[Scan]
initial_time=2016-02-15T18:41:18
final_time=2016-02-15T18:41:37
ip_count=19
run=1030
dataset=2
scan=165
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.15725E-1
ql1_imon=6.33812E-10
ql2_vset=
ql2_vmon=-7.97701E-1
ql2_imon=3.03137E-10
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=5.11074E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.44751E-10
mult1=-9.52366E-9
mult2=-2.68268E-9
rf_tmon=-3.88156E-3
rf_agc=3.39284E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.36442E-3
ql5_imon=4.24099E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=2.00209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.05043E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53464E1
cs_ef1b_imon=2.97209E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02199E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=2.4976E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34719E0
lens1_imon=2.66714E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64672E1
os_ef1alow_imon=2.98843E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04062E1
cs_ea2_imon=1.54692E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83902E1
cs_ef1a_imon=2.98461E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=4.06957E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11401E1
os_restr1_imon=2.87096E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15205E1
os_ea1_imon=1.88458E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63519E1
os_ef1bup_imon=3.08608E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24148E0
cs_ionrep_imon=1.2397E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93576E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=3.05307E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=7.2093E-10
tplens_vset=1.4E-1
tplens_vmon=1.57713E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.50409E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.57063E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.9859E-4
ql6_vset=1.0E-1
ql6_vmon=9.27925E-2
ql6_imon=4.20249E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=1.88175E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33687E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.11875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.73451E-1
os_ea2_imon=-4.82936E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7113E1
cs_ef2a_imon=3.19625E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61987E0
os_ef2alow_imon=-2.59196E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.35255E-1
os_ef2bup_imon=-5.29571E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10764E1
os_restr2_imon=2.8661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31556E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01931E1
cs_anode2_imon=2.26141E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72979E1
iondef1_imon=1.10095E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67824E1
iondef4_imon=1.09198E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.00228E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82952E-1
olens1_imon=3.1383E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12609E0
cs_ionaccel_imon=-1.88648E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47254E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.72259E-6
window_vset=0.0E0
window_vmon=2.21161E-1
window_imon=-1.03505E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86402E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92605E3
multa_neg_imon=7.77804E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.741E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.26837E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48528E0
defgridb_imon=6.23132E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33811E1
os_fil1_imon=4.50142E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.89558E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64878E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30798E1
cs_fil1_imon=1.00101E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62059E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66969E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0913E-2
os_fil2_imon=-2.39117E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.53938E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76224E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33273E-1
cs_fil2_imon=-2.16527E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0783E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22348E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.52139E-2
