[Scan]
initial_time=2016-02-15T18:40:24
final_time=2016-02-15T18:40:44
ip_count=19
run=1030
dataset=2
scan=163
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08713E-4
ql1_vset=
ql1_vmon=-8.15964E-1
ql1_imon=6.01017E-10
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=3.19707E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=4.5408E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.46265E-10
mult1=-9.43847E-9
mult2=-2.68939E-9
rf_tmon=-4.32572E-3
rf_agc=3.32733E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=4.02153E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19925E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05068E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53551E1
cs_ef1b_imon=2.96966E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04752E1
cs_ea1_imon=2.51318E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3879E0
lens1_imon=2.61759E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64579E1
os_ef1alow_imon=2.98322E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03773E1
cs_ea2_imon=1.56461E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=2.98878E-5
olens2_vset=9.7E-1
olens2_vmon=9.7065E-1
olens2_imon=4.19343E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.8654E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15406E1
os_ea1_imon=1.87431E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63711E1
os_ef1bup_imon=3.08991E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24148E0
cs_ionrep_imon=1.22483E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93494E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01873E1
cs_anode1_imon=3.04438E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=7.38239E-10
tplens_vset=1.4E-1
tplens_vmon=1.61784E0
tplens_imon=-3.16584E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2656E1
iondef3_imon=1.51471E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.5901E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02959E2
lens6_imon=2.98622E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.97992E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29634E0
ionrepsh_imon=1.88281E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33864E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74391E1
cs_ef2b_imon=3.13404E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49855E-1
os_ea2_imon=-4.82936E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7135E1
cs_ef2a_imon=3.18304E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62276E0
os_ef2alow_imon=-2.67189E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5379E-1
os_ef2bup_imon=-5.20882E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10932E1
os_restr2_imon=2.85741E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.31486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.25411E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73277E1
iondef1_imon=1.0914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68424E1
iondef4_imon=1.0826E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.00374E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=2.76184E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12145E0
cs_ionaccel_imon=-1.80308E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.63224E-6
window_vset=0.0E0
window_vmon=1.86988E-1
window_imon=-9.23837E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39004E-4
mask2_vset=0.0E0
mask2_vmon=-1.86385E1
mask2_imon=-5.24183E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=6.60296E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=7.14803E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.85237E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33764E0
defgridb_imon=6.1393E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33825E1
os_fil1_imon=4.59409E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60598E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64779E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30806E1
cs_fil1_imon=1.00081E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62123E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66921E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07863E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.58196E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76857E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3115E-1
cs_fil2_imon=-2.41433E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13042E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22394E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.52354E-2
