[Scan]
initial_time=2016-02-15T18:36:25
final_time=2016-02-15T18:36:44
ip_count=19
run=1030
dataset=2
scan=154
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.0875E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=6.53732E-10
ql2_vset=
ql2_vmon=-7.97915E-1
ql2_imon=3.09801E-10
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=5.11491E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.97429E-10
mult1=-1.01016E-8
mult2=-2.84437E-9
rf_tmon=-4.35621E-3
rf_agc=3.31173E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=4.01366E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67388E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=2.97657E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02344E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04811E1
cs_ea1_imon=2.50645E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38967E0
lens1_imon=2.56449E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.55081E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84935E1
cs_ef1a_imon=2.98883E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.78513E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=2.87674E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=1.89201E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2462E0
cs_ionrep_imon=1.2128E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93565E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=3.05262E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.58195E-10
tplens_vset=1.4E-1
tplens_vmon=1.60722E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.49453E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0298E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=3.62861E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=1.89095E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33953E1
lens5b_imon=2.18012E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.56934E-1
os_ea2_imon=-6.35131E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06136E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62278E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41562E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=2.86557E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.29751E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.26623E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.09033E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.00089E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=3.04306E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=2.18544E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-7.02193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92603E3
multa_neg_imon=7.39225E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.51801E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.43118E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4971E0
defgridb_imon=6.19239E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3381E1
os_fil1_imon=5.13061E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.83959E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64859E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30776E1
cs_fil1_imon=1.00026E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62336E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66696E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91401E-2
os_fil2_imon=-2.5158E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.33773E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70909E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.16742E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22408E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.50741E-2
chamber_ion_pmon=1.70023E-8
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.69503E-1
res40_imon=-2.68798E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.15964E-1	-7.97939E-1	-9.13181E0	-9.14187E0	5.38826E-3	9.29832E-2	2.73086E1	-3.26667E1	-3.2629E1	2.68053E1	1.701E-8	2.52384E-3	2.52384E-3	6.29665E-3	2.52569E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09371E0	-8.15725E-1	-7.97892E-1	-9.13148E0	-9.14171E0	5.57899E-3	9.31025E-2	2.7302E1	-3.26753E1	-3.2646E1	2.68038E1	1.70173E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.51709E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.15797E-1	-7.97749E-1	-9.13143E0	-9.14202E0	5.38826E-3	9.31263E-2	2.72842E1	-3.26607E1	-3.26288E1	2.6783E1	1.70241E-8	2.52521E-3	2.52521E-3	6.3245E-3	2.50732E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.15892E-1	-7.97629E-1	-9.13103E0	-9.14207E0	5.38826E-3	9.3317E-2	2.73045E1	-3.26392E1	-3.26278E1	2.68016E1	1.70048E-8	2.51923E-3	2.51923E-3	6.31744E-3	2.51458E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.15821E-1	-7.98011E-1	-9.13131E0	-9.14211E0	5.53131E-3	9.34124E-2	2.73141E1	-3.26675E1	-3.26356E1	2.68274E1	1.69801E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.53589E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.15821E-1	-7.97892E-1	-9.13126E0	-9.1419E0	5.29289E-3	9.30786E-2	2.73051E1	-3.26855E1	-3.26242E1	2.67403E1	1.70023E-8	2.51662E-3	2.51662E-3	6.29098E-3	2.50305E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16107E-1	-7.97844E-1	-9.13112E0	-9.14218E0	5.17368E-3	9.31025E-2	2.73141E1	-3.26404E1	-3.26512E1	2.66989E1	1.70096E-8	2.52428E-3	2.52428E-3	6.3074E-3	2.50959E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16059E-1	-7.97606E-1	-9.13115E0	-9.14173E0	5.43594E-3	9.30071E-2	2.72781E1	-3.26506E1	-3.2602E1	2.68684E1	1.7017E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.51832E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16178E-1	-7.97439E-1	-9.13105E0	-9.14214E0	5.72205E-3	9.32693E-2	2.73141E1	-3.26759E1	-3.2614E1	2.6788E1	1.70244E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.50305E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.15821E-1	-7.97558E-1	-9.13107E0	-9.1419E0	5.72205E-3	9.33886E-2	2.72955E1	-3.26729E1	-3.26302E1	2.67776E1	1.70023E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.51177E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.1563E-1	-7.972E-1	-9.13112E0	-9.14209E0	5.43594E-3	9.28879E-2	2.73243E1	-3.26753E1	-3.2623E1	2.67367E1	1.7017E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.51395E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16083E-1	-7.97892E-1	-9.13136E0	-9.14214E0	5.43594E-3	9.30309E-2	2.73448E1	-3.26891E1	-3.25936E1	2.68034E1	1.7017E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.50523E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16107E-1	-7.9751E-1	-9.13155E0	-9.14209E0	5.50747E-3	9.32455E-2	2.72933E1	-3.26638E1	-3.26148E1	2.68325E1	1.70023E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.50523E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.16011E-1	-7.97606E-1	-9.13117E0	-9.14223E0	5.26905E-3	9.3174E-2	2.72975E1	-3.26505E1	-3.26287E1	2.67911E1	1.69955E-8	2.52923E-3	2.52923E-3	6.29665E-3	2.51709E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0965E0	-8.15916E-1	-7.98035E-1	-9.13119E0	-9.14209E0	5.26905E-3	9.32217E-2	2.72721E1	-3.26446E1	-3.26362E1	2.67962E1	1.6999E-8	2.51478E-3	2.51478E-3	6.29525E-3	2.50556E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16011E-1	-7.97606E-1	-9.1311E0	-9.14199E0	5.17368E-3	9.31025E-2	2.73111E1	-3.26416E1	-3.26368E1	2.6836E1	1.70243E-8	2.52139E-3	2.52139E-3	6.29624E-3	2.5107E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.15535E-1	-7.97749E-1	-9.13131E0	-9.14214E0	5.19753E-3	9.29356E-2	2.73087E1	-3.26567E1	-3.26506E1	2.68207E1	1.69811E-8	2.51954E-3	2.51954E-3	6.30202E-3	2.52139E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09657E0	-8.15725E-1	-7.98154E-1	-9.13115E0	-9.14207E0	5.29289E-3	9.3317E-2	2.73178E1	-3.26695E1	-3.26353E1	2.68308E1	1.7017E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.5227E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16011E-1	-7.98249E-1	-9.13131E0	-9.14204E0	5.50747E-3	9.34362E-2	2.72853E1	-3.26603E1	-3.26422E1	2.67169E1	1.70104E-8	2.52131E-3	2.52131E-3	6.3074E-3	2.50748E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.15988E-1	-7.97915E-1	-9.13105E0	-9.14197E0	5.38826E-3	9.3174E-2	2.73381E1	-3.26915E1	-3.26242E1	2.6801E1	1.70023E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.50741E-2