[Scan]
initial_time=2016-02-15T18:36:52
final_time=2016-02-15T18:37:11
ip_count=19
run=1030
dataset=2
scan=155
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=6.53327E-10
ql2_vset=
ql2_vmon=-7.97892E-1
ql2_imon=3.10552E-10
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=5.38564E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=5.93078E-10
mult1=-9.60575E-9
mult2=-2.77421E-9
rf_tmon=-4.40919E-3
rf_agc=3.41291E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=3.96466E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=2.98775E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02366E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04898E1
cs_ea1_imon=2.50399E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3984E0
lens1_imon=2.5738E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03919E1
cs_ea2_imon=1.56129E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83878E1
cs_ef1a_imon=2.98126E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=4.20415E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=2.87422E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15588E1
os_ea1_imon=1.87889E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27193E0
cs_ionrep_imon=1.22783E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93579E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=3.06667E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=7.20942E-10
tplens_vset=1.4E-1
tplens_vmon=1.60478E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26319E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26431E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=3.99542E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=1.8724E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.19504E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.39106E-1
os_ea2_imon=-4.75989E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00742E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60056E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3015E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=2.88251E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.26875E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73128E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.04259E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=2.87735E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10672E0
cs_ionaccel_imon=-1.90231E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=2.03527E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.40444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.33234E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47675E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33835E1
os_fil1_imon=4.4819E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.98375E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64716E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30803E1
cs_fil1_imon=9.98768E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62162E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66871E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65148E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47259E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22364E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29624E-3
inlet_lpb_pmon=2.5107E-2
chamber_ion_pmon=1.70017E-8
chamber_cvt_pmon=2.51915E-3
foreline_cvt_pmon=2.51915E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.23563E-1
res40_imon=-2.69879E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.16083E-1	-7.97701E-1	-9.13112E0	-9.14209E0	5.05447E-3	9.31263E-2	2.73228E1	-3.26791E1	-3.26284E1	2.68148E1	1.70028E-8	2.52599E-3	2.52599E-3	6.31817E-3	2.5021E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09688E0	-8.1594E-1	-7.98273E-1	-9.1315E0	-9.14223E0	5.03063E-3	9.31978E-2	2.73198E1	-3.26493E1	-3.26315E1	2.67091E1	1.70173E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.5128E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.15606E-1	-7.98059E-1	-9.13124E0	-9.14223E0	5.31673E-3	9.29594E-2	2.7312E1	-3.26561E1	-3.26666E1	2.68441E1	1.70241E-8	2.52407E-3	2.52407E-3	6.3245E-3	2.51866E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.15773E-1	-7.97653E-1	-9.13134E0	-9.14183E0	5.36442E-3	9.30786E-2	2.72937E1	-3.26639E1	-3.26585E1	2.68382E1	1.70108E-8	2.52301E-3	2.52301E-3	6.29703E-3	2.51062E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.15678E-1	-7.98106E-1	-9.13143E0	-9.14192E0	5.60284E-3	9.3317E-2	2.73104E1	-3.26567E1	-3.26225E1	2.67686E1	1.70096E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.50959E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.15916E-1	-7.97629E-1	-9.13134E0	-9.14187E0	5.24521E-3	9.34362E-2	2.73075E1	-3.26383E1	-3.26168E1	2.68232E1	1.70096E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.51613E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16059E-1	-7.9813E-1	-9.13134E0	-9.14195E0	5.26905E-3	9.31501E-2	2.73098E1	-3.26201E1	-3.26366E1	2.67884E1	1.69949E-8	2.52538E-3	2.52538E-3	6.29645E-3	2.50523E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.15511E-1	-7.98154E-1	-9.13138E0	-9.14173E0	5.26905E-3	9.30548E-2	2.72978E1	-3.26756E1	-3.26401E1	2.67716E1	1.70096E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.51395E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.16107E-1	-7.98154E-1	-9.13143E0	-9.1419E0	5.14984E-3	9.3317E-2	2.72835E1	-3.26536E1	-3.26362E1	2.67962E1	1.69949E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.50523E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16107E-1	-7.97987E-1	-9.13129E0	-9.14178E0	5.14984E-3	9.32693E-2	2.73122E1	-3.26756E1	-3.26325E1	2.67968E1	1.7017E-8	2.51443E-3	2.51443E-3	6.34588E-3	2.51613E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16059E-1	-7.98273E-1	-9.13117E0	-9.14192E0	5.05447E-3	9.31263E-2	2.73165E1	-3.26807E1	-3.26068E1	2.6804E1	1.70244E-8	2.51225E-3	2.51225E-3	6.30192E-3	2.51832E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.16011E-1	-7.97939E-1	-9.13117E0	-9.1419E0	5.67436E-3	9.30309E-2	2.73309E1	-3.26999E1	-3.26206E1	2.68034E1	1.701E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.50424E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09657E0	-8.16321E-1	-7.9751E-1	-9.13117E0	-9.14187E0	5.26905E-3	9.27925E-2	2.72985E1	-3.26536E1	-3.26014E1	2.68094E1	1.69949E-8	2.51334E-3	2.51334E-3	6.33486E-3	2.50959E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.1625E-1	-7.97868E-1	-9.13119E0	-9.14209E0	5.22137E-3	9.30309E-2	2.73219E1	-3.26554E1	-3.26194E1	2.67917E1	1.70096E-8	2.52318E-3	2.52318E-3	6.33486E-3	2.50088E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09704E0	-8.15725E-1	-7.97844E-1	-9.1311E0	-9.14178E0	5.6982E-3	9.31025E-2	2.73075E1	-3.26331E1	-3.2606E1	2.6786E1	1.70096E-8	2.52757E-3	2.52757E-3	6.32936E-3	2.5227E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09665E0	-8.1625E-1	-7.97725E-1	-9.13124E0	-9.14161E0	5.17368E-3	9.3317E-2	2.73004E1	-3.26679E1	-3.26172E1	2.6831E1	1.701E-8	2.51847E-3	2.51847E-3	6.33977E-3	2.52785E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.15821E-1	-7.97987E-1	-9.13162E0	-9.14195E0	5.53131E-3	9.28879E-2	2.72985E1	-3.26549E1	-3.26236E1	2.67818E1	1.69955E-8	2.52276E-3	2.52276E-3	6.30202E-3	2.5021E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.15582E-1	-7.97772E-1	-9.13136E0	-9.14166E0	5.24521E-3	9.30071E-2	2.73145E1	-3.26856E1	-3.26531E1	2.6781E1	1.69949E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.52051E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09665E0	-8.15845E-1	-7.97963E-1	-9.13141E0	-9.14152E0	5.31673E-3	9.29832E-2	2.728E1	-3.26768E1	-3.26168E1	2.67734E1	1.69955E-8	2.52599E-3	2.52599E-3	6.30202E-3	2.51494E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.15821E-1	-7.97892E-1	-9.13136E0	-9.14171E0	5.19753E-3	9.31025E-2	2.73128E1	-3.26431E1	-3.26319E1	2.68088E1	1.70017E-8	2.51915E-3	2.51915E-3	6.29624E-3	2.5107E-2