[Scan]
initial_time=2016-02-15T18:39:58
final_time=2016-02-15T18:40:17
ip_count=19
run=1030
dataset=2
scan=162
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=6.58786E-10
ql2_vset=
ql2_vmon=-7.97772E-1
ql2_imon=3.03173E-10
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=5.72181E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=5.67579E-10
mult1=-9.6561E-9
mult2=-2.80844E-9
rf_tmon=-4.00773E-3
rf_agc=3.34477E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=4.01318E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65528E0
bslens_imon=2.52771E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20094E1
lens5a_imon=2.00408E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05034E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=2.97045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02264E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0504E1
cs_ea1_imon=2.48415E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38589E0
lens1_imon=2.62852E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04252E1
cs_ea2_imon=1.55148E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=2.9791E-5
olens2_vset=9.7E-1
olens2_vmon=9.70554E-1
olens2_imon=4.18746E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=2.86845E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15172E1
os_ea1_imon=1.86538E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21502E0
cs_ionrep_imon=1.22159E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93472E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=3.0591E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=7.49385E-10
tplens_vset=1.4E-1
tplens_vmon=1.62869E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26536E1
iondef3_imon=1.5049E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.58172E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02982E2
lens6_imon=2.98568E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.96848E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24746E0
ionrepsh_imon=1.88972E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.18728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.5153E-1
os_ea2_imon=-5.27874E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00578E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62399E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4817E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=2.86665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.26191E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.09123E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67758E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.09117E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=3.23713E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.76897E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.59774E-6
window_vset=0.0E0
window_vmon=2.09534E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=6.8973E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93624E3
defgrida_imon=6.86601E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50089E3
multb_neg_imon=7.00159E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.22639E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33843E1
os_fil1_imon=4.42183E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.65939E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64905E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.308E1
cs_fil1_imon=9.99207E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62324E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66821E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.05851E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.578E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76712E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22315E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.03741E-1
res40_imon=-2.6195E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.15558E-1	-7.97319E-1	-9.13138E0	-9.14197E0	5.126E-3	9.30071E-2	2.73532E1	-3.26671E1	-3.26457E1	2.67283E1	1.70028E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.53432E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.15392E-1	-7.97415E-1	-9.13136E0	-9.14211E0	5.03063E-3	9.3174E-2	2.73326E1	-3.26793E1	-3.26401E1	2.68995E1	1.69677E-8	2.51603E-3	2.51603E-3	6.3074E-3	2.52435E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.15797E-1	-7.97176E-1	-9.13148E0	-9.14216E0	4.93526E-3	9.3174E-2	2.73063E1	-3.2636E1	-3.26679E1	2.67966E1	1.70092E-8	2.51136E-3	2.51136E-3	6.32418E-3	2.5107E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.15845E-1	-7.97391E-1	-9.13143E0	-9.14216E0	5.17368E-3	9.32217E-2	2.73165E1	-3.26351E1	-3.26363E1	2.67746E1	1.69955E-8	2.51739E-3	2.51739E-3	6.32896E-3	2.5128E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.15916E-1	-7.97844E-1	-9.1315E0	-9.14202E0	5.36442E-3	9.32217E-2	2.73082E1	-3.26603E1	-3.26179E1	2.67564E1	1.70248E-8	2.52197E-3	2.52197E-3	6.33341E-3	2.51062E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.15916E-1	-7.97772E-1	-9.13138E0	-9.14218E0	5.05447E-3	9.29832E-2	2.72955E1	-3.26723E1	-3.26224E1	2.68869E1	1.70165E-8	2.51384E-3	2.51384E-3	6.33021E-3	2.50732E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.1563E-1	-7.97701E-1	-9.13134E0	-9.14209E0	5.43594E-3	9.32455E-2	2.73159E1	-3.26554E1	-3.26332E1	2.67788E1	1.70244E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.51832E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.15654E-1	-7.97439E-1	-9.13129E0	-9.14207E0	5.24521E-3	9.32455E-2	2.73002E1	-3.26499E1	-3.2626E1	2.67944E1	1.69949E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.50088E-2
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.15392E-1	-7.97558E-1	-9.13136E0	-9.14204E0	5.22137E-3	9.31025E-2	2.73171E1	-3.26446E1	-3.26326E1	2.67483E1	1.70023E-8	2.5199E-3	2.5199E-3	6.29098E-3	2.52489E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.15582E-1	-7.98106E-1	-9.13138E0	-9.14211E0	5.45979E-3	9.32217E-2	2.72823E1	-3.26524E1	-3.26164E1	2.68995E1	1.70318E-8	2.52027E-3	2.52027E-3	6.31299E-3	2.52854E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.1563E-1	-7.97558E-1	-9.13126E0	-9.14209E0	5.50747E-3	9.30309E-2	2.72991E1	-3.26554E1	-3.26338E1	2.67517E1	1.70023E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.52928E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.15344E-1	-7.97653E-1	-9.13143E0	-9.1419E0	5.34058E-3	9.31263E-2	2.73201E1	-3.26326E1	-3.26446E1	2.68047E1	1.70096E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.52489E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.15892E-1	-7.97915E-1	-9.13122E0	-9.14211E0	5.36442E-3	9.31263E-2	2.73424E1	-3.26446E1	-3.26392E1	2.67819E1	1.70173E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.52139E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.15797E-1	-7.97915E-1	-9.13105E0	-9.14202E0	5.05447E-3	9.31025E-2	2.73159E1	-3.26717E1	-3.26068E1	2.67842E1	1.69867E-8	2.5225E-3	2.5225E-3	6.3074E-3	2.5107E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16011E-1	-7.97677E-1	-9.13131E0	-9.14211E0	5.38826E-3	9.32217E-2	2.72805E1	-3.26819E1	-3.2629E1	2.6803E1	1.70096E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.52051E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.15487E-1	-7.97725E-1	-9.13117E0	-9.14221E0	5.88894E-3	9.29832E-2	2.73478E1	-3.27011E1	-3.26104E1	2.68286E1	1.701E-8	2.52169E-3	2.52169E-3	6.29128E-3	2.5128E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0934E0	-8.15749E-1	-7.97749E-1	-9.13134E0	-9.14185E0	5.48363E-3	9.32217E-2	2.73369E1	-3.26645E1	-3.26326E1	2.68448E1	1.70023E-8	2.52428E-3	2.52428E-3	6.30192E-3	2.50741E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.15582E-1	-7.97725E-1	-9.131E0	-9.14204E0	5.57899E-3	9.30786E-2	2.73116E1	-3.26738E1	-3.26101E1	2.67908E1	1.69949E-8	2.52867E-3	2.52867E-3	6.29098E-3	2.51395E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.15773E-1	-7.98035E-1	-9.13146E0	-9.14192E0	5.4121E-3	9.31501E-2	2.72955E1	-3.26554E1	-3.26422E1	2.67553E1	1.70172E-8	2.51918E-3	2.51918E-3	6.31827E-3	2.50905E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16107E-1	-7.97772E-1	-9.13148E0	-9.14204E0	5.48363E-3	9.32693E-2	2.73279E1	-3.26711E1	-3.26536E1	2.67758E1