[Scan]
initial_time=2016-02-15T18:37:45
final_time=2016-02-15T18:38:04
ip_count=19
run=1030
dataset=2
scan=157
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08836E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=6.65891E-10
ql2_vset=
ql2_vmon=-7.98035E-1
ql2_imon=3.00741E-10
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=5.18107E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.71609E-10
mult1=-9.42733E-9
mult2=-2.63278E-9
rf_tmon=-5.09523E-3
rf_agc=3.3664E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=4.07374E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.61051E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20178E1
lens5a_imon=1.99748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53466E1
cs_ef1b_imon=2.98126E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.051E1
cs_ea1_imon=2.50539E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38731E0
lens1_imon=2.69191E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.5455E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.98703E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=4.12977E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=2.86593E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15241E1
os_ea1_imon=1.8998E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2639E0
cs_ionrep_imon=1.2266E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.04829E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=7.5376E-10
tplens_vset=1.4E-1
tplens_vmon=1.60545E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.57806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.27687E-2
ql6_imon=4.02319E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25033E0
ionrepsh_imon=1.8959E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.17304E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.41007E-1
os_ea2_imon=-6.03276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.0074E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.17695E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61437E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42764E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=2.86161E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.26011E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73399E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.01393E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82785E-1
olens1_imon=3.04568E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-2.01404E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.51125E-6
window_vset=0.0E0
window_vmon=2.05329E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9258E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93757E3
defgrida_imon=6.54633E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.5409E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33469E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33835E1
os_fil1_imon=4.79424E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.86963E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64815E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30791E1
cs_fil1_imon=1.00015E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63033E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66854E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.96467E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.87833E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78629E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50262E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22338E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.51613E-2
chamber_ion_pmon=1.70244E-8
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28969E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09673E0	-8.15988E-1	-7.98035E-1	-9.13141E0	-9.14214E0	5.65052E-3	9.31978E-2	2.72791E1	-3.26838E1	-3.2639E1	2.68018E1	1.70391E-8	2.51417E-3	2.51417E-3	6.33436E-3	2.51709E-2
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16417E-1	-7.98392E-1	-9.13129E0	-9.14202E0	5.36442E-3	9.31978E-2	2.73351E1	-3.26634E1	-3.26266E1	2.67733E1	1.70246E-8	2.51525E-3	2.51525E-3	6.35601E-3	2.50638E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.16131E-1	-7.98202E-1	-9.1315E0	-9.14173E0	5.34058E-3	9.32217E-2	2.72968E1	-3.26537E1	-3.2626E1	2.6825E1	1.70318E-8	2.51915E-3	2.51915E-3	6.34099E-3	2.52854E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.15821E-1	-7.97915E-1	-9.13117E0	-9.14183E0	5.43594E-3	9.32217E-2	2.72933E1	-3.26673E1	-3.26213E1	2.6771E1	1.701E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.51924E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.15606E-1	-7.9782E-1	-9.13126E0	-9.14178E0	5.34058E-3	9.32693E-2	2.731E1	-3.26707E1	-3.26223E1	2.68022E1	1.70173E-8	2.52169E-3	2.52169E-3	6.32896E-3	2.51709E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.15892E-1	-7.98106E-1	-9.13143E0	-9.14214E0	5.57899E-3	9.32455E-2	2.73163E1	-3.26526E1	-3.2652E1	2.681E1	1.70092E-8	2.52139E-3	2.52139E-3	6.29624E-3	2.52407E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.1594E-1	-7.98225E-1	-9.13162E0	-9.14223E0	5.6982E-3	9.3317E-2	2.73033E1	-3.26494E1	-3.26122E1	2.67842E1	1.70028E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.5128E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.15654E-1	-7.97915E-1	-9.13117E0	-9.14199E0	5.24521E-3	9.34124E-2	2.73015E1	-3.26543E1	-3.26134E1	2.68328E1	1.69949E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.51613E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.15439E-1	-7.97677E-1	-9.131E0	-9.14185E0	5.34058E-3	9.31025E-2	2.72886E1	-3.26437E1	-3.26449E1	2.68088E1	1.7017E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.51613E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.15558E-1	-7.97629E-1	-9.13103E0	-9.14204E0	5.31673E-3	9.29594E-2	2.73099E1	-3.26873E1	-3.26248E1	2.6816E1	1.69949E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.52709E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.15678E-1	-7.97486E-1	-9.13124E0	-9.14209E0	5.26905E-3	9.31025E-2	2.72856E1	-3.26514E1	-3.26455E1	2.67532E1	1.70028E-8	2.52599E-3	2.52599E-3	6.32896E-3	2.52785E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09394E0	-8.15606E-1	-7.97892E-1	-9.13126E0	-9.14192E0	5.36442E-3	9.3174E-2	2.73117E1	-3.26398E1	-3.26104E1	2.68424E1	1.70028E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.50424E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.15487E-1	-7.97987E-1	-9.13136E0	-9.14204E0	5.53131E-3	9.29117E-2	2.73099E1	-3.26765E1	-3.2599E1	2.67944E1	1.7017E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.50305E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.15701E-1	-7.97844E-1	-9.13107E0	-9.14216E0	5.22137E-3	9.33647E-2	2.73122E1	-3.26685E1	-3.26508E1	2.6807E1	1.70096E-8	2.51334E-3	2.51334E-3	6.34037E-3	2.50523E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.15725E-1	-7.98202E-1	-9.13107E0	-9.14192E0	5.74589E-3	9.31978E-2	2.72955E1	-3.2641E1	-3.26164E1	2.68154E1	1.70096E-8	2.51771E-3	2.51771E-3	6.34037E-3	2.52051E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.15797E-1	-7.9782E-1	-9.13103E0	-9.14161E0	5.126E-3	9.32455E-2	2.7329E1	-3.26609E1	-3.26413E1	2.67974E1	1.70173E-8	2.51632E-3	2.51632E-3	6.28592E-3	2.53216E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16131E-1	-7.97653E-1	-9.13112E0	-9.14192E0	5.36442E-3	9.3174E-2	2.73104E1	-3.26726E1	-3.26455E1	2.67908E1	1.70092E-8	2.5225E-3	2.5225E-3	6.28511E-3	2.51514E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16226E-1	-7.98202E-1	-9.13112E0	-9.14168E0	5.126E-3	9.29356E-2	2.73364E1	-3.26773E1	-3.26089E1	2.67868E1	1.701E-8	2.51847E-3	2.51847E-3	6.32356E-3	2.53432E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16321E-1	-7.97653E-1	-9.13167E0	-9.14185E0	4.95911E-3	9.31501E-2	2.73045E1	-3.26957E1	-3.26188E1	2.68364E1	1.70246E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.52569E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.1656E-1	-7.98035E-1	-9.13157E0	-9.14185E0	5.17368E-3	9.27687E-2	2.73399E1	-3.2653E1	-3.26236E1	2.68064E1	1.70244E-8	2.51771E-3	2.51771E-3	6.3074E-3	2.51613E-2