[Scan]
initial_time=2016-02-15T18:38:38
final_time=2016-02-15T18:38:58
ip_count=19
run=1030
dataset=2
scan=159
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08794E-4
ql1_vset=
ql1_vmon=-8.1594E-1
ql1_imon=6.47306E-10
ql2_vset=
ql2_vmon=-7.97153E-1
ql2_imon=3.04544E-10
ql3_vset=
ql3_vmon=-9.13136E0
ql3_imon=5.42021E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.62036E-10
mult1=-9.90896E-9
mult2=-2.72859E-9
rf_tmon=-5.32955E-3
rf_agc=3.17774E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=3.85273E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.51252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=2.96901E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05048E1
cs_ea1_imon=2.49858E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39239E0
lens1_imon=2.67474E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.55228E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=2.98234E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=3.96466E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=2.88215E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1536E1
os_ea1_imon=1.89944E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26111E0
cs_ionrep_imon=1.22675E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=3.04865E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20604E0
olens4_imon=7.18808E-10
tplens_vset=1.4E-1
tplens_vmon=1.60538E0
tplens_imon=-4.18309E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26344E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98458E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.03297E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=1.87673E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.62538E-1
os_ea2_imon=-5.01223E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06163E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62699E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42163E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=2.86845E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.31118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.26191E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73105E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71791E1
olens3_imon=2.00962E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=2.91038E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10551E0
cs_ionaccel_imon=-1.79059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47165E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=2.09534E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39153E-4
mask2_vset=0.0E0
mask2_vmon=-1.86368E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.68202E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.43831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=6.95742E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=6.24364E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33833E1
os_fil1_imon=4.63206E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.7555E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64784E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30776E1
cs_fil1_imon=1.00128E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62156E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66734E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02212E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.09747E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78425E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22376E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.51177E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28368E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.15916E-1	-7.97606E-1	-9.13122E0	-9.14207E0	5.6982E-3	9.31025E-2	2.73128E1	-3.26437E1	-3.26337E1	2.68024E1	1.7017E-8	2.51662E-3	2.51662E-3	6.30192E-3	2.53148E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.15988E-1	-7.97987E-1	-9.13148E0	-9.1423E0	5.45979E-3	9.31263E-2	2.7299E1	-3.26774E1	-3.26487E1	2.68032E1	1.70246E-8	2.52384E-3	2.52384E-3	6.32356E-3	2.53216E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.15845E-1	-7.97701E-1	-9.13136E0	-9.14173E0	5.57899E-3	9.29832E-2	2.73092E1	-3.26747E1	-3.26405E1	2.68094E1	1.70092E-8	2.51915E-3	2.51915E-3	6.32978E-3	2.5196E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.15964E-1	-7.97772E-1	-9.13124E0	-9.14199E0	5.74589E-3	9.29832E-2	2.72979E1	-3.26615E1	-3.26224E1	2.67824E1	1.70033E-8	2.51814E-3	2.51814E-3	6.32328E-3	2.51379E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16154E-1	-7.97653E-1	-9.13126E0	-9.14199E0	5.45979E-3	9.34124E-2	2.72943E1	-3.26657E1	-3.26344E1	2.68022E1	1.7017E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.52051E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.16226E-1	-7.97772E-1	-9.1315E0	-9.14209E0	5.84126E-3	9.29832E-2	2.73086E1	-3.2649E1	-3.2613E1	2.67824E1	1.701E-8	2.51203E-3	2.51203E-3	6.31278E-3	2.50638E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09302E0	-8.15701E-1	-7.97486E-1	-9.13167E0	-9.14209E0	5.26905E-3	9.31501E-2	2.73039E1	-3.26855E1	-3.26284E1	2.68041E1	1.70096E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.51395E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16202E-1	-7.97653E-1	-9.13131E0	-9.14199E0	5.19753E-3	9.29117E-2	2.73105E1	-3.26543E1	-3.26374E1	2.68219E1	1.701E-8	2.52707E-3	2.52707E-3	6.32356E-3	2.51494E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.16059E-1	-7.98082E-1	-9.13148E0	-9.14185E0	5.36442E-3	9.32455E-2	2.73057E1	-3.26561E1	-3.26182E1	2.67517E1	1.70094E-8	2.51953E-3	2.51953E-3	6.32125E-3	2.51124E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.15773E-1	-7.97915E-1	-9.13112E0	-9.14197E0	5.22137E-3	9.31978E-2	2.73027E1	-3.26789E1	-3.26248E1	2.68352E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.15892E-1	-7.97701E-1	-9.13131E0	-9.14183E0	4.98295E-3	9.33647E-2	2.73249E1	-3.26783E1	-3.2647E1	2.68016E1	1.70096E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.5227E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.15868E-1	-7.97701E-1	-9.13093E0	-9.14192E0	5.07832E-3	9.32932E-2	2.72925E1	-3.26482E1	-3.2632E1	2.68016E1	1.7017E-8	2.52209E-3	2.52209E-3	6.32386E-3	2.5227E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.15964E-1	-7.97558E-1	-9.13112E0	-9.14214E0	5.50747E-3	9.30309E-2	2.73322E1	-3.26632E1	-3.25953E1	2.67891E1	1.69949E-8	2.52647E-3	2.52647E-3	6.29645E-3	2.50523E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.15606E-1	-7.97582E-1	-9.13103E0	-9.14237E0	5.45979E-3	9.30548E-2	2.73117E1	-3.26398E1	-3.26374E1	2.68142E1	1.70173E-8	2.52384E-3	2.52384E-3	6.31278E-3	2.51066E-2
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.15678E-1	-7.97915E-1	-9.13098E0	-9.14176E0	5.126E-3	9.30309E-2	2.73207E1	-3.26338E1	-3.26026E1	2.68004E1	1.70244E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.51177E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09333E0	-8.16154E-1	-7.97248E-1	-9.13095E0	-9.14192E0	5.24521E-3	9.28879E-2	2.73092E1	-3.26573E1	-3.26425E1	2.67776E1	1.7017E-8	2.52099E-3	2.52099E-3	6.32936E-3	2.50741E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.16274E-1	-7.9782E-1	-9.13124E0	-9.14197E0	5.8651E-3	9.32693E-2	2.73195E1	-3.26464E1	-3.26134E1	2.68226E1	1.70173E-8	2.52599E-3	2.52599E-3	6.31278E-3	2.50638E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16131E-1	-7.97915E-1	-9.13107E0	-9.14204E0	5.76973E-3	9.3174E-2	2.72862E1	-3.26714E1	-3.26349E1	2.68151E1	1.70023E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.50959E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.15988E-1	-7.9751E-1	-9.13138E0	-9.14178E0	5.24521E-3	9.34839E-2	2.73117E1	-3.26855E1	-3.26416E1	2.67866E1	1.70173E-8	2.51632E-3	2.51632E-3	6.30202E-3	2.51709E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.1594E-1	-7.97153E-1	-9.13136E0	-9.14202E0	5.43594E-3	9.3317E-2	2.73105E1	-3.26621E1	-3.26344E1	2.68256E1	1.70096E-8	2.52428E-3	2.52428E-3	6.3074E-3	2.51177E-2