chamber_ion_pmon=1.701E-8
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.4936E-1
res40_imon=-2.60586E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.16631E-1	-7.97558E-1	-9.13146E0	-9.14192E0	5.6982E-3	9.2864E-2	2.72862E1	-3.26826E1	-3.26142E1	2.68208E1	1.70173E-8	2.52061E-3	2.52061E-3	6.31278E-3	2.51494E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.15988E-1	-7.97892E-1	-9.1316E0	-9.14192E0	5.45979E-3	9.32217E-2	2.73063E1	-3.26854E1	-3.26309E1	2.6786E1	1.69955E-8	2.52492E-3	2.52492E-3	6.32896E-3	2.51924E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.1563E-1	-7.97772E-1	-9.13155E0	-9.14216E0	5.34058E-3	9.34362E-2	2.72825E1	-3.26648E1	-3.26289E1	2.68493E1	1.70243E-8	2.51581E-3	2.51581E-3	6.31858E-3	2.51514E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.15797E-1	-7.97629E-1	-9.1315E0	-9.1419E0	5.31673E-3	9.30071E-2	2.73135E1	-3.26723E1	-3.26134E1	2.67686E1	1.70176E-8	2.52131E-3	2.52131E-3	6.3074E-3	2.5159E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.15892E-1	-7.97319E-1	-9.13155E0	-9.14247E0	5.29289E-3	9.29356E-2	2.7288E1	-3.26472E1	-3.26343E1	2.68022E1	1.701E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.5128E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.15654E-1	-7.97749E-1	-9.13148E0	-9.14204E0	5.43594E-3	9.32217E-2	2.72871E1	-3.26543E1	-3.26116E1	2.67884E1	1.7017E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.53368E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.15701E-1	-7.97558E-1	-9.13157E0	-9.14192E0	5.38826E-3	9.31501E-2	2.73167E1	-3.26291E1	-3.26278E1	2.68382E1	1.69949E-8	2.52538E-3	2.52538E-3	6.34037E-3	2.51177E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.15582E-1	-7.97725E-1	-9.13124E0	-9.14197E0	5.43594E-3	9.30071E-2	2.7298E1	-3.26691E1	-3.2613E1	2.68128E1	1.69875E-8	2.5188E-3	2.5188E-3	6.29645E-3	2.51177E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.15439E-1	-7.9782E-1	-9.13146E0	-9.14199E0	5.53131E-3	9.32932E-2	2.72751E1	-3.26549E1	-3.2629E1	2.68082E1	1.70028E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.51066E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.15868E-1	-7.97772E-1	-9.13122E0	-9.1419E0	5.55515E-3	9.31263E-2	2.73228E1	-3.2639E1	-3.26461E1	2.67862E1	1.70092E-8	2.51693E-3	2.51693E-3	6.3074E-3	2.5196E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.15964E-1	-7.97534E-1	-9.13136E0	-9.14195E0	5.22137E-3	9.29832E-2	2.73261E1	-3.26663E1	-3.26296E1	2.68262E1	1.701E-8	2.52169E-3	2.52169E-3	6.3074E-3	2.52139E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09402E0	-8.15535E-1	-7.98035E-1	-9.13084E0	-9.14207E0	5.22137E-3	9.35316E-2	2.72787E1	-3.26675E1	-3.26536E1	2.67974E1	1.69949E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.51177E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.15821E-1	-7.98273E-1	-9.13126E0	-9.14164E0	5.29289E-3	9.33409E-2	2.73057E1	-3.26884E1	-3.26505E1	2.67776E1	1.69949E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.50088E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.15392E-1	-7.97987E-1	-9.13119E0	-9.14204E0	5.4121E-3	9.33886E-2	2.72685E1	-3.2662E1	-3.26891E1	2.67818E1	1.69949E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.51177E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.15725E-1	-7.98059E-1	-9.13153E0	-9.14183E0	5.43594E-3	9.33886E-2	2.73098E1	-3.2659E1	-3.26124E1	2.68286E1	1.70096E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.51832E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.1594E-1	-7.97772E-1	-9.13143E0	-9.14221E0	5.4121E-3	9.30786E-2	2.73314E1	-3.26829E1	-3.26101E1	2.68082E1	1.701E-8	2.51632E-3	2.51632E-3	6.31817E-3	2.52139E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.15916E-1	-7.97772E-1	-9.13115E0	-9.14218E0	5.43594E-3	9.31263E-2	2.72991E1	-3.26506E1	-3.26512E1	2.6792E1	1.70023E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.51832E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16774E-1	-7.97558E-1	-9.13115E0	-9.14202E0	5.67436E-3	9.31263E-2	2.73139E1	-3.26508E1	-3.26655E1	2.67902E1	1.70244E-8	2.51443E-3	2.51443E-3	6.30192E-3	2.51613E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.15988E-1	-7.97963E-1	-9.13119E0	-9.14202E0	5.4121E-3	9.29594E-2	2.7311E1	-3.26508E1	-3.26343E1	2.67624E1	1.7017E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.5227E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.15964E-1	-7.9813E-1	-9.13124E0	-9.14192E0	5.55515E-3	9.30786E-2	2.73277E1	-3.26603E1	-3.2656E1	2.68424E1	1.701E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.52354E-2