[Scan]
initial_time=2016-02-15T18:40:51
final_time=2016-02-15T18:41:11
ip_count=19
run=1030
dataset=2
scan=164
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08743E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=6.59096E-10
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=3.03578E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=5.5387E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=5.60236E-10
mult1=-9.75243E-9
mult2=-2.76253E-9
rf_tmon=-4.16395E-3
rf_agc=3.34718E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=3.9916E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66811E0
bslens_imon=2.69289E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1988E1
lens5a_imon=1.98605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05204E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53621E1
cs_ef1b_imon=2.96653E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04854E1
cs_ea1_imon=2.50192E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3513E0
lens1_imon=2.57877E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64643E1
os_ef1alow_imon=2.98634E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04104E1
cs_ea2_imon=1.54436E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=2.98217E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=3.85487E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11338E1
os_restr1_imon=2.86853E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14942E1
os_ea1_imon=1.87664E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63438E1
os_ef1bup_imon=3.07809E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24427E0
cs_ionrep_imon=1.21175E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93484E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01763E1
cs_anode1_imon=3.04785E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=6.79183E-10
tplens_vset=1.4E-1
tplens_vmon=1.63864E0
tplens_imon=-2.27123E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26458E1
iondef3_imon=1.51315E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26753E1
iondef2_imon=1.6031E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.04394E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28902E0
ionrepsh_imon=1.88771E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33618E1
lens5b_imon=2.19885E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74466E1
cs_ef2b_imon=3.11736E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49672E-1
os_ea2_imon=-5.25837E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71287E1
cs_ef2a_imon=3.18408E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61581E0
os_ef2alow_imon=-2.59196E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42206E-1
os_ef2bup_imon=-5.24705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10776E1
os_restr2_imon=2.86957E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.29828E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01722E1
cs_anode2_imon=2.26175E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72889E1
iondef1_imon=1.08924E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68268E1
iondef4_imon=1.08607E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.02938E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82809E-1
olens1_imon=3.01802E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12782E0
cs_ionaccel_imon=-1.91428E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47268E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56394E1
einzel_imon=7.8477E-6
window_vset=0.0E0
window_vmon=1.98572E-1
window_imon=-1.05242E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.3914E-4
mask2_vset=0.0E0
mask2_vmon=-1.86419E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.3582E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93655E3
defgrida_imon=6.30095E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=6.84132E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42511E0
defgridb_imon=6.24054E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33832E1
os_fil1_imon=4.93583E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.4438E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64843E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30813E1
cs_fil1_imon=1.00057E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62192E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66977E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17644E-2
os_fil2_imon=-2.46067E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.63988E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82919E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31774E-1
