[Scan]
initial_time=2016-02-15T18:35:58
final_time=2016-02-15T18:36:18
ip_count=19
run=1030
dataset=2
scan=153
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.16154E-1
ql1_imon=6.65653E-10
ql2_vset=
ql2_vmon=-7.97486E-1
ql2_imon=3.19374E-10
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=5.42271E-10
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=5.58627E-10
mult1=-1.01868E-8
mult2=-2.7626E-9
rf_tmon=-5.397E-3
rf_agc=3.29978E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=4.17674E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66444E0
bslens_imon=2.61051E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=1.9858E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12511E2
lens4a_imon=2.05036E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=2.96144E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=2.51034E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36548E0
lens1_imon=2.66714E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03761E1
cs_ea2_imon=1.54161E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84544E1
cs_ef1a_imon=2.99567E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=4.19998E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=2.87494E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15075E1
os_ea1_imon=1.88529E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.22271E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93247E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=3.04829E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=7.1826E-10
tplens_vset=1.4E-1
tplens_vmon=1.62374E0
tplens_imon=-2.59954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26223E1
iondef3_imon=1.49312E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26566E1
iondef2_imon=1.59222E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.99888E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26567E0
ionrepsh_imon=1.89413E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33534E1
lens5b_imon=2.17552E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.62243E-1
os_ea2_imon=-4.08609E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62519E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.25345E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=2.87206E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.26299E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73326E1
iondef1_imon=1.10308E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67842E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.99091E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=3.11267E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=1.789E-1
window_imon=-1.05178E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39073E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.56922E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.50386E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=6.97814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52367E0
defgridb_imon=6.19593E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33817E1
os_fil1_imon=4.25365E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.88765E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64801E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3079E1
cs_fil1_imon=9.99435E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61831E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66885E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04064E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79388E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15424E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22466E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34588E-3
inlet_lpb_pmon=2.52051E-2
chamber_ion_pmon=1.7017E-8
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.92929E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16011E-1	-7.9782E-1	-9.13148E0	-9.14195E0	5.17368E-3	9.31978E-2	2.73228E1	-3.26649E1	-3.26089E1	2.67728E1	1.70246E-8	2.52707E-3	2.52707E-3	6.30202E-3	2.53865E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16345E-1	-7.97915E-1	-9.13162E0	-9.14202E0	5.50747E-3	9.34124E-2	2.72935E1	-3.26615E1	-3.26493E1	2.68196E1	1.69949E-8	2.5199E-3	2.5199E-3	6.33486E-3	2.53148E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16059E-1	-7.97892E-1	-9.13136E0	-9.14192E0	5.65052E-3	9.31025E-2	2.72732E1	-3.26927E1	-3.26107E1	2.67553E1	1.69949E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.52928E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16274E-1	-7.97582E-1	-9.13136E0	-9.14216E0	5.55515E-3	9.30309E-2	2.7319E1	-3.26631E1	-3.26277E1	2.6843E1	1.70246E-8	2.52384E-3	2.52384E-3	6.32896E-3	2.52139E-2
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.16178E-1	-7.97725E-1	-9.13122E0	-9.14187E0	5.62668E-3	9.3174E-2	2.73045E1	-3.26834E1	-3.26167E1	2.67879E1	1.70028E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.51709E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16107E-1	-7.97725E-1	-9.13131E0	-9.14171E0	5.50747E-3	9.31501E-2	2.72936E1	-3.26623E1	-3.26387E1	2.67995E1	1.70248E-8	2.5199E-3	2.5199E-3	6.3282E-3	2.51062E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16011E-1	-7.97749E-1	-9.1316E0	-9.14183E0	5.55515E-3	9.31263E-2	2.72868E1	-3.26809E1	-3.26366E1	2.6807E1	1.69849E-8	2.52338E-3	2.52338E-3	6.28423E-3	2.51305E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16298E-1	-7.97915E-1	-9.13179E0	-9.14204E0	5.38826E-3	9.30309E-2	2.72871E1	-3.26344E1	-3.26152E1	2.68016E1	1.7017E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.50305E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.16751E-1	-7.97796E-1	-9.13162E0	-9.14192E0	5.38826E-3	9.32455E-2	2.72837E1	-3.26324E1	-3.26295E1	2.68012E1	1.70318E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.50741E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16488E-1	-7.97486E-1	-9.13136E0	-9.14166E0	5.34058E-3	9.32455E-2	2.73075E1	-3.26554E1	-3.26591E1	2.68196E1	1.70108E-8	2.52405E-3	2.52405E-3	6.30221E-3	2.53345E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.1687E-1	-7.97606E-1	-9.13148E0	-9.14161E0	5.14984E-3	9.33886E-2	2.72991E1	-3.26771E1	-3.2626E1	2.67842E1	1.70017E-8	2.52585E-3	2.52585E-3	6.33538E-3	2.52183E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.16655E-1	-7.97129E-1	-9.13165E0	-9.1419E0	5.36442E-3	9.30071E-2	2.73285E1	-3.26837E1	-3.26236E1	2.67625E1	1.701E-8	2.51525E-3	2.51525E-3	6.3074E-3	2.52354E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09665E0	-8.16441E-1	-7.97272E-1	-9.13134E0	-9.14173E0	5.53131E-3	9.31263E-2	2.72951E1	-3.26685E1	-3.26461E1	2.67798E1	1.70244E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.50741E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.16417E-1	-7.97701E-1	-9.13169E0	-9.14192E0	5.53131E-3	9.3174E-2	2.73153E1	-3.26639E1	-3.26272E1	2.68256E1	1.701E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.50852E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.1594E-1	-7.9751E-1	-9.13165E0	-9.14187E0	5.29289E-3	9.31501E-2	2.7288E1	-3.26402E1	-3.26278E1	2.67571E1	1.70096E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.50741E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.16154E-1	-7.97892E-1	-9.13169E0	-9.14183E0	5.45979E-3	9.3317E-2	2.73177E1	-3.26639E1	-3.2644E1	2.68545E1	1.69949E-8	2.52209E-3	2.52209E-3	6.33486E-3	2.50959E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.15988E-1	-7.97677E-1	-9.13165E0	-9.14176E0	5.60284E-3	9.33886E-2	2.72937E1	-3.26543E1	-3.26368E1	2.67995E1	1.70023E-8	2.52428E-3	2.52428E-3	6.31288E-3	2.50741E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.16178E-1	-7.97582E-1	-9.13148E0	-9.14226E0	5.55515E-3	9.32455E-2	2.72999E1	-3.26463E1	-3.26434E1	2.67914E1	1.69883E-8	2.51525E-3	2.51525E-3	6.32356E-3	2.51066E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16488E-1	-7.97415E-1	-9.13174E0	-9.1419E0	5.53131E-3	9.31025E-2	2.73099E1	-3.26729E1	-3.26338E1	2.67896E1	1.69962E-8	2.51603E-3	2.51603E-3	6.32858E-3	2.52435E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16154E-1	-7.97486E-1	-9.1316E0	-9.14221E0	5.48363E-3	9.34124E-2	2.73326E1	-3.26566E1	-3.26223E1	2.67842E1	1.7017E-8	2.52209E-3	2.52209E-3	6.34588E-3	2.52051E-2