[Scan]
initial_time=2016-02-15T18:33:45
final_time=2016-02-15T18:34:05
ip_count=19
run=1030
dataset=2
scan=148
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=6.64425E-10
ql2_vset=
ql2_vmon=-7.97749E-1
ql2_imon=3.20411E-10
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=6.09267E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=5.59175E-10
mult1=-8.8229E-9
mult2=-2.76332E-9
rf_tmon=-4.31415E-3
rf_agc=3.36316E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=3.96001E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.70358E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.98271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05147E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=2.98054E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0464E1
cs_ea1_imon=2.50291E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36715E0
lens1_imon=2.53415E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.645E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04057E1
cs_ea2_imon=1.54255E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.98018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70769E-1
olens2_imon=4.02498E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11093E1
os_restr1_imon=2.8735E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15504E1
os_ea1_imon=1.88249E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22566E0
cs_ionrep_imon=1.22351E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93467E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=3.06055E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=7.14791E-10
tplens_vset=1.4E-1
tplens_vmon=1.57294E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26289E1
iondef3_imon=1.50469E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26628E1
iondef2_imon=1.58292E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98587E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.71134E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26351E0
ionrepsh_imon=1.87817E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3388E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54728E-1
os_ea2_imon=-4.65174E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00706E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71402E1
cs_ef2a_imon=3.19642E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61798E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65589E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=2.87494E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.26011E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73123E1
iondef1_imon=1.10094E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68274E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.99137E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=3.07679E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.94196E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.58693E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-6.91381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.57387E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.55367E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44066E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3384E1
os_fil1_imon=3.70705E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.61134E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6481E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3075E1
cs_fil1_imon=9.98876E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61921E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67129E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93184E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.93839E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81905E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.05329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62024E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22406E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33492E-3
inlet_lpb_pmon=2.52358E-2
chamber_ion_pmon=1.70071E-8
chamber_cvt_pmon=2.52091E-3
foreline_cvt_pmon=2.52091E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.4819E-1
res40_imon=-2.63752E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.15821E-1	-7.97343E-1	-9.1311E0	-9.14209E0	5.38826E-3	9.33647E-2	2.72921E1	-3.26667E1	-3.26484E1	2.68777E1	1.70096E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.50523E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.15749E-1	-7.97772E-1	-9.13079E0	-9.14202E0	5.19753E-3	9.33409E-2	2.73219E1	-3.26681E1	-3.2626E1	2.68184E1	1.69883E-8	2.51632E-3	2.51632E-3	6.3074E-3	2.52569E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16178E-1	-7.97725E-1	-9.131E0	-9.14209E0	5.31673E-3	9.34362E-2	2.73163E1	-3.26644E1	-3.2639E1	2.6783E1	1.70096E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.51613E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.15701E-1	-7.97701E-1	-9.13119E0	-9.14183E0	5.55515E-3	9.34362E-2	2.72862E1	-3.2675E1	-3.26201E1	2.69217E1	1.70028E-8	2.52707E-3	2.52707E-3	6.28056E-3	2.52354E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.15892E-1	-7.97701E-1	-9.13115E0	-9.14197E0	5.53131E-3	9.30786E-2	2.73213E1	-3.26512E1	-3.26567E1	2.67992E1	1.69883E-8	2.52599E-3	2.52599E-3	6.29128E-3	2.52354E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16226E-1	-7.97677E-1	-9.13098E0	-9.14211E0	5.53131E-3	9.34124E-2	2.72937E1	-3.26597E1	-3.26422E1	2.67337E1	1.70023E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.5227E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16321E-1	-7.97391E-1	-9.13093E0	-9.1419E0	5.45979E-3	9.35316E-2	2.73075E1	-3.2649E1	-3.26337E1	2.68238E1	1.7017E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.5227E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.16035E-1	-7.97892E-1	-9.13136E0	-9.14216E0	5.4121E-3	9.36985E-2	2.72898E1	-3.26713E1	-3.26278E1	2.68623E1	1.69955E-8	2.51739E-3	2.51739E-3	6.33977E-3	2.51709E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16298E-1	-7.97486E-1	-9.13107E0	-9.14199E0	5.29289E-3	9.32693E-2	2.72931E1	-3.26506E1	-3.26284E1	2.67481E1	1.7017E-8	2.5199E-3	2.5199E-3	6.28552E-3	2.52709E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.15988E-1	-7.97629E-1	-9.13107E0	-9.14173E0	5.24521E-3	9.3174E-2	2.72985E1	-3.26675E1	-3.26296E1	2.69091E1	1.70318E-8	2.51693E-3	2.51693E-3	6.31858E-3	2.51292E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16059E-1	-7.97701E-1	-9.13177E0	-9.14164E0	5.22137E-3	9.31501E-2	2.73027E1	-3.26657E1	-3.265E1	2.67271E1	1.7017E-8	2.52428E-3	2.52428E-3	6.3074E-3	2.50741E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.15988E-1	-7.97844E-1	-9.1311E0	-9.14173E0	5.05447E-3	9.32693E-2	2.72492E1	-3.25876E1	-3.2626E1	2.68226E1	1.70028E-8	2.51739E-3	2.51739E-3	6.33436E-3	2.50638E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.15725E-1	-7.98059E-1	-9.1316E0	-9.1419E0	5.24521E-3	9.30786E-2	2.73181E1	-3.26714E1	-3.26337E1	2.6783E1	1.70017E-8	2.52027E-3	2.52027E-3	6.30182E-3	2.51514E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.15892E-1	-7.98035E-1	-9.13138E0	-9.14187E0	5.45979E-3	9.29832E-2	2.73141E1	-3.26735E1	-3.26236E1	2.6752E1	1.70173E-8	2.52384E-3	2.52384E-3	6.31817E-3	2.52354E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.15821E-1	-7.97749E-1	-9.13126E0	-9.14197E0	4.93526E-3	9.33409E-2	2.73027E1	-3.26661E1	-3.26402E1	2.66382E1	1.701E-8	2.52384E-3	2.52384E-3	6.29128E-3	2.51924E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.15892E-1	-7.98321E-1	-9.13103E0	-9.14211E0	5.45979E-3	9.33409E-2	2.72793E1	-3.26627E1	-3.26362E1	2.68286E1	1.70023E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.50523E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.15606E-1	-7.98011E-1	-9.13093E0	-9.14183E0	5.24521E-3	9.31978E-2	2.72864E1	-3.26534E1	-3.26145E1	2.68075E1	1.701E-8	2.51632E-3	2.51632E-3	6.33977E-3	2.51709E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.15892E-1	-7.97892E-1	-9.13115E0	-9.14195E0	5.62668E-3	9.34124E-2	2.72994E1	-3.26947E1	-3.26565E1	2.6792E1	1.69994E-8	2.5199E-3	2.5199E-3	6.31222E-3	2.50911E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16298E-1	-7.97462E-1	-9.13138E0	-9.14199E0	5.88894E-3	9.30309E-2	2.73095E1	-3.26541E1	-3.26416E1	2.67751E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16345E-1	-7.97749E-1	-9.13136E0	-9.14209E0	5.38826E-3	9.32693E-2	2.73123E1	-3.26628E1	-3.26289E1	2.68274E1	1.70071E-8	2.52091E-3	2.52091E-3	6.33492E-3	2.52358E-2