.14197E0	5.10216E-3	9.33886E-2	2.73145E1	-3.26537E1	-3.26384E1	2.68094E1	1.701E-8	2.52923E-3	2.52923E-3	6.31278E-3	2.50638E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16107E-1	-7.98368E-1	-9.13146E0	-9.14216E0	4.93526E-3	9.3317E-2	2.72867E1	-3.26701E1	-3.2604E1	2.6695E1	1.69949E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.52489E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.16417E-1	-7.97486E-1	-9.13146E0	-9.14185E0	5.126E-3	9.33409E-2	2.72974E1	-3.26667E1	-3.26213E1	2.68487E1	1.69949E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.52489E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.16369E-1	-7.97749E-1	-9.13122E0	-9.14211E0	5.05447E-3	9.35555E-2	2.72892E1	-3.26634E1	-3.26095E1	2.67703E1	1.70096E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.5227E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0958E0	-8.16369E-1	-7.97534E-1	-9.13136E0	-9.14192E0	5.29289E-3	9.33886E-2	2.72756E1	-3.26573E1	-3.26408E1	2.68253E1	1.70096E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.5227E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16321E-1	-7.97772E-1	-9.13131E0	-9.14204E0	5.05447E-3	9.34601E-2	2.72939E1	-3.26644E1	-3.26325E1	2.678E1	1.69875E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.51395E-2
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.15964E-1	-7.9782E-1	-9.13124E0	-9.14202E0	5.57899E-3	9.34124E-2	2.73051E1	-3.26278E1	-3.262E1	2.67872E1	1.70104E-8	2.51709E-3	2.51709E-3	6.3074E-3	2.53282E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.1656E-1	-7.97915E-1	-9.13122E0	-9.14197E0	5.57899E-3	9.35555E-2	2.733E1	-3.26469E1	-3.26579E1	2.67937E1	1.70096E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.53368E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.1656E-1	-7.97749E-1	-9.13112E0	-9.14168E0	5.91278E-3	9.3317E-2	2.73333E1	-3.26566E1	-3.26389E1	2.68611E1	1.69955E-8	2.51203E-3	2.51203E-3	6.29665E-3	2.50852E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16679E-1	-7.98154E-1	-9.13122E0	-9.14207E0	5.57899E-3	9.32693E-2	2.73225E1	-3.2653E1	-3.26627E1	2.67872E1	1.69716E-8	2.52027E-3	2.52027E-3	6.30182E-3	2.50847E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.16393E-1	-7.98035E-1	-9.13126E0	-9.14207E0	5.45979E-3	9.31025E-2	2.73207E1	-3.26689E1	-3.26156E1	2.67833E1	1.7017E-8	2.52318E-3	2.52318E-3	6.29645E-3	2.51395E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16321E-1	-7.97701E-1	-9.13112E0	-9.14195E0	5.31673E-3	9.32455E-2	2.73261E1	-3.26651E1	-3.26591E1	2.67818E1	1.70104E-8	2.51182E-3	2.51182E-3	6.29684E-3	2.52435E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16703E-1	-7.97915E-1	-9.13119E0	-9.14197E0	5.14984E-3	9.32217E-2	2.73118E1	-3.26536E1	-3.26321E1	2.6865E1	1.6958E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.52489E-2