[Scan]
initial_time=2016-02-15T18:43:41
final_time=2016-02-15T18:44:03
ip_count=19
run=1030
dataset=2
scan=170
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.15749E-1
ql1_imon=7.19666E-10
ql2_vset=
ql2_vmon=-7.97796E-1
ql2_imon=3.21651E-10
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=5.04911E-10
ql4_vset=
ql4_vmon=-9.14159E0
ql4_imon=5.63562E-10
mult1=-9.6617E-9
mult2=-2.73351E-9
rf_tmon=-4.79052E-3
rf_agc=3.32681E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.91278E-3
ql5_imon=3.84665E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.70961E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=1.9805E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12525E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=2.98558E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05206E1
cs_ea1_imon=2.50858E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37728E0
lens1_imon=2.40522E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64428E1
os_ef1alow_imon=2.9618E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.55152E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=3.00072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=3.94738E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=2.8598E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15471E1
os_ea1_imon=1.88493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.09947E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.258E0
cs_ionrep_imon=1.22094E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93572E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01581E1
cs_anode1_imon=3.03928E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=7.47716E-10
tplens_vset=1.4E-1
tplens_vmon=1.61312E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26202E1
iondef3_imon=1.50834E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26637E1
iondef2_imon=1.57983E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.9848E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=3.98362E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25269E0
ionrepsh_imon=1.8913E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.18401E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.74041E-1
os_ea2_imon=-6.10355E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70975E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64621E0
os_ef2alow_imon=-2.41768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10517E1
os_restr2_imon=2.86845E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.30601E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01635E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73103E1
iondef1_imon=1.08715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67549E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.01237E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=3.17395E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08389E0
cs_ionaccel_imon=-2.0717E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47496E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56099E1
einzel_imon=7.57612E-6
window_vset=0.0E0
window_vmon=1.68088E-1
window_imon=-8.03104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.38976E-4
mask2_vset=0.0E0
mask2_vmon=-1.8671E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9261E3
multa_neg_imon=7.83467E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.3552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.31084E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3967E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33831E1
os_fil1_imon=5.52104E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.8425E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64767E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=9.98636E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61399E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66962E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.71925E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75212E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.63476E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22378E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.50638E-2
chamber_ion_pmon=1.701E-8
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.61695E-1
res40_imon=-2.73483E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.15964E-1	-7.97272E-1	-9.13157E0	-9.14216E0	5.48363E-3	9.31263E-2	2.73165E1	-3.26837E1	-3.2602E1	2.68238E1	1.701E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.51066E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.15964E-1	-7.97558E-1	-9.13131E0	-9.14187E0	5.34058E-3	9.29117E-2	2.73167E1	-3.26634E1	-3.26254E1	2.67808E1	1.70023E-8	2.52757E-3	2.52757E-3	6.32936E-3	2.50305E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.15558E-1	-7.97939E-1	-9.13141E0	-9.14204E0	5.36442E-3	9.27925E-2	2.73115E1	-3.26689E1	-3.26393E1	2.68406E1	1.69942E-8	2.52362E-3	2.52362E-3	6.32978E-3	2.51737E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.15582E-1	-7.98225E-1	-9.131E0	-9.14233E0	5.10216E-3	9.26256E-2	2.73045E1	-3.26573E1	-3.2626E1	2.68118E1	1.70176E-8	2.52553E-3	2.52553E-3	6.33388E-3	2.51169E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.15725E-1	-7.97892E-1	-9.13124E0	-9.14235E0	5.126E-3	9.2864E-2	2.73004E1	-3.26408E1	-3.26402E1	2.68172E1	1.70023E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.51177E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.15654E-1	-7.97963E-1	-9.13138E0	-9.14202E0	5.126E-3	9.28879E-2	2.73003E1	-3.26506E1	-3.26314E1	2.67854E1	1.70028E-8	2.52492E-3	2.52492E-3	6.30202E-3	2.5128E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16226E-1	-7.97582E-1	-9.13095E0	-9.1423E0	5.55515E-3	9.30071E-2	2.73345E1	-3.26823E1	-3.26407E1	2.68208E1	1.70318E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.50741E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.15773E-1	-7.97653E-1	-9.13112E0	-9.14233E0	5.05447E-3	9.2864E-2	2.73045E1	-3.26669E1	-3.262E1	2.67908E1	1.70168E-8	2.51804E-3	2.51804E-3	6.29624E-3	2.5196E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.15701E-1	-7.97725E-1	-9.13131E0	-9.14235E0	5.36442E-3	9.31263E-2	2.73105E1	-3.265E1	-3.26194E1	2.678E1	1.7017E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.51395E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.15749E-1	-7.97343E-1	-9.13131E0	-9.14247E0	5.36442E-3	9.2721E-2	2.72949E1	-3.26765E1	-3.26368E1	2.68298E1	1.70059E-8	2.5188E-3	2.5188E-3	6.31563E-3	2.51942E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.15988E-1	-7.97606E-1	-9.13169E0	-9.14216E0	5.19753E-3	9.28164E-2	2.73092E1	-3.2652E1	-3.26095E1	2.67884E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.15797E-1	-7.97915E-1	-9.13169E0	-9.14228E0	5.53131E-3	9.31978E-2	2.73105E1	-3.26585E1	-3.26476E1	2.68088E1	1.70028E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.50638E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.15797E-1	-7.98106E-1	-9.13134E0	-9.14218E0	4.95911E-3	9.28164E-2	2.72859E1	-3.26675E1	-3.26272E1	2.67456E1	1.69949E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.51832E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.15535E-1	-7.97939E-1	-9.13129E0	-9.14218E0	5.36442E-3	9.27448E-2	2.72733E1	-3.26392E1	-3.2644E1	2.67932E1	1.69875E-8	2.52867E-3	2.52867E-3	6.31837E-3	2.51613E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.15082E-1	-7.97868E-1	-9.13115E0	-9.14223E0	5.17368E-3	9.29356E-2	2.73099E1	-3.26579E1	-3.26032E1	2.67758E1	1.70318E-8	2.52538E-3	2.52538E-3	6.3074E-3	2.5227E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.15797E-1	-7.97343E-1	-9.13117E0	-9.1424E0	5.50747E-3	9.29594E-2	2.73104E1	-3.26585E1	-3.26443E1	2.67625E1	1.70173E-8	2.51417E-3	2.51417E-3	6.31278E-3	2.5128E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.15654E-1	-7.9782E-1	-9.13143E0	-9.14233E0	5.57899E-3	9.29117E-2	2.73181E1	-3.27275E1	-3.26997E1	2.67992E1	1.7017E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.51177E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16035E-1	-7.97653E-1	-9.1315E0	-9.14228E0	5.48363E-3	9.31978E-2	2.73139E1	-3.26602E1	-3.26461E1	2.68024E1	1.70173E-8	2.52276E-3	2.52276E-3	6.33436E-3	2.50638E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.15701E-1	-7.97653E-1	-9.13136E0	-9.14214E0	5.55515E-3	9.29117E-2	2.72898E1	-3.26484E1	-3.26425E1	2.67908E1	1.70028E-8	2.52815E-3	2.52815E-3	6.3074E-3	2.50852E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.15749E-1	-7.97796E-1	-9.1315E0	-9.14159E0	5.91278E-3	9.29594E-2	2.73103E1	-3.26637E1	-3.26202E1	2.67549E1	1.701E-8	2.51954E-3	2.51954E-3	6.29665E-3	2.50638E-2