[Scan]
initial_time=2016-02-15T18:31:05
final_time=2016-02-15T18:31:25
ip_count=19
run=1030
dataset=2
scan=142
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08825E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=6.65152E-10
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=3.18706E-10
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=6.3163E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.62775E-10
mult1=-9.75243E-9
mult2=-2.84636E-9
rf_tmon=-4.48238E-3
rf_agc=3.33696E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=4.03428E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.67776E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2006E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05047E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53667E1
cs_ef1b_imon=2.98009E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04982E1
cs_ea1_imon=2.49654E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38259E0
lens1_imon=2.65652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64579E1
os_ef1alow_imon=2.98217E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03779E1
cs_ea2_imon=1.54975E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84678E1
cs_ef1a_imon=2.98912E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.14622E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11147E1
os_restr1_imon=2.87305E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15435E1
os_ea1_imon=1.8821E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63554E1
os_ef1bup_imon=3.08817E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25092E0
cs_ionrep_imon=1.22873E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01838E1
cs_anode1_imon=3.06002E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=7.69329E-10
tplens_vset=1.4E-1
tplens_vmon=1.61017E0
tplens_imon=-3.59057E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.50551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.58939E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.04072E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=1.88812E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.19782E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74629E1
cs_ef2b_imon=3.11632E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.78761E-1
os_ea2_imon=-4.19227E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71148E1
cs_ef2a_imon=3.18408E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60423E0
os_ef2alow_imon=-2.63714E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.32939E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.86436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.31061E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01734E1
cs_anode2_imon=2.2555E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.09069E-5
iondef4_vset=2.691E1
iondef4_vmon=2.70208E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.00721E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=2.90322E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12609E0
cs_ionaccel_imon=-1.87258E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47254E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56278E1
einzel_imon=7.55926E-6
window_vset=0.0E0
window_vmon=2.03206E-1
window_imon=-1.042E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39074E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.04114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.79928E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.41891E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.24359E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.22424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33842E1
os_fil1_imon=5.50924E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.71603E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65095E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30811E1
cs_fil1_imon=9.99686E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62389E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67216E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.92668E-2
os_fil2_imon=-2.57651E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.94483E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74199E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33023E-1
cs_fil2_imon=-2.78503E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05513E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22489E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.51066E-2
chamber_ion_pmon=1.69955E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.7079E-1
res40_imon=-2.60933E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16154E-1	-7.97987E-1	-9.13117E0	-9.14204E0	5.65052E-3	9.3627E-2	2.73157E1	-3.26732E1	-3.26537E1	2.67764E1	1.70028E-8	2.52169E-3	2.52169E-3	6.3074E-3	2.50424E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16154E-1	-7.97939E-1	-9.13129E0	-9.14211E0	5.19753E-3	9.34839E-2	2.73033E1	-3.26646E1	-3.26125E1	2.67403E1	1.70096E-8	2.52318E-3	2.52318E-3	6.30192E-3	2.50741E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.16178E-1	-7.97606E-1	-9.13143E0	-9.14185E0	5.38826E-3	9.34124E-2	2.72933E1	-3.26732E1	-3.26172E1	2.66881E1	1.7017E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.52051E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16178E-1	-7.97915E-1	-9.13146E0	-9.14218E0	5.43594E-3	9.32217E-2	2.73104E1	-3.26632E1	-3.26213E1	2.69779E1	1.70173E-8	2.51417E-3	2.51417E-3	6.3074E-3	2.51066E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16035E-1	-7.97343E-1	-9.13122E0	-9.14209E0	5.29289E-3	9.31025E-2	2.72877E1	-3.26663E1	-3.26242E1	2.68046E1	1.70023E-8	2.52318E-3	2.52318E-3	6.33486E-3	2.50959E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16035E-1	-7.97725E-1	-9.13103E0	-9.14187E0	5.48363E-3	9.33409E-2	2.73165E1	-3.26368E1	-3.26398E1	2.67782E1	1.69883E-8	2.51417E-3	2.51417E-3	6.30202E-3	2.52569E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.15773E-1	-7.97534E-1	-9.13126E0	-9.14199E0	5.34058E-3	9.34839E-2	2.73198E1	-3.26554E1	-3.26291E1	2.67915E1	1.7017E-8	2.51771E-3	2.51771E-3	6.34037E-3	2.51395E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.16154E-1	-7.97629E-1	-9.13122E0	-9.14209E0	5.62668E-3	9.37939E-2	2.73009E1	-3.26488E1	-3.25936E1	2.69097E1	1.70255E-8	2.52271E-3	2.52271E-3	6.3168E-3	2.52176E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16178E-1	-7.97653E-1	-9.13112E0	-9.14204E0	5.53131E-3	9.33409E-2	2.72775E1	-3.26735E1	-3.26512E1	2.67175E1	1.701E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.52139E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.15988E-1	-7.97677E-1	-9.13136E0	-9.14178E0	5.65052E-3	9.34601E-2	2.73021E1	-3.26331E1	-3.2629E1	2.69049E1	1.69875E-8	2.52647E-3	2.52647E-3	6.27461E-3	2.5227E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.15964E-1	-7.97915E-1	-9.13143E0	-9.1423E0	5.65052E-3	9.34601E-2	2.73039E1	-3.26735E1	-3.26086E1	2.69187E1	1.70318E-8	2.5199E-3	2.5199E-3	6.29098E-3	2.52489E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16274E-1	-7.97462E-1	-9.13117E0	-9.14178E0	5.74589E-3	9.3627E-2	2.73204E1	-3.26401E1	-3.26487E1	2.68959E1	1.70028E-8	2.51847E-3	2.51847E-3	6.29665E-3	2.52354E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.15845E-1	-7.97486E-1	-9.1315E0	-9.14204E0	5.38826E-3	9.35793E-2	2.72974E1	-3.2662E1	-3.26508E1	2.68148E1	1.70243E-8	2.51804E-3	2.51804E-3	6.29624E-3	2.51292E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.15749E-1	-7.97558E-1	-9.13143E0	-9.14204E0	5.48363E-3	9.33886E-2	2.72987E1	-3.26544E1	-3.26017E1	2.68462E1	1.69883E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.50852E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.15964E-1	-7.9751E-1	-9.13146E0	-9.14192E0	5.24521E-3	9.30786E-2	2.7332E1	-3.26383E1	-3.26321E1	2.66173E1	1.70033E-8	2.51498E-3	2.51498E-3	6.31798E-3	2.5159E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.1594E-1	-7.97653E-1	-9.13131E0	-9.14199E0	5.53131E-3	9.33409E-2	2.73195E1	-3.26813E1	-3.26338E1	2.65926E1	1.70241E-8	2.51271E-3	2.51271E-3	6.27901E-3	2.51866E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16202E-1	-7.98106E-1	-9.13117E0	-9.14192E0	5.38826E-3	9.33886E-2	2.73273E1	-3.26747E1	-3.26404E1	2.67541E1	1.701E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.52139E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16131E-1	-7.97844E-1	-9.13134E0	-9.14197E0	5.17368E-3	9.30786E-2	2.73105E1	-3.26482E1	-3.26344E1	2.66136E1	1.70096E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.52489E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16202E-1	-7.98059E-1	-9.13098E0	-9.14221E0	5.36442E-3	9.29832E-2	2.72962E1	-3.26773E1	-3.26319E1	2.66442E1	1.70096E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.52051E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16059E-1	-7.98273E-1	-9.13103E0	-9.14192E0	5.126E-3	9.29832E-2	2.73237E1	-3.26591E1	-3.2617E1	2.70208E1	1.69955E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.51066E-2