cs_fil2_imon=-2.44329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04933E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22322E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28006E-3
inlet_lpb_pmon=2.51177E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.95899E-1
res40_imon=-2.51203E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16393E-1	-7.97701E-1	-9.13126E0	-9.1419E0	5.126E-3	9.32455E-2	2.73173E1	-3.26787E1	-3.26254E1	2.678E1	1.70178E-8	2.51679E-3	2.51679E-3	6.31779E-3	2.5189E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16393E-1	-7.98225E-1	-9.13129E0	-9.14216E0	5.19753E-3	9.3174E-2	2.72959E1	-3.26352E1	-3.26401E1	2.6843E1	1.7017E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.50741E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16631E-1	-7.97725E-1	-9.1315E0	-9.14156E0	5.74589E-3	9.31025E-2	2.7304E1	-3.26528E1	-3.26499E1	2.6796E1	1.69942E-8	2.51915E-3	2.51915E-3	6.31858E-3	2.53526E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16226E-1	-7.9813E-1	-9.13155E0	-9.14185E0	5.45979E-3	9.30071E-2	2.72919E1	-3.26561E1	-3.26326E1	2.6777E1	1.70247E-8	2.52448E-3	2.52448E-3	6.32328E-3	2.51801E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.15701E-1	-7.97892E-1	-9.13117E0	-9.14173E0	5.45979E-3	9.3317E-2	2.73291E1	-3.26645E1	-3.25984E1	2.68364E1	1.70244E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.50959E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.15892E-1	-7.98011E-1	-9.13129E0	-9.1419E0	6.03199E-3	9.29594E-2	2.72955E1	-3.26741E1	-3.2629E1	2.6768E1	1.70096E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.52928E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.15773E-1	-7.98178E-1	-9.13146E0	-9.14202E0	5.84126E-3	9.30548E-2	2.72763E1	-3.26771E1	-3.26116E1	2.68334E1	1.69801E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.50741E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16035E-1	-7.97963E-1	-9.13122E0	-9.14185E0	5.74589E-3	9.29832E-2	2.72666E1	-3.2647E1	-3.2617E1	2.67692E1	1.701E-8	2.51525E-3	2.51525E-3	6.3074E-3	2.50638E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16011E-1	-7.97939E-1	-9.13126E0	-9.14228E0	5.8651E-3	9.30309E-2	2.72703E1	-3.26644E1	-3.26089E1	2.68376E1	1.7017E-8	2.51662E-3	2.51662E-3	6.31563E-3	2.53038E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16083E-1	-7.9782E-1	-9.13162E0	-9.14214E0	5.55515E-3	9.29594E-2	2.73123E1	-3.26494E1	-3.26278E1	2.67758E1	1.7017E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.52051E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16274E-1	-7.97677E-1	-9.13162E0	-9.14209E0	5.76973E-3	9.33647E-2	2.73198E1	-3.26667E1	-3.26484E1	2.68285E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16154E-1	-7.97868E-1	-9.13146E0	-9.14187E0	5.34058E-3	9.29832E-2	2.73081E1	-3.26783E1	-3.26711E1	2.678E1	1.701E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.53E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.1594E-1	-7.97629E-1	-9.13138E0	-9.14161E0	5.38826E-3	9.2864E-2	2.72835E1	-3.26747E1	-3.2626E1	2.67914E1	1.69955E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.51924E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16083E-1	-7.9813E-1	-9.13141E0	-9.14187E0	5.48363E-3	9.26971E-2	2.73428E1	-3.26585E1	-3.25535E1	2.67986E1	1.7017E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.51832E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16131E-1	-7.97915E-1	-9.13131E0	-9.14199E0	5.45979E-3	9.29356E-2	2.73315E1	-3.26915E1	-3.2617E1	2.68076E1	1.69727E-8	2.52538E-3	2.52538E-3	6.31288E-3	2.50305E-2
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.15916E-1	-7.97534E-1	-9.13141E0	-9.14197E0	5.38826E-3	9.32217E-2	2.73051E1	-3.26615E1	-3.26248E1	2.68112E1	1.70023E-8	2.52318E-3	2.52318E-3	6.30192E-3	2.51613E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16202E-1	-7.97582E-1	-9.1315E0	-9.14207E0	5.50747E-3	9.30071E-2	2.72862E1	-3.2659E1	-3.26608E1	2.67812E1	1.70023E-8	2.52757E-3	2.52757E-3	6.31288E-3	2.51832E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.15535E-1	-7.9782E-1	-9.13136E0	-9.14185E0	5.29289E-3	9.32455E-2	2.72974E1	-3.26573E1	-3.26325E1	2.68453E1	1.7017E-8	2.52647E-3	2.52647E-3	6.34037E-3	2.50523E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.15773E-1	-7.97939E-1	-9.13107E0	-9.14185E0	5.24521E-3	9.31025E-2	2.73027E1	-3.26597E1	-3.265E1	2.6792E1	1.70176E-8	2.52131E-3	2.52131E-3	6.32858E-3	2.52223E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16059E-1	-7.98368E-1	-9.13124E0	-9.14192E0	5.4121E-3	9.29832E-2	2.72889E1	-3.26753E1	-3.26458E1	2.68268E1	1.70096E-8	2.5199E-3	2.5199E-3	6.28006E-3	2.51177E-2