[Scan]
initial_time=2016-02-15T18:30:39
final_time=2016-02-15T18:30:58
ip_count=19
run=1030
dataset=2
scan=141
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.0874E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=7.31623E-10
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=3.18623E-10
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=5.33211E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=5.82778E-10
mult1=-9.86079E-9
mult2=-2.79047E-9
rf_tmon=-4.47637E-3
rf_agc=3.3646E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=4.23861E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6403E0
bslens_imon=2.46926E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19821E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=2.96973E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=2.49786E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35453E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.54146E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84262E1
cs_ef1a_imon=2.97405E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=4.00507E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11027E1
os_restr1_imon=2.88864E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=1.876E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.22495E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=3.06775E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=7.2788E-10
tplens_vset=1.4E-1
tplens_vmon=1.60659E0
tplens_imon=-2.59691E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26464E1
iondef3_imon=1.51479E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.99375E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27313E0
ionrepsh_imon=1.88285E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74387E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.73353E-1
os_ea2_imon=-4.18309E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00709E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58855E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37958E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=2.87458E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.26443E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.10022E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69019E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.028E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=2.87819E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-1.90592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.80702E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.63155E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.62216E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.32874E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47675E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33819E1
os_fil1_imon=4.71616E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.85161E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65113E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30792E1
cs_fil1_imon=1.0008E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63417E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67118E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.68031E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.743E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.70801E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.89945E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22523E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.51494E-2
chamber_ion_pmon=1.701E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.9413E-1
res40_imon=-2.65915E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16178E-1	-7.97868E-1	-9.13136E0	-9.14173E0	5.22137E-3	9.31263E-2	2.73136E1	-3.26556E1	-3.2622E1	2.68331E1	1.70244E-8	2.52647E-3	2.52647E-3	6.31837E-3	2.53809E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.15964E-1	-7.97606E-1	-9.13155E0	-9.1419E0	5.45979E-3	9.30786E-2	2.73171E1	-3.26717E1	-3.26146E1	2.6792E1	1.69919E-8	2.519E-3	2.519E-3	6.29934E-3	2.52785E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16464E-1	-7.97772E-1	-9.13141E0	-9.14185E0	5.53131E-3	9.32455E-2	2.73033E1	-3.26673E1	-3.26431E1	2.68146E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16226E-1	-7.98106E-1	-9.13136E0	-9.14171E0	5.62668E-3	9.31978E-2	2.72997E1	-3.26729E1	-3.26362E1	2.68046E1	1.70033E-8	2.52131E-3	2.52131E-3	6.29157E-3	2.52858E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.16059E-1	-7.97796E-1	-9.13124E0	-9.1418E0	5.36442E-3	9.29594E-2	2.72937E1	-3.26573E1	-3.26344E1	2.67806E1	1.69949E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.52709E-2
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-2.0948E0	-8.16178E-1	-7.97749E-1	-9.13129E0	-9.14154E0	5.74589E-3	9.30071E-2	2.72817E1	-3.26843E1	-3.26338E1	2.68034E1	1.69716E-8	2.5225E-3	2.5225E-3	6.29067E-3	2.52407E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.1625E-1	-7.97653E-1	-9.13122E0	-9.14187E0	5.55515E-3	9.31025E-2	2.73171E1	-3.26609E1	-3.25936E1	2.67806E1	1.7017E-8	2.52209E-3	2.52209E-3	6.29098E-3	2.50959E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.15821E-1	-7.97701E-1	-9.13129E0	-9.14185E0	5.79357E-3	9.30786E-2	2.72889E1	-3.26446E1	-3.2626E1	2.67806E1	1.69955E-8	2.51417E-3	2.51417E-3	6.31817E-3	2.51709E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.15749E-1	-7.97987E-1	-9.13115E0	-9.14183E0	5.53131E-3	9.31978E-2	2.72841E1	-3.26741E1	-3.25972E1	2.67583E1	1.7017E-8	2.52209E-3	2.52209E-3	6.29098E-3	2.51613E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.15749E-1	-7.98011E-1	-9.13098E0	-9.14197E0	5.38826E-3	9.32693E-2	2.72913E1	-3.26759E1	-3.26446E1	2.69055E1	1.70244E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.51177E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16131E-1	-7.97248E-1	-9.13112E0	-9.14185E0	5.31673E-3	9.28164E-2	2.73104E1	-3.26602E1	-3.26431E1	2.66767E1	1.70244E-8	2.52209E-3	2.52209E-3	6.33486E-3	2.51177E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.15654E-1	-7.9782E-1	-9.13081E0	-9.14183E0	5.74589E-3	9.31025E-2	2.73357E1	-3.26759E1	-3.26458E1	2.68538E1	1.70173E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.52354E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.15344E-1	-7.97677E-1	-9.13081E0	-9.14171E0	5.65052E-3	9.32932E-2	2.73075E1	-3.26609E1	-3.26554E1	2.67758E1	1.7017E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.50523E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.15701E-1	-7.97892E-1	-9.13095E0	-9.14173E0	5.48363E-3	9.31263E-2	2.73201E1	-3.26573E1	-3.26248E1	2.681E1	1.69801E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.5227E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.15582E-1	-7.97772E-1	-9.13119E0	-9.1418E0	5.4121E-3	9.30786E-2	2.73207E1	-3.26549E1	-3.26302E1	2.6774E1	1.70023E-8	2.52099E-3	2.52099E-3	6.32936E-3	2.52709E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.15845E-1	-7.97963E-1	-9.13117E0	-9.14199E0	5.26905E-3	9.33886E-2	2.72986E1	-3.2672E1	-3.26225E1	2.67966E1	1.70023E-8	2.51334E-3	2.51334E-3	6.32386E-3	2.5227E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16154E-1	-7.97606E-1	-9.13126E0	-9.14183E0	5.36442E-3	9.31025E-2	2.73273E1	-3.26771E1	-3.26134E1	2.67992E1	1.69949E-8	2.52209E-3	2.52209E-3	6.32936E-3	2.5227E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16154E-1	-7.98082E-1	-9.13136E0	-9.14173E0	5.4121E-3	9.32932E-2	2.72744E1	-3.26463E1	-3.26324E1	2.6803E1	1.69811E-8	2.51525E-3	2.51525E-3	6.3074E-3	2.5128E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16083E-1	-7.98106E-1	-9.13129E0	-9.14192E0	5.38826E-3	9.3317E-2	2.73093E1	-3.26609E1	-3.26284E1	2.67607E1	1.70246E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.50852E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.16059E-1	-7.98202E-1	-9.13122E0	-9.14204E0	5.67436E-3	9.35078E-2	2.73225E1	-3.26633E1	-3.26464E1	2.69019E1	1.701E-8	2.52061E-3	2.52061E-3	6.32896E-3	2.51494E-2