[Scan]
initial_time=2016-02-15T18:30:12
final_time=2016-02-15T18:30:31
ip_count=19
run=1030
dataset=2
scan=140
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=6.24704E-10
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=2.9844E-10
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=5.24318E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.66971E-10
mult1=-9.2511E-9
mult2=-2.70562E-9
rf_tmon=-4.22632E-3
rf_agc=3.36807E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=3.75497E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.68916E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19905E1
lens5a_imon=1.991E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05039E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5382E1
cs_ef1b_imon=2.97693E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05024E1
cs_ea1_imon=2.50435E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37496E0
lens1_imon=2.54136E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.55156E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84172E1
cs_ef1a_imon=2.98811E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=4.04382E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=2.87602E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=1.88069E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2509E0
cs_ionrep_imon=1.22098E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=3.05334E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=7.26736E-10
tplens_vset=1.4E-1
tplens_vmon=1.64324E0
tplens_imon=-2.81321E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26136E1
iondef3_imon=1.51803E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26803E1
iondef2_imon=1.58364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98634E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.05645E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26772E0
ionrepsh_imon=1.87889E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.20261E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74453E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.10867E-1
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06165E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60897E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43364E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=2.87638E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.31334E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.25578E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73145E1
iondef1_imon=1.10815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68538E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=2.00285E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=2.52163E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.90231E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.06531E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.86308E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.3035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.67263E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.28187E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=6.24364E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33835E1
os_fil1_imon=4.77622E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.206E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65349E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30791E1
cs_fil1_imon=1.00041E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61861E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66787E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1124E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75203E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22278E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.52785E-2
chamber_ion_pmon=1.70173E-8
chamber_cvt_pmon=2.53031E-3
foreline_cvt_pmon=2.53031E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.52084E-1
res40_imon=-2.74204E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16417E-1	-7.97582E-1	-9.13103E0	-9.14221E0	5.84126E-3	9.3174E-2	2.73111E1	-3.26621E1	-3.26302E1	2.67812E1	1.70096E-8	2.52318E-3	2.52318E-3	6.33486E-3	2.52051E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.16369E-1	-7.97653E-1	-9.13107E0	-9.14168E0	5.72205E-3	9.31501E-2	2.73069E1	-3.26573E1	-3.2629E1	2.6813E1	1.701E-8	2.52276E-3	2.52276E-3	6.33977E-3	2.51709E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.15892E-1	-7.97486E-1	-9.131E0	-9.14207E0	5.17368E-3	9.30786E-2	2.73134E1	-3.26585E1	-3.26154E1	2.67595E1	1.70017E-8	2.51693E-3	2.51693E-3	6.29624E-3	2.52183E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16011E-1	-7.97462E-1	-9.13122E0	-9.14199E0	5.29289E-3	9.32455E-2	2.73111E1	-3.26855E1	-3.2617E1	2.67794E1	1.70176E-8	2.52025E-3	2.52025E-3	6.31798E-3	2.52646E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16488E-1	-7.97367E-1	-9.13138E0	-9.14199E0	5.14984E-3	9.30786E-2	2.72974E1	-3.2659E1	-3.26301E1	2.68797E1	1.70096E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.52928E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16321E-1	-7.97701E-1	-9.13141E0	-9.14209E0	5.24521E-3	9.31978E-2	2.73045E1	-3.2653E1	-3.2629E1	2.67625E1	1.7017E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.51177E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.16369E-1	-7.97606E-1	-9.13146E0	-9.14226E0	5.19753E-3	9.34124E-2	2.73198E1	-3.26579E1	-3.26089E1	2.67949E1	1.70244E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.50959E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16059E-1	-7.97653E-1	-9.13122E0	-9.14211E0	5.29289E-3	9.33886E-2	2.72919E1	-3.26879E1	-3.2626E1	2.69566E1	1.701E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.5128E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.15964E-1	-7.97415E-1	-9.13115E0	-9.14216E0	5.19753E-3	9.3317E-2	2.73177E1	-3.26567E1	-3.26212E1	2.68635E1	1.69955E-8	2.51847E-3	2.51847E-3	6.30202E-3	2.52569E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.15892E-1	-7.9751E-1	-9.13119E0	-9.14204E0	5.53131E-3	9.3174E-2	2.73075E1	-3.26735E1	-3.26092E1	2.66376E1	1.70092E-8	2.51915E-3	2.51915E-3	6.31858E-3	2.51737E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16321E-1	-7.9751E-1	-9.13119E0	-9.1423E0	5.76973E-3	9.34601E-2	2.73139E1	-3.26673E1	-3.26555E1	2.67944E1	1.70173E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.51924E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.1594E-1	-7.97653E-1	-9.13119E0	-9.14202E0	5.45979E-3	9.32217E-2	2.72775E1	-3.26729E1	-3.2638E1	2.67325E1	1.69801E-8	2.52428E-3	2.52428E-3	6.31288E-3	2.51177E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16202E-1	-7.97606E-1	-9.1315E0	-9.14197E0	5.60284E-3	9.31978E-2	2.73075E1	-3.26762E1	-3.26358E1	2.69596E1	1.70244E-8	2.52099E-3	2.52099E-3	6.27461E-3	2.51613E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16059E-1	-7.98106E-1	-9.13138E0	-9.14221E0	5.57899E-3	9.31263E-2	2.73269E1	-3.26797E1	-3.26331E1	2.67631E1	1.70023E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.50959E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16059E-1	-7.97939E-1	-9.13165E0	-9.14187E0	5.79357E-3	9.31978E-2	2.73063E1	-3.26567E1	-3.2641E1	2.6771E1	1.70023E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.53148E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.15749E-1	-7.97343E-1	-9.13131E0	-9.14185E0	5.91278E-3	9.32455E-2	2.73039E1	-3.26579E1	-3.26164E1	2.6801E1	1.7017E-8	2.52757E-3	2.52757E-3	6.32936E-3	2.52489E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16298E-1	-7.97129E-1	-9.13134E0	-9.14183E0	5.48363E-3	9.32932E-2	2.73087E1	-3.26861E1	-3.26278E1	2.68154E1	1.70023E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.52489E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16035E-1	-7.97534E-1	-9.13124E0	-9.14173E0	5.88894E-3	9.33886E-2	2.73128E1	-3.26496E1	-3.26301E1	2.67705E1	1.70028E-8	2.52276E-3	2.52276E-3	6.30202E-3	2.51066E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.16131E-1	-7.97558E-1	-9.13153E0	-9.14176E0	5.60284E-3	9.33647E-2	2.73411E1	-3.26849E1	-3.26134E1	2.67794E1	1.70096E-8	2.51116E-3	2.51116E-3	6.29098E-3	2.5227E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.15988E-1	-7.97915E-1	-9.13148E0	-9.14185E0	5.67436E-3	9.32455E-2	2.73145E1	-3.26803E1	-3.26136E1	2.68538E1	1.70173E-8	2.53031E-3	2.53031E-3	6.33977E-3	2.52785E-2