[Scan]
initial_time=2016-02-15T18:35:32
final_time=2016-02-15T18:35:51
ip_count=19
run=1030
dataset=2
scan=152
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08829E-4
ql1_vset=
ql1_vmon=-8.15725E-1
ql1_imon=5.97072E-10
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=3.00193E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=5.84638E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.54967E-10
mult1=-9.72397E-9
mult2=-2.69386E-9
rf_tmon=-4.3443E-3
rf_agc=3.30849E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=3.93915E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05165E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53605E1
cs_ef1b_imon=2.98364E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=2.50615E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39239E0
lens1_imon=2.66753E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64633E1
os_ef1alow_imon=2.96755E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03937E1
cs_ea2_imon=1.55336E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84088E1
cs_ef1a_imon=2.98589E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=4.03166E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11098E1
os_restr1_imon=2.85602E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15095E1
os_ea1_imon=1.89151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.08245E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24309E0
cs_ionrep_imon=1.22423E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0189E1
cs_anode1_imon=3.05251E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=7.13396E-10
tplens_vset=1.4E-1
tplens_vmon=1.59817E0
tplens_imon=-3.6063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26331E1
iondef3_imon=1.48451E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.57751E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02979E2
lens6_imon=2.98483E-4
ql6_vset=1.0E-1
ql6_vmon=9.26495E-2
ql6_imon=4.01938E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=1.87456E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34E1
lens5b_imon=2.19252E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74782E1
cs_ef2b_imon=3.1195E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.48719E-1
os_ea2_imon=-6.31002E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.17788E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62094E0
os_ef2alow_imon=-2.52192E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.19038E-1
os_ef2bup_imon=-5.32137E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1073E1
os_restr2_imon=2.8564E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01921E1
cs_anode2_imon=2.26357E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72998E1
iondef1_imon=1.1031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.08578E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.99468E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=2.74944E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12453E0
cs_ionaccel_imon=-1.6499E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47103E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5623E1
einzel_imon=7.75521E-6
window_vset=0.0E0
window_vmon=2.05745E-1
window_imon=-1.28687E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.86413E1
mask2_imon=-6.28173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92702E3
multa_neg_imon=7.39723E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93681E3
defgrida_imon=6.64379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50051E3
multb_neg_imon=7.05476E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51284E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33845E1
os_fil1_imon=5.93296E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.27405E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6494E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30757E1
cs_fil1_imon=9.9942E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62646E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66906E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.03502E-2
os_fil2_imon=-2.52527E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.55721E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83065E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.60013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47305E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22217E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32978E-3
inlet_lpb_pmon=2.51292E-2
chamber_ion_pmon=1.70168E-8
