[Scan]
initial_time=2016-02-15T18:32:52
final_time=2016-02-15T18:33:11
ip_count=19
run=1030
dataset=2
scan=146
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08743E-4
ql1_vset=
ql1_vmon=-8.15558E-1
ql1_imon=6.6998E-10
ql2_vset=
ql2_vmon=-7.97749E-1
ql2_imon=2.97701E-10
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=6.25098E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=5.3364E-10
mult1=-1.04096E-8
mult2=-2.72914E-9
rf_tmon=-4.32071E-3
rf_agc=3.35687E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=4.09317E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64871E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20055E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=2.97585E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04928E1
cs_ea1_imon=2.49606E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37797E0
lens1_imon=2.54496E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.55012E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=2.9863E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.99613E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11105E1
os_restr1_imon=2.86629E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=1.90088E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24068E0
cs_ionrep_imon=1.23072E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93308E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.06019E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=8.02648E-10
tplens_vset=1.4E-1
tplens_vmon=1.615E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26213E1
iondef3_imon=1.51695E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.59482E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.24063E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2557E0
ionrepsh_imon=1.88285E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33832E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.349E-1
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63179E0
os_ef2alow_imon=-2.65194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49972E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10679E1
os_restr2_imon=2.87242E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.27092E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73263E1
iondef1_imon=1.09769E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67404E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.04096E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=3.31199E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.82303E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.73609E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.66182E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.17733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26021E0
defgridb_imon=6.15352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3385E1
os_fil1_imon=4.41583E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.92369E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65269E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30784E1
cs_fil1_imon=9.98834E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62288E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67008E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.82866E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.45787E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.51872E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22315E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.5128E-2
chamber_ion_pmon=1.69955E-8
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.63497E-1
res40_imon=-2.70239E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16226E-1	-7.97772E-1	-9.13115E0	-9.14235E0	5.67436E-3	9.32455E-2	2.72958E1	-3.26637E1	-3.26295E1	2.67445E1	1.70023E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.51177E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16059E-1	-7.97629E-1	-9.13095E0	-9.14211E0	5.55515E-3	9.36747E-2	2.72751E1	-3.26585E1	-3.26468E1	2.69043E1	1.70176E-8	2.52131E-3	2.52131E-3	6.33388E-3	2.50959E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.15916E-1	-7.98154E-1	-9.13124E0	-9.14209E0	5.29289E-3	9.32455E-2	2.73074E1	-3.26807E1	-3.26482E1	2.67707E1	1.70243E-8	2.52473E-3	2.52473E-3	6.34099E-3	2.50847E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16107E-1	-7.9782E-1	-9.13124E0	-9.1419E0	5.03063E-3	9.31978E-2	2.72745E1	-3.26628E1	-3.26422E1	2.66367E1	1.70108E-8	2.53029E-3	2.53029E-3	6.31779E-3	2.52097E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16011E-1	-7.97653E-1	-9.13115E0	-9.14195E0	5.00679E-3	9.34839E-2	2.73009E1	-3.26693E1	-3.25996E1	2.66562E1	1.69935E-8	2.52407E-3	2.52407E-3	6.33021E-3	2.51639E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.15821E-1	-7.97677E-1	-9.13117E0	-9.14223E0	5.126E-3	9.34124E-2	2.72835E1	-3.26615E1	-3.26158E1	2.68605E1	1.70096E-8	2.5188E-3	2.5188E-3	6.29645E-3	2.51177E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.15797E-1	-7.9813E-1	-9.13143E0	-9.14207E0	5.26905E-3	9.35316E-2	2.73141E1	-3.26512E1	-3.26236E1	2.68046E1	1.70023E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.51613E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.15511E-1	-7.97844E-1	-9.13136E0	-9.14183E0	5.53131E-3	9.36508E-2	2.7269E1	-3.26687E1	-3.26038E1	2.67517E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.52928E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16059E-1	-7.97367E-1	-9.13131E0	-9.14223E0	5.38826E-3	9.35078E-2	2.73021E1	-3.26434E1	-3.26098E1	2.67698E1	1.70023E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.50741E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.15821E-1	-7.97725E-1	-9.13112E0	-9.14223E0	5.4121E-3	9.35078E-2	2.73003E1	-3.26753E1	-3.26236E1	2.68082E1	1.70173E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.51924E-2
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16059E-1	-7.97963E-1	-9.13117E0	-9.14223E0	5.26905E-3	9.31501E-2	2.73021E1	-3.26838E1	-3.26213E1	2.67764E1	1.70092E-8	2.51581E-3	2.51581E-3	6.33538E-3	2.52183E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16011E-1	-7.97963E-1	-9.13146E0	-9.14183E0	5.55515E-3	9.32455E-2	2.72567E1	-3.26303E1	-3.26621E1	2.67896E1	1.701E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.49784E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.16154E-1	-7.97868E-1	-9.13143E0	-9.14197E0	5.38826E-3	9.30786E-2	2.73269E1	-3.26803E1	-3.2613E1	2.68661E1	1.70023E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.50305E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.15988E-1	-7.97963E-1	-9.13155E0	-9.14199E0	5.67436E-3	9.33409E-2	2.72949E1	-3.26386E1	-3.26224E1	2.66346E1	1.69955E-8	2.51847E-3	2.51847E-3	6.32896E-3	2.51494E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.15988E-1	-7.97749E-1	-9.13143E0	-9.14204E0	5.55515E-3	9.30548E-2	2.72909E1	-3.2649E1	-3.26207E1	2.66424E1	1.70023E-8	2.51007E-3	2.51007E-3	6.32386E-3	2.50523E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16011E-1	-7.9782E-1	-9.13146E0	-9.14209E0	5.53131E-3	9.31263E-2	2.72997E1	-3.26723E1	-3.26422E1	2.684E1	1.70023E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.51395E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.15868E-1	-7.97749E-1	-9.13143E0	-9.14228E0	5.43594E-3	9.28879E-2	2.72991E1	-3.26524E1	-3.26182E1	2.68671E1	1.7017E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.51613E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16131E-1	-7.97462E-1	-9.13155E0	-9.14223E0	5.50747E-3	9.35078E-2	2.73138E1	-3.26567E1	-3.26631E1	2.67005E1	1.69949E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.51177E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.15964E-1	-7.97582E-1	-9.1316E0	-9.14221E0	5.34058E-3	9.34124E-2	2.73181E1	-3.26779E1	-3.26136E1	2.69285E1	1.70176E-8	2.51919E-3	2.51919E-3	6.32328E-3	2.51379E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.15558E-1	-7.97749E-1	-9.13143E0	-9.14218E0	5.24521E-3	9.33886E-2	2.73263E1	-3.26614E1	-3.26213E1	2.67404E1	1.69955E-8	2.51203E-3	2.51203E-3	6.32356E-3	2.5128E-2