[Scan]
initial_time=2016-02-15T18:43:11
final_time=2016-02-15T18:43:33
ip_count=19
run=1030
dataset=2
scan=169
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08742E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=6.49631E-10
ql2_vset=
ql2_vmon=-7.97153E-1
ql2_imon=3.10373E-10
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=5.0503E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=5.69046E-10
mult1=-9.19199E-9
mult2=-2.68994E-9
rf_tmon=-3.96087E-3
rf_agc=3.34743E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=4.34971E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66385E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05185E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53713E1
cs_ef1b_imon=2.97348E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05082E1
cs_ea1_imon=2.51141E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39026E0
lens1_imon=2.77332E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64504E1
os_ef1alow_imon=2.98426E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04044E1
cs_ea2_imon=1.54763E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84174E1
cs_ef1a_imon=2.98739E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=4.32217E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=2.8654E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15311E1
os_ea1_imon=1.88175E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63624E1
os_ef1bup_imon=3.08678E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=1.21138E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93509E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=3.04125E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=7.39777E-10
tplens_vset=1.4E-1
tplens_vmon=1.61489E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26225E1
iondef3_imon=1.48781E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26697E1
iondef2_imon=1.58196E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=4.00639E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29044E0
ionrepsh_imon=1.88104E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.18684E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.13022E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.62833E-1
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70968E1
cs_ef2a_imon=3.17748E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62682E0
os_ef2alow_imon=-2.58153E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41627E-1
os_ef2bup_imon=-5.35826E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1062E1
os_restr2_imon=2.86297E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.29327E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01832E1
cs_anode2_imon=2.25306E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73198E1
iondef1_imon=1.10343E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.08746E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.04204E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=2.85542E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10466E0
cs_ionaccel_imon=-1.91081E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47317E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56428E1
einzel_imon=7.63571E-6
window_vset=0.0E0
window_vmon=1.91042E-1
window_imon=-1.00724E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39056E-4
mask2_vset=0.0E0
mask2_vmon=-1.86489E1
mask2_imon=-7.15322E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.75869E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.29668E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.09682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33848E1
os_fil1_imon=4.86632E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.35113E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64776E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30856E1
cs_fil1_imon=9.98748E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61683E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66899E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10396E-2
os_fil2_imon=-2.48963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.71315E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84071E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32024E-1
cs_fil2_imon=-2.64602E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0783E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22287E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.51177E-2
