[Scan]
initial_time=2016-02-15T18:38:11
final_time=2016-02-15T18:38:31
ip_count=19
run=1030
dataset=2
scan=158
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.16035E-1
ql1_imon=6.36578E-10
ql2_vset=
ql2_vmon=-7.98154E-1
ql2_imon=3.0781E-10
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=5.40948E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=5.80311E-10
mult1=-9.70427E-9
mult2=-2.67869E-9
rf_tmon=-4.72872E-3
rf_agc=3.37421E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=4.01032E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66031E0
bslens_imon=2.65298E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05036E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=2.97225E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.0228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0523E1
cs_ea1_imon=2.50043E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37964E0
lens1_imon=2.50432E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03643E1
cs_ea2_imon=1.54267E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.98306E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=3.93045E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=2.87206E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=1.89095E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=1.22165E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=3.06055E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20582E0
olens4_imon=7.17473E-10
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-1.75008E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.52143E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.57169E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98438E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.05002E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25269E0
ionrepsh_imon=1.88635E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33805E1
lens5b_imon=2.19286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.52215E-1
os_ea2_imon=-6.49289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00722E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61437E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.28348E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.87386E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.32087E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.26912E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72919E1
iondef1_imon=1.10449E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68196E1
iondef4_imon=1.08269E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.0282E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=3.05843E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-1.92754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=2.04128E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.51613E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.73038E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.1091E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49414E0
defgridb_imon=6.23486E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3383E1
os_fil1_imon=5.19068E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.12791E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64887E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30778E1
cs_fil1_imon=9.99525E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62222E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66888E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10396E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.67701E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75085E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.09747E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2235E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=2.53216E-2
chamber_ion_pmon=1.70173E-8
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01338E-1
res40_imon=-2.69158E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0941E0	-8.16202E-1	-7.97653E-1	-9.13124E0	-9.14204E0	5.53131E-3	9.30071E-2	2.73045E1	-3.26826E1	-3.26354E1	2.67642E1	1.701E-8	2.52169E-3	2.52169E-3	6.28592E-3	2.53E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.1625E-1	-7.97892E-1	-9.13119E0	-9.14183E0	5.4121E-3	9.3174E-2	2.72947E1	-3.26768E1	-3.26236E1	2.68388E1	1.701E-8	2.52276E-3	2.52276E-3	6.31278E-3	2.51709E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.16226E-1	-7.98011E-1	-9.1315E0	-9.14195E0	5.67436E-3	9.30071E-2	2.73022E1	-3.26886E1	-3.26399E1	2.67952E1	1.70168E-8	2.5225E-3	2.5225E-3	6.29067E-3	2.51292E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16345E-1	-7.98106E-1	-9.13141E0	-9.14192E0	5.55515E-3	9.31025E-2	2.72895E1	-3.26729E1	-3.26272E1	2.67746E1	1.70247E-8	2.51919E-3	2.51919E-3	6.33388E-3	2.51801E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.16107E-1	-7.98106E-1	-9.13119E0	-9.14216E0	5.29289E-3	9.32455E-2	2.73149E1	-3.2656E1	-3.26327E1	2.6849E1	1.69949E-8	2.51116E-3	2.51116E-3	6.31288E-3	2.53148E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16011E-1	-7.98178E-1	-9.13103E0	-9.14207E0	5.65052E-3	9.3174E-2	2.73117E1	-3.2653E1	-3.26164E1	2.67902E1	1.70092E-8	2.51359E-3	2.51359E-3	6.31299E-3	2.53526E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.16083E-1	-7.97892E-1	-9.13136E0	-9.14226E0	5.60284E-3	9.30548E-2	2.72951E1	-3.26703E1	-3.2606E1	2.68304E1	1.69949E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.5227E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16131E-1	-7.97701E-1	-9.13122E0	-9.14199E0	5.31673E-3	9.26733E-2	2.73087E1	-3.26711E1	-3.2596E1	2.67812E1	1.69955E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.50424E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.15964E-1	-7.97534E-1	-9.1315E0	-9.14221E0	5.31673E-3	9.27687E-2	2.73105E1	-3.26573E1	-3.26338E1	2.67836E1	1.7017E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.51395E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-8.16035E-1	-7.97439E-1	-9.13148E0	-9.14159E0	5.4121E-3	9.30071E-2	2.73105E1	-3.26591E1	-3.26302E1	2.68292E1	1.70096E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.51832E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16083E-1	-7.97486E-1	-9.13153E0	-9.1419E0	5.60284E-3	9.30071E-2	2.73105E1	-3.26663E1	-3.2617E1	2.67649E1	1.70096E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.52928E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16107E-1	-7.97796E-1	-9.13141E0	-9.14226E0	5.72205E-3	9.25541E-2	2.73039E1	-3.26795E1	-3.26452E1	2.68401E1	1.70023E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.52709E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.15892E-1	-7.97868E-1	-9.13138E0	-9.14197E0	5.17368E-3	9.29832E-2	2.73213E1	-3.26591E1	-3.26663E1	2.6777E1	1.70244E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.50741E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.15964E-1	-7.9782E-1	-9.13112E0	-9.14176E0	5.55515E-3	9.29117E-2	2.73188E1	-3.26863E1	-3.26345E1	2.67746E1	1.70244E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.51395E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.1625E-1	-7.97701E-1	-9.13117E0	-9.14178E0	5.84126E-3	9.30309E-2	2.72956E1	-3.26585E1	-3.26311E1	2.68244E1	1.70248E-8	2.51472E-3	2.51472E-3	6.29185E-3	2.5272E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09371E0	-8.15678E-1	-7.97439E-1	-9.13086E0	-9.14178E0	5.57899E-3	9.28164E-2	2.73187E1	-3.26862E1	-3.26113E1	2.68273E1	1.70162E-8	2.52454E-3	2.52454E-3	6.32483E-3	2.51999E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16274E-1	-7.97534E-1	-9.13141E0	-9.14202E0	5.36442E-3	9.28879E-2	2.72629E1	-3.2645E1	-3.2648E1	2.678E1	1.7017E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.50741E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.16107E-1	-7.97486E-1	-9.13095E0	-9.14197E0	5.55515E-3	9.31025E-2	2.73063E1	-3.2655E1	-3.2648E1	2.67794E1	1.701E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.50424E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16178E-1	-7.98011E-1	-9.13136E0	-9.14178E0	5.57899E-3	9.31263E-2	2.73086E1	-3.2672E1	-3.26301E1	2.67705E1	1.70173E-8	2.51739E-3	2.51739E-3	6.29128E-3	2.51709E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.16035E-1	-7.98154E-1	-9.13131E0	-9.14176E0	5.26905E-3	9.3174E-2	2.72919E1	-3.26711E1	-3.26242E1	2.68196E1	1.70173E-8	2.52384E-3	2.52384E-3	6.34518E-3	2.53216E-2