[Scan]
initial_time=2016-02-15T18:39:31
final_time=2016-02-15T18:39:51
ip_count=19
run=1030
dataset=2
scan=161
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08744E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=6.56104E-10
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=3.06511E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=5.49328E-10
ql4_vset=
ql4_vmon=-9.14245E0
ql4_imon=6.3324E-10
mult1=-1.00313E-8
mult2=-2.77813E-9
rf_tmon=-4.86342E-3
rf_agc=3.2442E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=4.01235E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65773E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19935E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.534E1
cs_ef1b_imon=2.96432E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02027E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=2.48993E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3996E0
lens1_imon=2.59543E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03816E1
cs_ea2_imon=1.55624E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84082E1
cs_ef1a_imon=2.98666E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.29273E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=2.87242E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15107E1
os_ea1_imon=1.89908E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63491E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21545E0
cs_ionrep_imon=1.21666E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93564E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=3.06271E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=7.10809E-10
tplens_vset=1.4E-1
tplens_vmon=1.60478E0
tplens_imon=-4.14704E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.50938E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26762E1
iondef2_imon=1.59554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02958E2
lens6_imon=2.98458E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.02415E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2539E0
ionrepsh_imon=1.88754E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.337E1
lens5b_imon=2.17702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.46316E-1
os_ea2_imon=-4.32729E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59155E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27147E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=2.86269E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30974E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.26623E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72874E1
iondef1_imon=1.10815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68046E1
iondef4_imon=1.07404E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.02E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=2.76339E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=1.92715E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86326E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.24943E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93756E3
defgrida_imon=7.03313E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=8.11101E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33239E0
defgridb_imon=6.14271E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33831E1
os_fil1_imon=4.92038E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.97775E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64816E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.308E1
cs_fil1_imon=1.00095E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62089E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66758E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0995E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.81826E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7082E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.11336E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50011E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.223E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=2.5021E-2
chamber_ion_pmon=1.701E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.51794E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.16631E-1	-7.97701E-1	-9.13148E0	-9.14173E0	5.43594E-3	9.3174E-2	2.72889E1	-3.26596E1	-3.26225E1	2.67845E1	1.70318E-8	2.52428E-3	2.52428E-3	6.32386E-3	2.51613E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09348E0	-8.1625E-1	-7.97796E-1	-9.13188E0	-9.14185E0	5.10216E-3	9.2864E-2	2.72953E1	-3.26676E1	-3.26076E1	2.68076E1	1.701E-8	2.52707E-3	2.52707E-3	6.31817E-3	2.52569E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16488E-1	-7.9782E-1	-9.13148E0	-9.14226E0	5.14984E-3	9.30786E-2	2.73222E1	-3.26573E1	-3.26119E1	2.68244E1	1.70243E-8	2.52139E-3	2.52139E-3	6.32418E-3	2.5196E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.16274E-1	-7.97868E-1	-9.13155E0	-9.14195E0	5.24521E-3	9.33409E-2	2.72889E1	-3.26753E1	-3.26314E1	2.68094E1	1.70173E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.52139E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16369E-1	-7.97462E-1	-9.13134E0	-9.14192E0	5.29289E-3	9.29356E-2	2.73069E1	-3.26651E1	-3.26152E1	2.67944E1	1.70246E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.51494E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16536E-1	-7.97772E-1	-9.13141E0	-9.14202E0	5.50747E-3	9.31025E-2	2.72835E1	-3.26741E1	-3.26176E1	2.6789E1	1.70023E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.50741E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16178E-1	-7.98035E-1	-9.13157E0	-9.14204E0	5.50747E-3	9.31025E-2	2.73081E1	-3.26753E1	-3.26152E1	2.67541E1	1.70092E-8	2.52139E-3	2.52139E-3	6.31858E-3	2.5196E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16083E-1	-7.9813E-1	-9.13143E0	-9.14214E0	4.98295E-3	9.29832E-2	2.73442E1	-3.26488E1	-3.2644E1	2.68154E1	1.70023E-8	2.52099E-3	2.52099E-3	6.33486E-3	2.52709E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16178E-1	-7.98154E-1	-9.13115E0	-9.14221E0	5.19753E-3	9.3174E-2	2.72979E1	-3.2644E1	-3.26302E1	2.68172E1	1.701E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.51924E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.1656E-1	-7.97272E-1	-9.13124E0	-9.14211E0	5.81741E-3	9.31025E-2	2.72951E1	-3.26372E1	-3.26449E1	2.6768E1	1.70092E-8	2.51581E-3	2.51581E-3	6.32418E-3	2.52854E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16154E-1	-7.98011E-1	-9.13134E0	-9.1418E0	5.45979E-3	9.35078E-2	2.73226E1	-3.26659E1	-3.26304E1	2.68197E1	1.69521E-8	2.51096E-3	2.51096E-3	6.35059E-3	2.51924E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.16202E-1	-7.97772E-1	-9.13138E0	-9.14202E0	5.72205E-3	9.34362E-2	2.73033E1	-3.26986E1	-3.26113E1	2.6828E1	1.69999E-8	2.52226E-3	2.52226E-3	6.31925E-3	2.5277E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16441E-1	-7.97915E-1	-9.13131E0	-9.14195E0	5.93662E-3	9.34839E-2	2.73015E1	-3.26506E1	-3.26422E1	2.67806E1	1.69875E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.5227E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.16369E-1	-7.97725E-1	-9.13136E0	-9.14197E0	5.72205E-3	9.3317E-2	2.73111E1	-3.26416E1	-3.26386E1	2.6798E1	1.70096E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.50523E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.1594E-1	-7.98082E-1	-9.1311E0	-9.14173E0	5.126E-3	9.32217E-2	2.72997E1	-3.26711E1	-3.2638E1	2.68046E1	1.69883E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.50424E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16011E-1	-7.98106E-1	-9.13107E0	-9.14171E0	5.43594E-3	9.32932E-2	2.73153E1	-3.26591E1	-3.25984E1	2.67818E1	1.70092E-8	2.52139E-3	2.52139E-3	6.33538E-3	2.51514E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.15868E-1	-7.98035E-1	-9.13095E0	-9.14237E0	5.62668E-3	9.33647E-2	2.72841E1	-3.2629E1	-3.26446E1	2.68136E1	1.69955E-8	2.51739E-3	2.51739E-3	6.29665E-3	2.51924E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.1625E-1	-7.97296E-1	-9.13098E0	-9.14204E0	5.48363E-3	9.30786E-2	2.73222E1	-3.26561E1	-3.2593E1	2.67758E1	1.70017E-8	2.51804E-3	2.51804E-3	6.32978E-3	2.52407E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09402E0	-8.16035E-1	-7.97987E-1	-9.13141E0	-9.14209E0	5.57899E-3	9.32693E-2	2.73195E1	-3.2638E1	-3.26488E1	2.68059E1	1.70028E-8	2.52599E-3	2.52599E-3	6.32896E-3	2.51066E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.1625E-1	-7.98178E-1	-9.13124E0	-9.14245E0	5.74589E-3	9.33886E-2	2.72874E1	-3.26762E1	-3.26266E1	2.68046E1	1.701E-8	2.52061E-3	2.52061E-3	6.28592E-3	2.5021E-2