chamber_ion_pmon=1.7017E-8
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.27553E-1
res40_imon=-2.53983E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=185
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.15439E-1	-7.97606E-1	-9.13134E0	-9.14221E0	5.67436E-3	9.28402E-2	2.73027E1	-3.26561E1	-3.26325E1	2.67139E1					
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.15892E-1	-7.97582E-1	-9.13122E0	-9.14199E0	5.45979E-3	9.30309E-2	2.72855E1	-3.26756E1	-3.26352E1	2.681E1	1.70247E-8	2.51077E-3	2.51077E-3	6.33919E-3	2.52223E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.15821E-1	-7.97653E-1	-9.13124E0	-9.14202E0	5.29289E-3	9.30786E-2	2.73051E1	-3.26756E1	-3.26042E1	2.68395E1	1.69935E-8	2.51611E-3	2.51611E-3	6.31879E-3	2.52776E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16226E-1	-7.97367E-1	-9.13124E0	-9.14192E0	5.4121E-3	9.28879E-2	2.7301E1	-3.26661E1	-3.26272E1	2.68052E1	1.70247E-8	2.51498E-3	2.51498E-3	6.30212E-3	2.5159E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.16035E-1	-7.97224E-1	-9.13131E0	-9.14183E0	5.57899E-3	9.26495E-2	2.7299E1	-3.26597E1	-3.26217E1	2.67608E1	1.70023E-8	2.5199E-3	2.5199E-3	6.33486E-3	2.51832E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.15821E-1	-7.97701E-1	-9.13148E0	-9.14214E0	5.45979E-3	9.29832E-2	2.72995E1	-3.26517E1	-3.2602E1	2.67886E1	1.70023E-8	2.51552E-3	2.51552E-3	6.31288E-3	2.51613E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.15558E-1	-7.97725E-1	-9.13148E0	-9.14218E0	5.26905E-3	9.30548E-2	2.72835E1	-3.26801E1	-3.26127E1	2.68107E1	1.70112E-8	2.5216E-3	2.5216E-3	6.3074E-3	2.51365E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09418E0	-8.15988E-1	-7.97057E-1	-9.13148E0	-9.14228E0	5.26905E-3	9.30548E-2	2.73117E1	-3.26633E1	-3.26338E1	2.67794E1	1.69999E-8	2.52384E-3	2.52384E-3	6.31332E-3	2.51902E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.15892E-1	-7.9751E-1	-9.13136E0	-9.14235E0	5.17368E-3	9.28164E-2	2.72811E1	-3.26717E1	-3.2608E1	2.68298E1	1.70028E-8	2.52276E-3	2.52276E-3	6.30202E-3	2.53E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.15868E-1	-7.97677E-1	-9.13117E0	-9.14237E0	5.48363E-3	9.30786E-2	2.72809E1	-3.26714E1	-3.26437E1	2.68346E1	1.70096E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.50959E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.15701E-1	-7.97892E-1	-9.13131E0	-9.14223E0	5.17368E-3	9.28879E-2	2.72973E1	-3.26579E1	-3.26134E1	2.68328E1	1.701E-8	2.52276E-3	2.52276E-3	6.33436E-3	2.50852E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09333E0	-8.15868E-1	-7.97558E-1	-9.13112E0	-9.14228E0	5.57899E-3	9.27448E-2	2.73233E1	-3.26645E1	-3.26326E1	2.67707E1	1.7017E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.51832E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.15892E-1	-7.97439E-1	-9.13103E0	-9.14216E0	5.05447E-3	9.29117E-2	2.73129E1	-3.26524E1	-3.26567E1	2.68188E1	1.69882E-8	2.51682E-3	2.51682E-3	6.3074E-3	2.51511E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.15821E-1	-7.97081E-1	-9.131E0	-9.14197E0	5.43594E-3	9.27448E-2	2.7373E1	-3.26921E1	-3.25017E1	2.6758E1	1.69727E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.51832E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.15916E-1	-7.97439E-1	-9.13103E0	-9.14195E0	5.03063E-3	9.25779E-2	2.73269E1	-3.2662E1	-3.26236E1	2.6816E1	1.69867E-8	2.52139E-3	2.52139E-3	6.31299E-3	2.51514E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16202E-1	-7.96962E-1	-9.131E0	-9.14218E0	5.05447E-3	9.28164E-2	2.72973E1	-3.265E1	-3.26248E1	2.68262E1	1.69949E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.53148E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.15654E-1	-7.97677E-1	-9.13122E0	-9.14207E0	4.93526E-3	9.2721E-2	2.72757E1	-3.26579E1	-3.26518E1	2.67578E1	1.70028E-8	2.52061E-3	2.52061E-3	6.28592E-3	2.50852E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.15678E-1	-7.9751E-1	-9.13136E0	-9.14187E0	5.55515E-3	9.25779E-2	2.73004E1	-3.26638E1	-3.26219E1	2.68484E1	1.69949E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.51177E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.15701E-1	-7.97486E-1	-9.13134E0	-9.14202E0	5.17368E-3	9.26971E-2	2.72901E1	-3.26669E1	-3.2641E1	2.68148E1	1.69955E-8	2.52492E-3	2.52492E-3	6.35059E-3	2.50852E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.15988E-1	-7.97153E-1	-9.13134E0	-9.14202E0	5.17368E-3	9.29832E-2	2.73198E1	-3.26697E1	-3.26225E1	2.6807E1	1.7017E-8	2.52428E-3	2.52428E-3	6.31837E-3	2.51177E-2