[Scan]
initial_time=2016-02-15T18:31:32
final_time=2016-02-15T18:31:51
ip_count=19
run=1030
dataset=2
scan=143
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.1563E-1
ql1_imon=6.20139E-10
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=3.07679E-10
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=4.88019E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.86021E-10
mult1=-9.71215E-9
mult2=-2.74285E-9
rf_tmon=-3.7426E-3
rf_agc=3.37692E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=4.43542E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65749E0
bslens_imon=2.59815E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19652E1
lens5a_imon=1.98978E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05052E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=2.96432E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05166E1
cs_ea1_imon=2.51171E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39766E0
lens1_imon=2.64957E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0388E1
cs_ea2_imon=1.5538E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85043E1
cs_ef1a_imon=2.99712E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.19772E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.87278E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15251E1
os_ea1_imon=1.89392E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25149E0
cs_ionrep_imon=1.22544E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93376E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01605E1
cs_anode1_imon=3.05406E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=7.31134E-10
tplens_vset=1.4E-1
tplens_vmon=1.60409E0
tplens_imon=-2.33709E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26354E1
iondef3_imon=1.50348E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2626E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98478E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=3.97956E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26373E0
ionrepsh_imon=1.89208E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.1929E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.67742E-1
os_ea2_imon=-5.34892E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00733E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63059E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52374E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10751E1
os_restr2_imon=2.8771E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.3081E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01635E1
cs_anode2_imon=2.2583E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.09248E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67717E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.07775E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=2.88177E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-7.88688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.63747E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.68984E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.32894E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35759E0
defgridb_imon=6.0434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33859E1
os_fil1_imon=4.69814E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.80065E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65078E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30813E1
cs_fil1_imon=9.99471E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61951E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67082E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0686E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.45787E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79921E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.25654E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22407E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.51613E-2
chamber_ion_pmon=1.70244E-8
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.05543E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.15821E-1	-7.98297E-1	-9.13093E0	-9.14183E0	5.24521E-3	9.2864E-2	2.73063E1	-3.26359E1	-3.2626E1	2.68372E1	1.70096E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.52709E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.15535E-1	-7.98035E-1	-9.13105E0	-9.14209E0	5.36442E-3	9.27687E-2	2.73045E1	-3.26682E1	-3.26383E1	2.67689E1	1.70104E-8	2.52131E-3	2.52131E-3	6.29157E-3	2.51379E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.15773E-1	-7.97915E-1	-9.13138E0	-9.14216E0	5.126E-3	9.30786E-2	2.7311E1	-3.2672E1	-3.26378E1	2.6898E1	1.70092E-8	2.52362E-3	2.52362E-3	6.33538E-3	2.5196E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.15821E-1	-7.97749E-1	-9.13112E0	-9.14204E0	5.24521E-3	9.30309E-2	2.72797E1	-3.26478E1	-3.26467E1	2.68262E1	1.70028E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.51924E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16035E-1	-7.97677E-1	-9.13098E0	-9.14195E0	5.03063E-3	9.32455E-2	2.73098E1	-3.26602E1	-3.26201E1	2.67792E1	1.70172E-8	2.52026E-3	2.52026E-3	6.31827E-3	2.51987E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.15916E-1	-7.97725E-1	-9.13119E0	-9.14195E0	5.67436E-3	9.33886E-2	2.72853E1	-3.26567E1	-3.26416E1	2.67265E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.1625E-1	-7.97677E-1	-9.13126E0	-9.14187E0	5.50747E-3	9.37462E-2	2.73033E1	-3.26488E1	-3.26086E1	2.68767E1	1.70246E-8	2.51739E-3	2.51739E-3	6.29665E-3	2.52785E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.15439E-1	-7.97772E-1	-9.13091E0	-9.14204E0	5.48363E-3	9.34601E-2	2.73195E1	-3.26446E1	-3.25791E1	2.67607E1	1.7017E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.53148E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09364E0	-8.15678E-1	-7.9751E-1	-9.13084E0	-9.1419E0	5.48363E-3	9.34601E-2	2.73177E1	-3.26332E1	-3.26236E1	2.6816E1	1.70096E-8	2.52647E-3	2.52647E-3	6.31288E-3	2.50959E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.15701E-1	-7.97439E-1	-9.13112E0	-9.1419E0	5.50747E-3	9.34839E-2	2.72907E1	-3.26615E1	-3.26242E1	2.67319E1	1.70244E-8	2.51771E-3	2.51771E-3	6.30466E-3	2.50741E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.15821E-1	-7.97606E-1	-9.13117E0	-9.14216E0	5.31673E-3	9.33886E-2	2.73279E1	-3.26741E1	-3.26428E1	2.68322E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.15892E-1	-7.97653E-1	-9.13112E0	-9.14214E0	5.43594E-3	9.34839E-2	2.72871E1	-3.2635E1	-3.26645E1	2.67577E1	1.7017E-8	2.51334E-3	2.51334E-3	6.31837E-3	2.50523E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.15916E-1	-7.97987E-1	-9.13117E0	-9.14223E0	5.29289E-3	9.31263E-2	2.73075E1	-3.26591E1	-3.26272E1	2.67992E1	1.70244E-8	2.51443E-3	2.51443E-3	6.3074E-3	2.52051E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.15988E-1	-7.97653E-1	-9.13103E0	-9.14204E0	5.45979E-3	9.35793E-2	2.73252E1	-3.26756E1	-3.26148E1	2.69013E1	1.70096E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.51177E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16059E-1	-7.97725E-1	-9.13126E0	-9.14187E0	5.14984E-3	9.33409E-2	2.73081E1	-3.26951E1	-3.26362E1	2.66761E1	1.70318E-8	2.52384E-3	2.52384E-3	6.31278E-3	2.51924E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16083E-1	-7.97701E-1	-9.13126E0	-9.14173E0	5.14984E-3	9.35555E-2	2.73093E1	-3.26675E1	-3.2647E1	2.68863E1	1.70023E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.51613E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16369E-1	-7.97749E-1	-9.13141E0	-9.14202E0	5.34058E-3	9.31978E-2	2.73039E1	-3.26362E1	-3.26242E1	2.6816E1	1.70096E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.51395E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.15678E-1	-7.98011E-1	-9.1311E0	-9.14199E0	5.65052E-3	9.3317E-2	2.73178E1	-3.26689E1	-3.26185E1	2.68621E1	1.70096E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.51832E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.15916E-1	-7.98249E-1	-9.13095E0	-9.14221E0	5.55515E-3	9.31501E-2	2.73207E1	-3.26591E1	-3.26242E1	2.68256E1	1.70176E-8	2.51287E-3	2.51287E-3	6.3074E-3	2.5307E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.1563E-1	-7.98512E-1	-9.13093E0	-9.14195E0	5.62668E-3	9.2864E-2	2.73016E1	-3.2626E1	-3.26354E1	2.67717E1	1.70244E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.51613E-2