[Scan]
initial_time=2016-02-15T18:34:12
final_time=2016-02-15T18:34:31
ip_count=19
run=1030
dataset=2
scan=149
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=6.68657E-10
ql2_vset=
ql2_vmon=-7.97534E-1
ql2_imon=3.02243E-10
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=5.59711E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=5.3848E-10
mult1=-1.01377E-8
mult2=-2.82041E-9
rf_tmon=-4.60255E-3
rf_agc=3.33396E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=4.12691E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.62427E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05057E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53577E1
cs_ef1b_imon=2.96866E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04886E1
cs_ea1_imon=2.50471E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35874E0
lens1_imon=2.55217E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.98665E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04033E1
cs_ea2_imon=1.55228E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8381E1
cs_ef1a_imon=2.98004E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=4.16243E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11319E1
os_restr1_imon=2.86658E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1539E1
os_ea1_imon=1.89583E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63724E1
os_ef1bup_imon=3.09901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2551E0
cs_ionrep_imon=1.20548E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93279E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01619E1
cs_anode1_imon=3.04724E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=7.82549E-10
tplens_vset=1.4E-1
tplens_vmon=1.58015E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.51731E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.58544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02965E2
lens6_imon=2.98587E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.29058E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27132E0
ionrepsh_imon=1.87961E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.337E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74526E1
cs_ef2b_imon=3.12692E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.50522E-1
os_ea2_imon=-5.26458E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71319E1
cs_ef2a_imon=3.19338E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6228E0
os_ef2alow_imon=-2.58999E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56216E-1
os_ef2bup_imon=-5.366E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10713E1
os_restr2_imon=2.86768E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01962E1
cs_anode2_imon=2.26584E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72871E1
iondef1_imon=1.09769E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67728E1
iondef4_imon=1.07282E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.001E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82952E-1
olens1_imon=2.97034E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1075E0
cs_ionaccel_imon=-1.79685E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47182E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56521E1
einzel_imon=7.57401E-6
window_vset=0.0E0
window_vmon=2.21139E-1
window_imon=-1.02941E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.3918E-4
mask2_vset=0.0E0
mask2_vmon=-1.86264E1
mask2_imon=-6.51194E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.57027E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.56449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.48375E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.07061E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33848E1
os_fil1_imon=5.57929E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.03951E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64774E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3081E1
cs_fil1_imon=1.00058E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63528E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66766E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.08661E-2
os_fil2_imon=-2.14407E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.3842E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87706E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30377E-1
