[Scan]
initial_time=2016-02-15T18:34:38
final_time=2016-02-15T18:34:58
ip_count=19
run=1030
dataset=2
scan=150
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=6.73771E-10
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=3.03137E-10
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=5.54538E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.66149E-10
mult1=-9.83036E-9
mult2=-2.70758E-9
rf_tmon=-3.70721E-3
rf_agc=3.43237E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=3.89194E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.56299E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12524E2
lens4a_imon=2.05187E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=2.97081E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04958E1
cs_ea1_imon=2.50182E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39659E0
lens1_imon=2.60625E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.54687E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=2.97297E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=3.80683E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=2.87746E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15432E1
os_ea1_imon=1.8724E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=1.22243E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=3.05226E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=7.10702E-10
tplens_vset=1.4E-1
tplens_vmon=1.60418E0
tplens_imon=-2.59691E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26496E1
iondef3_imon=1.49676E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.59049E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98458E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=3.83723E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26772E0
ionrepsh_imon=1.8843E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.75756E-1
os_ea2_imon=-5.44483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60176E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.30751E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=2.87026E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30253E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.26083E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.02262E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=2.97368E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-1.85186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=1.95118E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=7.56666E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.76997E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.40444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53089E0
defgridb_imon=6.24004E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33841E1
os_fil1_imon=5.17866E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.19999E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64777E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30787E1
cs_fil1_imon=9.99279E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62678E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66831E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.95763E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.578E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77652E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22367E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.53E-2
chamber_ion_pmon=1.70028E-8
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.70104E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16083E-1	-7.97963E-1	-9.13115E0	-9.14214E0	5.24521E-3	9.31501E-2	2.7308E1	-3.26478E1	-3.26384E1	2.67812E1	1.69801E-8	2.51771E-3	2.51771E-3	6.29098E-3	2.51177E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16035E-1	-7.97725E-1	-9.13148E0	-9.14226E0	5.4121E-3	9.28402E-2	2.7299E1	-3.26676E1	-3.26027E1	2.67764E1	1.70176E-8	2.52448E-3	2.52448E-3	6.31269E-3	2.52012E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.15821E-1	-7.97892E-1	-9.13126E0	-9.1418E0	5.36442E-3	9.31263E-2	2.73045E1	-3.26496E1	-3.26154E1	2.67908E1	1.70088E-8	2.52179E-3	2.52179E-3	6.31879E-3	2.53005E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.15845E-1	-7.97939E-1	-9.13146E0	-9.14223E0	5.43594E-3	9.30309E-2	2.72895E1	-3.26524E1	-3.26452E1	2.6852E1	1.70028E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.52354E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16011E-1	-7.97963E-1	-9.13126E0	-9.14226E0	5.74589E-3	9.30786E-2	2.73351E1	-3.26717E1	-3.26416E1	2.67827E1	1.70028E-8	2.52384E-3	2.52384E-3	6.31278E-3	2.52139E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.15773E-1	-7.97963E-1	-9.13124E0	-9.14216E0	5.62668E-3	9.31025E-2	2.73069E1	-3.26579E1	-3.26146E1	2.67649E1	1.70023E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.50305E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16131E-1	-7.97749E-1	-9.13136E0	-9.14237E0	5.19753E-3	9.3174E-2	2.72901E1	-3.26621E1	-3.26206E1	2.68647E1	1.70023E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.51832E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.15773E-1	-7.98225E-1	-9.13153E0	-9.1419E0	5.10216E-3	9.2864E-2	2.73027E1	-3.26526E1	-3.26048E1	2.67908E1	1.70096E-8	2.52538E-3	2.52538E-3	6.31288E-3	2.5227E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16226E-1	-7.97939E-1	-9.13119E0	-9.14187E0	5.17368E-3	9.31501E-2	2.72915E1	-3.2652E1	-3.25835E1	2.67866E1	1.7017E-8	2.5199E-3	2.5199E-3	6.33486E-3	2.50523E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16107E-1	-7.97892E-1	-9.13103E0	-9.1419E0	5.07832E-3	9.29832E-2	2.73143E1	-3.26713E1	-3.26401E1	2.67992E1	1.701E-8	2.52061E-3	2.52061E-3	6.33977E-3	2.51494E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.1625E-1	-7.97796E-1	-9.13086E0	-9.14207E0	5.14984E-3	9.26971E-2	2.72927E1	-3.26803E1	-3.26402E1	2.6783E1	1.70096E-8	2.52867E-3	2.52867E-3	6.31288E-3	2.52489E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16226E-1	-7.97677E-1	-9.13107E0	-9.14202E0	5.31673E-3	9.31501E-2	2.73859E1	-3.27295E1	-3.25372E1	2.67764E1	1.69949E-8	2.52099E-3	2.52099E-3	6.29645E-3	2.52489E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.15797E-1	-7.97653E-1	-9.13136E0	-9.14226E0	5.55515E-3	9.30548E-2	2.73045E1	-3.26759E1	-3.26014E1	2.67842E1	1.70023E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.52489E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.16345E-1	-7.98202E-1	-9.1311E0	-9.14183E0	5.50747E-3	9.31501E-2	2.73123E1	-3.26699E1	-3.26134E1	2.6804E1	1.69949E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.52051E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.16512E-1	-7.98178E-1	-9.13129E0	-9.14211E0	5.29289E-3	9.33409E-2	2.73334E1	-3.26826E1	-3.26408E1	2.681E1	1.70244E-8	2.52428E-3	2.52428E-3	6.33486E-3	2.50088E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.16226E-1	-7.97939E-1	-9.13124E0	-9.14185E0	5.81741E-3	9.34839E-2	2.73051E1	-3.26482E1	-3.26392E1	2.67613E1	1.70028E-8	2.52492E-3	2.52492E-3	6.3074E-3	2.51924E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16274E-1	-7.97319E-1	-9.13148E0	-9.14202E0	5.45979E-3	9.32932E-2	2.73027E1	-3.26272E1	-3.2617E1	2.68178E1	1.69791E-8	2.52809E-3	2.52809E-3	6.31858E-3	2.5263E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16202E-1	-7.97677E-1	-9.13138E0	-9.14178E0	5.45979E-3	9.30071E-2	2.72991E1	-3.26885E1	-3.2614E1	2.68094E1	1.7017E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.51832E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16464E-1	-7.98082E-1	-9.13112E0	-9.14207E0	5.43594E-3	9.28402E-2	2.72998E1	-3.26649E1	-3.26378E1	2.67999E1	1.70028E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.52569E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16369E-1	-7.98368E-1	-9.13122E0	-9.14185E0	5.126E-3	9.30548E-2	2.73027E1	-3.26726E1	-3.26496E1	2.6795E1	1.70028E-8	2.51203E-3	2.51203E-3	6.29128E-3	2.53E-2