chamber_ion_pmon=1.69955E-8
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.78523E-1
res40_imon=-2.60586E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16035E-1	-7.97987E-1	-9.13157E0	-9.14209E0	5.48363E-3	9.32455E-2	2.72986E1	-3.26484E1	-3.26307E1	2.68046E1	1.701E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.50638E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.15892E-1	-7.98059E-1	-9.13165E0	-9.1419E0	5.60284E-3	9.26733E-2	2.73263E1	-3.26541E1	-3.26316E1	2.68148E1	1.701E-8	2.52169E-3	2.52169E-3	6.30202E-3	2.52785E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16178E-1	-7.97939E-1	-9.13146E0	-9.14183E0	5.19753E-3	9.28879E-2	2.73125E1	-3.26721E1	-3.26306E1	2.68099E1	1.70017E-8	2.52362E-3	2.52362E-3	6.31858E-3	2.51737E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16274E-1	-7.97534E-1	-9.13141E0	-9.14218E0	5.43594E-3	9.30071E-2	2.72873E1	-3.26756E1	-3.26113E1	2.67944E1	1.70038E-8	2.52093E-3	2.52093E-3	6.3126E-3	2.4962E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.15916E-1	-7.97796E-1	-9.13143E0	-9.14199E0	5.96046E-3	9.27925E-2	2.73219E1	-3.26699E1	-3.26344E1	2.67219E1	1.70092E-8	2.52362E-3	2.52362E-3	6.33538E-3	2.51737E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.15797E-1	-7.9813E-1	-9.13134E0	-9.14187E0	5.53131E-3	9.29594E-2	2.72877E1	-3.26951E1	-3.26266E1	2.68088E1	1.69875E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.51395E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16131E-1	-7.98035E-1	-9.13105E0	-9.14197E0	5.6982E-3	9.27687E-2	2.72901E1	-3.26615E1	-3.26212E1	2.68041E1	1.70244E-8	2.52318E-3	2.52318E-3	6.36244E-3	2.51395E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.15654E-1	-7.97963E-1	-9.131E0	-9.14183E0	5.26905E-3	9.30309E-2	2.73027E1	-3.26717E1	-3.26092E1	2.68274E1	1.70096E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.50959E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.15868E-1	-7.98368E-1	-9.13146E0	-9.14211E0	5.43594E-3	9.28164E-2	2.72919E1	-3.26518E1	-3.26098E1	2.68358E1	1.69949E-8	2.52099E-3	2.52099E-3	6.32936E-3	2.51832E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.15916E-1	-7.98011E-1	-9.13143E0	-9.14197E0	5.48363E-3	9.27687E-2	2.72949E1	-3.26765E1	-3.26218E1	2.68238E1	1.70244E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.51613E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16059E-1	-7.9813E-1	-9.13131E0	-9.14183E0	5.72205E-3	9.30786E-2	2.72931E1	-3.26819E1	-3.26062E1	2.67944E1	1.70023E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.50959E-2
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.15821E-1	-7.98035E-1	-9.13107E0	-9.14199E0	5.67436E-3	9.30071E-2	2.72774E1	-3.26567E1	-3.26284E1	2.6771E1	1.69875E-8	2.52209E-3	2.52209E-3	6.33486E-3	2.52051E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.15749E-1	-7.97963E-1	-9.13129E0	-9.14187E0	5.55515E-3	9.28164E-2	2.73015E1	-3.26591E1	-3.26386E1	2.67992E1	1.7017E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.53368E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.15821E-1	-7.97296E-1	-9.13134E0	-9.1423E0	5.76973E-3	9.29356E-2	2.7263E1	-3.25737E1	-3.26458E1	2.68154E1	1.70173E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.5021E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.15868E-1	-7.97248E-1	-9.13131E0	-9.14195E0	5.76973E-3	9.29117E-2	2.72967E1	-3.26933E1	-3.26212E1	2.67902E1	1.7017E-8	2.52977E-3	2.52977E-3	6.33486E-3	2.51832E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.15344E-1	-7.97677E-1	-9.13153E0	-9.14199E0	5.36442E-3	9.28164E-2	2.73417E1	-3.2685E1	-3.26366E1	2.68316E1	1.70244E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.52051E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.15535E-1	-7.97749E-1	-9.13134E0	-9.14197E0	5.43594E-3	9.30548E-2	2.73381E1	-3.26837E1	-3.26134E1	2.67788E1	1.7017E-8	2.52647E-3	2.52647E-3	6.30192E-3	2.51177E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.15392E-1	-7.97677E-1	-9.13165E0	-9.14199E0	5.43594E-3	9.32455E-2	2.73234E1	-3.26531E1	-3.26366E1	2.69038E1	1.70246E-8	2.51847E-3	2.51847E-3	6.29128E-3	2.51709E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.15272E-1	-7.98035E-1	-9.13155E0	-9.14185E0	5.17368E-3	9.33886E-2	2.73045E1	-3.26803E1	-3.2606E1	2.67547E1	1.70096E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.52489E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.15725E-1	-7.97701E-1	-9.13167E0	-9.14202E0	5.36442E-3	9.27925E-2	2.72979E1	-3.26603E1	-3.26404E1	2.67824E1	1.69955E-8	2.52384E-3	2.52384E-3	6.29665E-3	2.52139E-2