cs_fil2_imon=-2.45007E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.99742E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22433E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.99423E-1
res40_imon=-2.66343E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16035E-1	-7.97749E-1	-9.13165E0	-9.14185E0	5.6982E-3	9.3174E-2	2.73334E1	-3.26691E1	-3.26124E1	2.68818E1	1.69867E-8	2.5225E-3	2.5225E-3	6.32978E-3	2.52407E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16011E-1	-7.97701E-1	-9.13143E0	-9.14207E0	5.43594E-3	9.3317E-2	2.73075E1	-3.26518E1	-3.26464E1	2.66815E1	1.70247E-8	2.52342E-3	2.52342E-3	6.3074E-3	2.52012E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.16131E-1	-7.97749E-1	-9.13174E0	-9.14195E0	6.12736E-3	9.3174E-2	2.72987E1	-3.26671E1	-3.26671E1	2.68157E1	1.69875E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.52489E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16083E-1	-7.9782E-1	-9.13162E0	-9.14197E0	5.62668E-3	9.30786E-2	2.73093E1	-3.26567E1	-3.26248E1	2.67902E1	1.70173E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.52569E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16369E-1	-7.97272E-1	-9.13141E0	-9.14209E0	5.76973E-3	9.3317E-2	2.72967E1	-3.26621E1	-3.26326E1	2.6804E1	1.70096E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.51832E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16321E-1	-7.97439E-1	-9.13112E0	-9.14216E0	5.19753E-3	9.33647E-2	2.73141E1	-3.26795E1	-3.26128E1	2.68286E1	1.70318E-8	2.52757E-3	2.52757E-3	6.35692E-3	2.50959E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16011E-1	-7.97844E-1	-9.13119E0	-9.14216E0	5.45979E-3	9.29594E-2	2.73141E1	-3.26573E1	-3.26092E1	2.6792E1	1.70028E-8	2.52707E-3	2.52707E-3	6.3074E-3	2.51494E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.15964E-1	-7.97653E-1	-9.13095E0	-9.14197E0	5.53131E-3	9.32217E-2	2.73015E1	-3.26549E1	-3.26248E1	2.67668E1	1.70243E-8	2.5147E-3	2.5147E-3	6.32418E-3	2.50182E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.15582E-1	-7.97868E-1	-9.13134E0	-9.14195E0	4.93526E-3	9.28879E-2	2.7298E1	-3.26767E1	-3.26301E1	2.68018E1	1.70028E-8	2.52169E-3	2.52169E-3	6.31817E-3	2.50424E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16011E-1	-7.97653E-1	-9.13131E0	-9.1419E0	5.07832E-3	9.34124E-2	2.72939E1	-3.26714E1	-3.26248E1	2.67986E1	1.70173E-8	2.51096E-3	2.51096E-3	6.30202E-3	2.52139E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16274E-1	-7.97582E-1	-9.13141E0	-9.14197E0	5.126E-3	9.31263E-2	2.73153E1	-3.26536E1	-3.26386E1	2.67932E1	1.7017E-8	2.52318E-3	2.52318E-3	6.28006E-3	2.51395E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16226E-1	-7.97701E-1	-9.13167E0	-9.14216E0	5.91278E-3	9.28879E-2	2.72276E1	-3.25984E1	-3.27011E1	2.67812E1	1.70028E-8	2.51203E-3	2.51203E-3	6.31278E-3	2.53E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.16202E-1	-7.97725E-1	-9.13134E0	-9.14197E0	5.00679E-3	9.31263E-2	2.73098E1	-3.26767E1	-3.26166E1	2.67962E1	1.70096E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.52489E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.16488E-1	-7.97486E-1	-9.13119E0	-9.14197E0	5.48363E-3	9.29594E-2	2.73399E1	-3.26691E1	-3.26242E1	2.68175E1	1.70096E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.50959E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.15773E-1	-7.97606E-1	-9.1311E0	-9.14207E0	5.29289E-3	9.28879E-2	2.73228E1	-3.26493E1	-3.26138E1	2.67627E1	1.70173E-8	2.52276E-3	2.52276E-3	6.3074E-3	2.52354E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.15916E-1	-7.97701E-1	-9.13129E0	-9.1423E0	4.98295E-3	9.31263E-2	2.73063E1	-3.26627E1	-3.26278E1	2.67686E1	1.70243E-8	2.52139E-3	2.52139E-3	6.31299E-3	2.5196E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.15964E-1	-7.97296E-1	-9.13105E0	-9.14223E0	5.00679E-3	9.31025E-2	2.72999E1	-3.26712E1	-3.26382E1	2.68151E1	1.69875E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.52709E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.15797E-1	-7.97677E-1	-9.13129E0	-9.14214E0	5.19753E-3	9.3174E-2	2.7317E1	-3.26553E1	-3.26354E1	2.6802E1	1.70108E-8	2.51472E-3	2.51472E-3	6.3074E-3	2.52305E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.15654E-1	-7.97486E-1	-9.1311E0	-9.1423E0	5.29289E-3	9.30071E-2	2.73128E1	-3.26626E1	-3.26048E1	2.67717E1	1.7013E-8	2.52362E-3	2.52362E-3	6.30182E-3	2.5263E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.1625E-1	-7.97534E-1	-9.13138E0	-9.14199E0	5.24521E-3	9.3174E-2	2.72871E1	-3.26747E1	-3.26242E1	2.67728E1