[Scan]
initial_time=2016-02-15T18:35:05
final_time=2016-02-15T18:35:24
ip_count=19
run=1030
dataset=2
scan=151
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.15868E-1
ql1_imon=6.6359E-10
ql2_vset=
ql2_vmon=-7.97701E-1
ql2_imon=3.06165E-10
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=5.71334E-10
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=5.79548E-10
mult1=-9.66815E-9
mult2=-2.74456E-9
rf_tmon=-4.38625E-3
rf_agc=3.34477E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=3.9736E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67506E0
bslens_imon=2.58219E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19978E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05192E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=2.95819E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=2.49513E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38259E0
lens1_imon=2.78748E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.55364E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85037E1
cs_ef1a_imon=2.98955E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=4.21917E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=2.87999E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15252E1
os_ea1_imon=1.8867E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=1.21528E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01557E1
cs_anode1_imon=3.05946E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=6.84655E-10
tplens_vset=1.4E-1
tplens_vmon=1.62669E0
tplens_imon=-3.66136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.49772E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.34816E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26095E0
ionrepsh_imon=1.89095E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.19286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74321E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.52805E-1
os_ea2_imon=-5.71422E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00683E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59575E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.61985E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=2.8753E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01341E1
cs_anode2_imon=2.26767E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72853E1
iondef1_imon=1.10485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.07584E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.00802E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=2.89333E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-2.11855E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=1.93316E-1
window_imon=-9.36451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.62231E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.61004E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.31438E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35831E0
defgridb_imon=6.08975E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33826E1
os_fil1_imon=5.24474E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.94771E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64933E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30831E1
cs_fil1_imon=1.00068E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.60606E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66602E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7344E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22377E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.51395E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.41583E-1
res40_imon=-2.78168E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16107E-1	-7.98345E-1	-9.13076E0	-9.14187E0	5.4121E-3	9.30071E-2	2.73075E1	-3.26756E1	-3.2629E1	2.68172E1	1.70023E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.51177E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16178E-1	-7.98059E-1	-9.13107E0	-9.14199E0	5.67436E-3	9.28164E-2	2.73326E1	-3.26731E1	-3.26193E1	2.67517E1	1.69883E-8	2.51417E-3	2.51417E-3	6.33977E-3	2.5128E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.16178E-1	-7.98178E-1	-9.13107E0	-9.14178E0	5.45979E-3	9.32693E-2	2.7312E1	-3.2681E1	-3.2626E1	2.68047E1	1.69566E-8	2.51804E-3	2.51804E-3	6.3074E-3	2.50182E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16059E-1	-7.98154E-1	-9.13134E0	-9.1418E0	5.57899E-3	9.32693E-2	2.73021E1	-3.26452E1	-3.2632E1	2.68022E1	1.70104E-8	2.52025E-3	2.52025E-3	6.32328E-3	2.50329E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.15868E-1	-7.98273E-1	-9.13155E0	-9.14187E0	5.57899E-3	9.3174E-2	2.72951E1	-3.26726E1	-3.26284E1	2.67908E1	1.70096E-8	2.52757E-3	2.52757E-3	6.30192E-3	2.52489E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.1594E-1	-7.98416E-1	-9.1315E0	-9.14218E0	5.38826E-3	9.30309E-2	2.73069E1	-3.26482E1	-3.26404E1	2.67794E1	1.69811E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.52139E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.16274E-1	-7.97939E-1	-9.13148E0	-9.14202E0	5.81741E-3	9.32217E-2	2.72997E1	-3.26687E1	-3.26236E1	2.67121E1	1.70023E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.52051E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.15988E-1	-7.9782E-1	-9.1311E0	-9.14168E0	5.65052E-3	9.3317E-2	2.73111E1	-3.26609E1	-3.26248E1	2.68482E1	1.69955E-8	2.52384E-3	2.52384E-3	6.31278E-3	2.50852E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.15845E-1	-7.98035E-1	-9.13141E0	-9.14207E0	5.67436E-3	9.32455E-2	2.72939E1	-3.26549E1	-3.26089E1	2.68118E1	1.7017E-8	2.52209E-3	2.52209E-3	6.29645E-3	2.50741E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09665E0	-8.1594E-1	-7.98082E-1	-9.13126E0	-9.14226E0	5.57899E-3	9.34362E-2	2.7302E1	-3.26701E1	-3.26291E1	2.67814E1	1.70096E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.53148E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16035E-1	-7.9751E-1	-9.13098E0	-9.14218E0	6.1512E-3	9.31025E-2	2.73045E1	-3.26714E1	-3.26254E1	2.68719E1	1.7017E-8	2.52757E-3	2.52757E-3	6.3074E-3	2.50088E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16226E-1	-7.97987E-1	-9.1311E0	-9.14204E0	5.96046E-3	9.32217E-2	2.72336E1	-3.26212E1	-3.26981E1	2.67662E1	1.70096E-8	2.51662E-3	2.51662E-3	6.34588E-3	2.5227E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16131E-1	-7.97844E-1	-9.13112E0	-9.14187E0	5.4121E-3	9.33409E-2	2.73075E1	-3.26446E1	-3.26482E1	2.68082E1	1.7017E-8	2.51552E-3	2.51552E-3	6.29645E-3	2.5227E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.15797E-1	-7.98082E-1	-9.13115E0	-9.14192E0	5.6982E-3	9.28402E-2	2.7325E1	-3.26909E1	-3.26311E1	2.68134E1	1.70023E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.52489E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.15821E-1	-7.97987E-1	-9.13088E0	-9.14202E0	5.65052E-3	9.25779E-2	2.73069E1	-3.26682E1	-3.26242E1	2.67692E1	1.70178E-8	2.52301E-3	2.52301E-3	6.31779E-3	2.52305E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.15868E-1	-7.97677E-1	-9.13103E0	-9.14209E0	5.57899E-3	9.29594E-2	2.73246E1	-3.2639E1	-3.2626E1	2.68304E1	1.70244E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.51395E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.15296E-1	-7.97677E-1	-9.1311E0	-9.14218E0	5.31673E-3	9.33409E-2	2.73088E1	-3.26921E1	-3.26321E1	2.67409E1	1.69949E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.50959E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.15606E-1	-7.98225E-1	-9.13115E0	-9.14202E0	5.74589E-3	9.29356E-2	2.73236E1	-3.267E1	-3.26301E1	2.68157E1	1.70096E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.51613E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.1625E-1	-7.97701E-1	-9.13122E0	-9.14221E0	5.43594E-3	9.31025E-2	2.73198E1	-3.2659E1	-3.26296E1	2.67547E1	1.70247E-8	2.53083E-3	2.53083E-3	6.32858E-3	2.52223E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.15868E-1	-7.97701E-1	-9.13105E0	-9.14233E0	5.72205E-3	9.30786E-2	2.72853E1	-3.26663E1	-3.2629E1	2.68262E1	1.70096E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.51395E-2