[Scan]
initial_time=2016-02-15T18:33:18
final_time=2016-02-15T18:33:38
ip_count=19
run=1030
dataset=2
scan=147
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=6.55663E-10
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=3.12829E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=5.43463E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=5.6715E-10
mult1=-9.95712E-9
mult2=-2.78648E-9
rf_tmon=-4.206E-3
rf_agc=3.38923E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=4.09925E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.65652E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05132E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=2.97333E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02188E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.49973E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40029E0
lens1_imon=2.78394E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04044E1
cs_ea2_imon=1.54621E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84076E1
cs_ef1a_imon=2.97946E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=4.02117E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=2.86881E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15423E1
os_ea1_imon=1.88989E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22319E0
cs_ionrep_imon=1.22094E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93452E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=3.05442E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.47466E-10
tplens_vset=1.4E-1
tplens_vmon=1.59778E0
tplens_imon=-6.88256E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.49807E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.58974E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.9847E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.05455E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=1.88918E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.1787E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74441E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.61064E-1
os_ea2_imon=-3.87372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62759E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42764E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=2.86629E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.30919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.26479E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72925E1
iondef1_imon=1.07299E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69974E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.01063E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=2.72346E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-1.8915E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47151E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-1.05538E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.48073E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.503E0
defgridb_imon=6.30919E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33841E1
os_fil1_imon=5.09457E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.36507E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65018E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30796E1
cs_fil1_imon=9.99873E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62444E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67042E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01532E-2
os_fil2_imon=-2.47376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.578E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89133E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22386E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.51066E-2
chamber_ion_pmon=1.70246E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.4002E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.27167E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-8.15701E-1	-7.97963E-1	-9.13136E0	-9.14247E0	5.76973E-3	9.33409E-2	2.73057E1	-3.26661E1	-3.26372E1	2.66869E1	1.70096E-8	2.51116E-3	2.51116E-3	6.30192E-3	2.50088E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16083E-1	-7.97796E-1	-9.13143E0	-9.14254E0	5.53131E-3	9.31025E-2	2.73027E1	-3.26909E1	-3.26254E1	2.68821E1	1.70028E-8	2.52169E-3	2.52169E-3	6.30202E-3	2.53E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.15749E-1	-7.9782E-1	-9.13131E0	-9.14245E0	5.60284E-3	9.32455E-2	2.73399E1	-3.26932E1	-3.26109E1	2.67549E1	1.70062E-8	2.52189E-3	2.52189E-3	6.30469E-3	2.51445E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.15821E-1	-7.98154E-1	-9.13098E0	-9.14211E0	5.05447E-3	9.30786E-2	2.73393E1	-3.2644E1	-3.262E1	2.67926E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.16107E-1	-7.9782E-1	-9.131E0	-9.14199E0	6.05583E-3	9.31263E-2	2.73097E1	-3.2666E1	-3.26294E1	2.67544E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.50305E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16202E-1	-7.98154E-1	-9.13115E0	-9.14202E0	5.96046E-3	9.30786E-2	2.72862E1	-3.26514E1	-3.2616E1	2.69437E1	1.70059E-8	2.51555E-3	2.51555E-3	6.3074E-3	2.51035E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16226E-1	-7.97915E-1	-9.13095E0	-9.14209E0	5.93662E-3	9.33647E-2	2.72925E1	-3.26428E1	-3.26128E1	2.68418E1	1.70028E-8	2.51954E-3	2.51954E-3	6.30202E-3	2.50852E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.1594E-1	-7.97701E-1	-9.13117E0	-9.14202E0	5.62668E-3	9.30786E-2	2.72961E1	-3.26723E1	-3.25882E1	2.68587E1	1.69949E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.50959E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.15868E-1	-7.97844E-1	-9.131E0	-9.14242E0	5.74589E-3	9.33647E-2	2.72991E1	-3.26591E1	-3.2596E1	2.678E1	1.70096E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.52051E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.15797E-1	-7.97439E-1	-9.13124E0	-9.14221E0	5.45979E-3	9.31501E-2	2.72925E1	-3.26368E1	-3.26164E1	2.68611E1	1.70173E-8	2.51847E-3	2.51847E-3	6.33977E-3	2.51066E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.1594E-1	-7.97582E-1	-9.13136E0	-9.14226E0	5.57899E-3	9.32693E-2	2.73087E1	-3.26506E1	-3.2635E1	2.66466E1	1.70243E-8	2.52139E-3	2.52139E-3	6.31299E-3	2.51737E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.15606E-1	-7.9782E-1	-9.13126E0	-9.1424E0	5.34058E-3	9.32693E-2	2.73399E1	-3.27287E1	-3.26518E1	2.66166E1	1.70023E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.51395E-2
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.16011E-1	-7.98345E-1	-9.13143E0	-9.14235E0	5.57899E-3	9.33409E-2	2.72985E1	-3.265E1	-3.26579E1	2.68094E1	1.69949E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.51177E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.15797E-1	-7.97772E-1	-9.13112E0	-9.14221E0	5.24521E-3	9.3174E-2	2.73207E1	-3.26506E1	-3.26488E1	2.67505E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.15964E-1	-7.97915E-1	-9.13112E0	-9.14209E0	4.88758E-3	9.32455E-2	2.73045E1	-3.26699E1	-3.26284E1	2.68538E1	1.70023E-8	2.52045E-3	2.52045E-3	6.29919E-3	2.5085E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16131E-1	-7.97629E-1	-9.13103E0	-9.14199E0	5.34058E-3	9.3174E-2	2.73129E1	-3.26717E1	-3.2638E1	2.68028E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.15821E-1	-7.97653E-1	-9.13112E0	-9.14211E0	5.19753E-3	9.29594E-2	2.72889E1	-3.26777E1	-3.26296E1	2.67625E1	1.7017E-8	2.51334E-3	2.51334E-3	6.31288E-3	2.50959E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.15821E-1	-7.97796E-1	-9.13122E0	-9.14187E0	5.45979E-3	9.34124E-2	2.73016E1	-3.26632E1	-3.26248E1	2.67758E1	1.701E-8	2.51632E-3	2.51632E-3	6.33977E-3	2.5128E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16202E-1	-7.98059E-1	-9.13112E0	-9.1419E0	5.57899E-3	9.35316E-2	2.72874E1	-3.26543E1	-3.26384E1	2.6708E1	1.70096E-8	2.52428E-3	2.52428E-3	6.29645E-3	2.51395E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.15821E-1	-7.98059E-1	-9.13131E0	-9.14216E0	5.48363E-3	9.3174E-2	2.72925E1	-3.26711E1	-3.26296E1	2.69974E1	1.70246E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.51066E-2