[Scan]
initial_time=2016-02-15T18:42:11
final_time=2016-02-15T18:42:32
ip_count=19
run=1030
dataset=2
scan=167
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.15701E-1
ql1_imon=7.12848E-10
ql2_vset=
ql2_vmon=-7.97462E-1
ql2_imon=2.95377E-10
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=5.71895E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=5.76043E-10
mult1=-9.81854E-9
mult2=-2.82125E-9
rf_tmon=-4.88701E-3
rf_agc=3.32737E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=4.1666E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67275E0
bslens_imon=2.56659E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20085E1
lens5a_imon=1.98704E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=2.96648E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0491E1
cs_ea1_imon=2.50903E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38818E0
lens1_imon=2.57741E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6432E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.036E1
cs_ea2_imon=1.54651E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=2.98054E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=4.12869E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=2.86809E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=1.89295E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=1.22134E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93406E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=3.05334E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20587E0
olens4_imon=7.32839E-10
tplens_vset=1.4E-1
tplens_vmon=1.618E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.51623E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26596E1
iondef2_imon=1.58112E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=4.07946E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26472E0
ionrepsh_imon=1.89006E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33772E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.28291E-1
os_ea2_imon=-6.59841E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00497E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.18488E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6378E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40361E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=2.8771E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.25686E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73334E1
iondef1_imon=1.0858E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67998E1
iondef4_imon=1.07368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.0281E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=3.25227E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11693E0
cs_ionaccel_imon=-1.87348E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47118E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56135E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.13739E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86704E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92587E3
multa_neg_imon=7.8118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93754E3
defgrida_imon=7.00068E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50171E3
multb_neg_imon=7.36839E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.14631E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33827E1
os_fil1_imon=5.07055E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.14883E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64572E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30804E1
cs_fil1_imon=1.00112E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61795E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.669E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.03502E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.09747E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.92217E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22266E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.5128E-2
chamber_ion_pmon=1.70028E-8
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.90236E-1
res40_imon=-2.706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.15654E-1	-7.97701E-1	-9.13141E0	-9.14171E0	5.34058E-3	9.31025E-2	2.73181E1	-3.26679E1	-3.2649E1	2.67896E1					
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.15916E-1	-7.97558E-1	-9.13143E0	-9.14199E0	5.76973E-3	9.30548E-2	2.73051E1	-3.26784E1	-3.26316E1	2.68731E1	1.70096E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.52051E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16131E-1	-7.97462E-1	-9.13172E0	-9.14197E0	5.57899E-3	9.31501E-2	2.73097E1	-3.26741E1	-3.26277E1	2.68041E1	1.70168E-8	2.52921E-3	2.52921E-3	6.31858E-3	2.50404E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.15797E-1	-7.96986E-1	-9.13134E0	-9.14207E0	5.67436E-3	9.31263E-2	2.73039E1	-3.26615E1	-3.26302E1	2.67289E1	1.69962E-8	2.52448E-3	2.52448E-3	6.31269E-3	2.50538E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.15797E-1	-7.97582E-1	-9.13129E0	-9.14197E0	5.74589E-3	9.28879E-2	2.73033E1	-3.26723E1	-3.26506E1	2.68635E1	1.7017E-8	2.52428E-3	2.52428E-3	6.31837E-3	2.50305E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.15654E-1	-7.97725E-1	-9.13134E0	-9.14204E0	5.36442E-3	9.2864E-2	2.72992E1	-3.26537E1	-3.26354E1	2.68376E1	1.70023E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.50959E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.15606E-1	-7.97534E-1	-9.13148E0	-9.14207E0	5.34058E-3	9.30071E-2	2.72805E1	-3.2647E1	-3.2635E1	2.68036E1	1.701E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.5128E-2
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.16059E-1	-7.97629E-1	-9.1315E0	-9.14207E0	5.53131E-3	9.28402E-2	2.73129E1	-3.26831E1	-3.26326E1	2.67878E1	1.69875E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.5227E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.15916E-1	-7.97606E-1	-9.13148E0	-9.14207E0	5.05447E-3	9.30548E-2	2.73098E1	-3.26502E1	-3.26048E1	2.67992E1	1.70023E-8	2.51552E-3	2.51552E-3	6.34037E-3	2.51395E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.15654E-1	-7.97963E-1	-9.13091E0	-9.14223E0	5.22137E-3	9.27687E-2	2.73183E1	-3.26651E1	-3.26272E1	2.68022E1	1.701E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.51924E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.16321E-1	-7.97629E-1	-9.13172E0	-9.1424E0	5.65052E-3	9.28879E-2	2.72848E1	-3.26446E1	-3.26277E1	2.67433E1	1.70017E-8	2.51693E-3	2.51693E-3	6.31299E-3	2.51514E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16512E-1	-7.97391E-1	-9.13143E0	-9.14233E0	5.34058E-3	9.2721E-2	2.73178E1	-3.26915E1	-3.26069E1	2.69036E1	1.70038E-8	2.51679E-3	2.51679E-3	6.3126E-3	2.5189E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.16202E-1	-7.97677E-1	-9.13153E0	-9.14233E0	5.36442E-3	9.27925E-2	2.73134E1	-3.26585E1	-3.26396E1	2.67824E1	1.70162E-8	2.51642E-3	2.51642E-3	6.34231E-3	2.51305E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16011E-1	-7.97629E-1	-9.13105E0	-9.14226E0	5.53131E-3	9.29117E-2	2.73586E1	-3.273E1	-3.26795E1	2.67283E1	1.69654E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.50305E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.15892E-1	-7.97653E-1	-9.13112E0	-9.14218E0	5.45979E-3	9.30786E-2	2.7321E1	-3.26615E1	-3.26278E1	2.68875E1	1.69883E-8	2.52492E-3	2.52492E-3	6.31817E-3	2.50424E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16321E-1	-7.97224E-1	-9.13143E0	-9.14218E0	5.65052E-3	9.31263E-2	2.72992E1	-3.26726E1	-3.26248E1	2.67607E1	1.69791E-8	2.5225E-3	2.5225E-3	6.33538E-3	2.51514E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16131E-1	-7.97367E-1	-9.13141E0	-9.14168E0	5.65052E-3	9.29356E-2	2.72672E1	-3.26512E1	-3.26308E1	2.69181E1	1.69955E-8	2.52599E-3	2.52599E-3	6.29128E-3	2.50424E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.15868E-1	-7.97844E-1	-9.13119E0	-9.14197E0	5.45979E-3	9.31263E-2	2.73027E1	-3.26372E1	-3.26354E1	2.68719E1	1.70096E-8	2.52538E-3	2.52538E-3	6.32386E-3	2.50959E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.15916E-1	-7.9751E-1	-9.1315E0	-9.14187E0	5.38826E-3	9.32455E-2	2.72845E1	-3.26997E1	-3.26242E1	2.67523E1	1.69955E-8	2.52061E-3	2.52061E-3	6.30202E-3	2.51709E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.15701E-1	-7.97462E-1	-9.13143E0	-9.1418E0	5.10216E-3	9.29117E-2	2.73334E1	-3.26596E1	-3.2626E1	2.67998E1	1.70028E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.5128E-2