[Scan]
initial_time=2016-02-15T18:39:05
final_time=2016-02-15T18:39:24
ip_count=19
run=1030
dataset=2
scan=160
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.15916E-1
ql1_imon=6.71732E-10
ql2_vset=
ql2_vmon=-7.97939E-1
ql2_imon=3.13568E-10
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=5.57423E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=5.82945E-10
mult1=-9.86079E-9
mult2=-2.7745E-9
rf_tmon=-3.61719E-3
rf_agc=3.39584E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=4.05467E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66674E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20073E1
lens5a_imon=2.00038E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05014E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53624E1
cs_ef1b_imon=2.97878E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02175E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=2.51624E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39419E0
lens1_imon=2.60985E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64627E1
os_ef1alow_imon=2.97691E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.55012E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=2.97616E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=4.30083E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11173E1
os_restr1_imon=2.87922E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=1.8861E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.0918E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=1.22062E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01952E1
cs_anode1_imon=3.04839E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=7.36666E-10
tplens_vset=1.4E-1
tplens_vmon=1.59877E0
tplens_imon=-2.48877E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26518E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.58256E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0297E2
lens6_imon=2.98458E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.03428E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28755E0
ionrepsh_imon=1.88538E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.19036E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74545E1
cs_ef2b_imon=3.12624E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.66744E-1
os_ea2_imon=-5.40878E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00515E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71183E1
cs_ef2a_imon=3.17975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60846E0
os_ef2alow_imon=-2.57431E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.48978E-1
os_ef2bup_imon=-5.27646E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10724E1
os_restr2_imon=2.87698E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.31947E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01796E1
cs_anode2_imon=2.2632E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.08976E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.08653E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71792E1
olens3_imon=2.01291E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82761E-1
olens1_imon=2.91359E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11704E0
cs_ionaccel_imon=-1.94556E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56218E1
einzel_imon=7.69532E-6
window_vset=0.0E0
window_vmon=2.10112E-1
window_imon=-9.31322E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-6.99282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=6.81323E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.71589E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.35757E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3775E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33829E1
os_fil1_imon=4.35484E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.64207E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64902E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=9.99619E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62166E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66952E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02212E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.99384E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80101E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31669E-1
cs_fil2_imon=-2.42547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15493E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22406E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.52489E-2
chamber_ion_pmon=1.69875E-8
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.35484E-1
res40_imon=-2.64917E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16035E-1	-7.97558E-1	-9.13103E0	-9.14192E0	5.38826E-3	9.33886E-2	2.73123E1	-3.26585E1	-3.26554E1	2.68047E1	1.69727E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.52051E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.15749E-1	-7.97796E-1	-9.13119E0	-9.14223E0	5.22137E-3	9.28879E-2	2.73106E1	-3.26529E1	-3.26297E1	2.6744E1	1.701E-8	2.52276E-3	2.52276E-3	6.28056E-3	2.53216E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.15654E-1	-7.97677E-1	-9.13107E0	-9.14233E0	5.17368E-3	9.31263E-2	2.72929E1	-3.2666E1	-3.26347E1	2.67885E1	1.70243E-8	2.51804E-3	2.51804E-3	6.30182E-3	2.5196E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16178E-1	-7.9751E-1	-9.13103E0	-9.14202E0	5.03063E-3	9.3174E-2	2.73021E1	-3.26639E1	-3.26422E1	2.6837E1	1.701E-8	2.52384E-3	2.52384E-3	6.32356E-3	2.50852E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.15868E-1	-7.97844E-1	-9.13103E0	-9.1419E0	5.17368E-3	9.27687E-2	2.72985E1	-3.26488E1	-3.26422E1	2.6789E1	1.70096E-8	2.52867E-3	2.52867E-3	6.3074E-3	2.51613E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16035E-1	-7.98011E-1	-9.131E0	-9.14209E0	5.26905E-3	9.2864E-2	2.73129E1	-3.26579E1	-3.26422E1	2.67631E1	1.7017E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.51177E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.16298E-1	-7.97987E-1	-9.13103E0	-9.14207E0	5.6982E-3	9.30786E-2	2.72797E1	-3.26514E1	-3.26231E1	2.67952E1	1.70318E-8	2.52099E-3	2.52099E-3	6.32936E-3	2.51613E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0965E0	-8.1656E-1	-7.97558E-1	-9.13103E0	-9.14207E0	5.48363E-3	9.29832E-2	2.72848E1	-3.26498E1	-3.26121E1	2.67834E1	1.69883E-8	2.52276E-3	2.52276E-3	6.32356E-3	2.52569E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09665E0	-8.16131E-1	-7.97939E-1	-9.13119E0	-9.14185E0	5.57899E-3	9.26733E-2	2.72758E1	-3.26697E1	-3.26322E1	2.68272E1	1.70104E-8	2.51603E-3	2.51603E-3	6.30212E-3	2.5159E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.16107E-1	-7.97796E-1	-9.13122E0	-9.14209E0	5.45979E-3	9.31263E-2	2.72895E1	-3.2647E1	-3.26224E1	2.67929E1	1.70011E-8	2.51952E-3	2.51952E-3	6.3074E-3	2.50506E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.16107E-1	-7.98011E-1	-9.13134E0	-9.14187E0	4.98295E-3	9.30548E-2	2.73147E1	-3.26735E1	-3.26392E1	2.67728E1	1.69875E-8	2.52099E-3	2.52099E-3	6.32936E-3	2.50088E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.16512E-1	-7.97606E-1	-9.1311E0	-9.14214E0	5.03063E-3	9.27448E-2	2.73134E1	-3.26319E1	-3.26089E1	2.68192E1	1.7017E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.5227E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.15821E-1	-7.97606E-1	-9.13105E0	-9.14202E0	4.74453E-3	9.31025E-2	2.73033E1	-3.26738E1	-3.2629E1	2.67812E1	1.70173E-8	2.52599E-3	2.52599E-3	6.33436E-3	2.52139E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16226E-1	-7.98082E-1	-9.13086E0	-9.14199E0	5.07832E-3	9.28879E-2	2.73131E1	-3.26585E1	-3.26585E1	2.67607E1	1.70028E-8	2.51203E-3	2.51203E-3	6.32896E-3	2.52139E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.15988E-1	-7.9782E-1	-9.13115E0	-9.14202E0	4.86374E-3	9.30548E-2	2.73352E1	-3.26738E1	-3.26065E1	2.68286E1	1.69949E-8	2.51225E-3	2.51225E-3	6.3074E-3	2.50959E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.1625E-1	-7.97677E-1	-9.13119E0	-9.14185E0	5.38826E-3	9.31263E-2	2.72797E1	-3.26396E1	-3.26455E1	2.68036E1	1.69949E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.51613E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16488E-1	-7.97415E-1	-9.13093E0	-9.1419E0	5.36442E-3	9.31025E-2	2.72985E1	-3.26464E1	-3.26651E1	2.67866E1	1.70028E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.52354E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.16393E-1	-7.97391E-1	-9.13126E0	-9.14211E0	5.57899E-3	9.31501E-2	2.72955E1	-3.26705E1	-3.26266E1	2.67998E1	1.69949E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.5227E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16441E-1	-7.97582E-1	-9.13131E0	-9.14192E0	5.60284E-3	9.31501E-2	2.7301E1	-3.26472E1	-3.26095E1	2.6834E1	1.69955E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.49997E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.15916E-1	-7.97939E-1	-9.13129E0	-9.14199E0	5.57899E-3	9.32693E-2	2.73039E1	-3.26663E1	-3.26518E1	2.6795E1	1.69875E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.52489E-2