chamber_cvt_pmon=2.52027E-3
foreline_cvt_pmon=2.52027E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.79771E-1
res40_imon=-2.49198E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16107E-1	-7.97868E-1	-9.13107E0	-9.14199E0	5.4121E-3	9.32455E-2	2.72935E1	-3.26486E1	-3.26167E1	2.68337E1	1.70096E-8	2.52428E-3	2.52428E-3	6.30192E-3	2.50959E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16226E-1	-7.98225E-1	-9.13134E0	-9.14204E0	5.34058E-3	9.32217E-2	2.73216E1	-3.26762E1	-3.26278E1	2.67866E1	1.69955E-8	2.52169E-3	2.52169E-3	6.31278E-3	2.50852E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.1656E-1	-7.98154E-1	-9.13126E0	-9.14216E0	5.8651E-3	9.31501E-2	2.73098E1	-3.26773E1	-3.25942E1	2.68273E1	1.69942E-8	2.51693E-3	2.51693E-3	6.32418E-3	2.53078E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16703E-1	-7.97796E-1	-9.13129E0	-9.14202E0	5.57899E-3	9.31025E-2	2.72921E1	-3.26649E1	-3.26384E1	2.67764E1	1.70176E-8	2.51709E-3	2.51709E-3	6.29157E-3	2.52858E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16369E-1	-7.97677E-1	-9.13141E0	-9.1419E0	5.65052E-3	9.29356E-2	2.73123E1	-3.26669E1	-3.26434E1	2.68406E1	1.70096E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.51613E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.15916E-1	-7.97915E-1	-9.13155E0	-9.14173E0	5.53131E-3	9.31025E-2	2.72733E1	-3.26374E1	-3.26104E1	2.6771E1	1.70246E-8	2.51417E-3	2.51417E-3	6.33436E-3	2.50638E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16131E-1	-7.98154E-1	-9.13126E0	-9.14166E0	5.36442E-3	9.29594E-2	2.72823E1	-3.26476E1	-3.26494E1	2.68034E1	1.70168E-8	2.51693E-3	2.51693E-3	6.32418E-3	2.52183E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16345E-1	-7.98535E-1	-9.13167E0	-9.14173E0	5.29289E-3	9.29356E-2	2.72945E1	-3.26431E1	-3.26101E1	2.67505E1	1.70318E-8	2.51525E-3	2.51525E-3	6.3074E-3	2.52139E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16059E-1	-7.97963E-1	-9.13134E0	-9.14199E0	5.38826E-3	9.27925E-2	2.73307E1	-3.26621E1	-3.26447E1	2.68564E1	1.70023E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.52709E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16441E-1	-7.97749E-1	-9.13155E0	-9.14228E0	5.50747E-3	9.29117E-2	2.72859E1	-3.26573E1	-3.26344E1	2.67902E1	1.70041E-8	2.51908E-3	2.51908E-3	6.31151E-3	2.51942E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09402E0	-8.15773E-1	-7.97749E-1	-9.13138E0	-9.14202E0	5.22137E-3	9.30786E-2	2.73237E1	-3.26663E1	-3.26561E1	2.67583E1	1.70243E-8	2.52139E-3	2.52139E-3	6.30182E-3	2.52183E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.15845E-1	-7.98106E-1	-9.13165E0	-9.1418E0	5.67436E-3	9.27925E-2	2.72612E1	-3.26452E1	-3.27221E1	2.68563E1	1.70173E-8	2.51847E-3	2.51847E-3	6.29665E-3	2.51066E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.15988E-1	-7.97939E-1	-9.13143E0	-9.14171E0	5.53131E-3	9.2864E-2	2.73201E1	-3.26392E1	-3.26194E1	2.67992E1	1.70244E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.50088E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.15988E-1	-7.98178E-1	-9.13124E0	-9.1418E0	5.50747E-3	9.28879E-2	2.73057E1	-3.26561E1	-3.26461E1	2.67686E1	1.6958E-8	2.52428E-3	2.52428E-3	6.31288E-3	2.52489E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0934E0	-8.16464E-1	-7.97701E-1	-9.13131E0	-9.14185E0	5.50747E-3	9.29832E-2	2.72817E1	-3.26615E1	-3.26512E1	2.67938E1	1.7017E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.5227E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.1594E-1	-7.97844E-1	-9.13136E0	-9.14202E0	5.48363E-3	9.31263E-2	2.73015E1	-3.26711E1	-3.26404E1	2.68268E1	1.69955E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.52354E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16035E-1	-7.97462E-1	-9.13143E0	-9.14197E0	5.45979E-3	9.32455E-2	2.72965E1	-3.2656E1	-3.26303E1	2.6777E1	1.70244E-8	2.52977E-3	2.52977E-3	6.31837E-3	2.52051E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16131E-1	-7.98011E-1	-9.1315E0	-9.14202E0	5.4121E-3	9.29117E-2	2.72895E1	-3.26573E1	-3.26057E1	2.67984E1	1.70168E-8	2.52139E-3	2.52139E-3	6.32418E-3	2.51737E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.15988E-1	-7.97844E-1	-9.13136E0	-9.14216E0	5.22137E-3	9.32217E-2	2.73137E1	-3.2667E1	-3.26236E1	2.68256E1	1.70104E-8	2.51287E-3	2.51287E-3	6.31798E-3	2.52012E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.15725E-1	-7.97772E-1	-9.13124E0	-9.14195E0	5.10216E-3	9.26495E-2	2.72998E1	-3.26655E1	-3.26331E1	2.68094E1	1.70168E-8	2.52027E-3	2.52027E-3	6.32978E-3	2.51292E-2