[Scan]
initial_time=2016-02-16T00:10:24
final_time=2016-02-16T00:10:43
ip_count=19
run=1030
dataset=3
scan=177
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.81662E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-6.70946E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=4.22728E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.77857E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.30805E-10
mult1=-1.14381E-8
mult2=-2.65263E-9
rf_tmon=-2.59136E-3
rf_agc=3.46914E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=4.52304E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61342E0
bslens_imon=2.3761E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19928E1
lens5a_imon=2.02445E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05206E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53603E1
cs_ef1b_imon=3.05272E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04806E1
cs_ea1_imon=2.19555E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09176E0
lens1_imon=1.56328E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64371E1
os_ef1alow_imon=2.96445E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03616E1
cs_ea2_imon=1.56135E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84261E1
cs_ef1a_imon=3.00337E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=3.82435E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10897E1
os_restr1_imon=2.86749E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15351E1
os_ea1_imon=1.85267E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63763E1
os_ef1bup_imon=3.10832E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24698E0
cs_ionrep_imon=1.28437E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01375E1
cs_anode1_imon=3.26158E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=7.79927E-10
tplens_vset=1.4E-1
tplens_vmon=1.59533E0
tplens_imon=-1.7507E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26237E1
iondef3_imon=1.49612E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26471E1
iondef2_imon=1.6037E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02942E2
lens6_imon=2.98455E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.18019E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2595E0
ionrepsh_imon=2.01694E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34067E1
lens5b_imon=2.19009E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.13613E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.94698E-1
os_ea2_imon=-4.31211E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71003E1
cs_ef2a_imon=3.19938E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.67952E0
os_ef2alow_imon=-2.74834E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64795E-1
os_ef2bup_imon=-5.30266E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10834E1
os_restr2_imon=2.87374E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23101E2
cs_ionfoca_imon=6.32387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.27079E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72766E1
iondef1_imon=1.08629E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67798E1
iondef4_imon=1.06905E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.98076E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=3.75152E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12725E0
cs_ionaccel_imon=-1.50768E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47157E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5637E1
einzel_imon=7.89635E-6
window_vset=0.0E0
window_vmon=2.42013E-1
window_imon=-1.05242E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82676E2
mask1_imon=2.38907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86269E1
mask2_imon=-6.52767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=7.19497E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.75782E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=6.75099E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53564E0
defgridb_imon=6.4163E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33965E1
os_fil1_imon=5.15013E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.86662E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66241E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30849E1
cs_fil1_imon=1.00834E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62071E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66322E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12462E-2
os_fil2_imon=-2.54755E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.74038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87197E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28903E-1
cs_fil2_imon=-2.20003E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56661E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22538E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.99954E-1
res40_imon=-2.70317E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2771E4	1.4E1	1.47E2	4.1E1	-7.42513E-2	-8.80027E1	-3.09944E-4	-8.8E1	3.09944E-4	5.38826E-3	9.26733E-2	2.73351E1	-3.26518E1	-3.26567E1	2.67952E1	1.73462E-7	2.52197E-3	2.52197E-3	6.3126E-3	1.99119E-1
2.0E0	6.683E3	3.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80026E1	-5.48363E-4	-8.79999E1	5.72205E-4	5.22137E-3	9.27687E-2	2.73087E1	-3.26567E1	-3.26008E1	2.68162E1	1.73605E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.9963E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80023E1	-5.24521E-4	-8.80004E1	3.33786E-4	5.60284E-3	9.30309E-2	2.72786E1	-3.26732E1	-3.26254E1	2.67758E1	1.73454E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.98764E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80028E1	-1.90735E-4	-8.80002E1	3.09944E-4	5.45979E-3	9.29832E-2	2.72768E1	-3.26708E1	-3.26331E1	2.6783E1	1.73383E-7	2.50989E-3	2.50989E-3	6.31817E-3	1.9951E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80025E1	-2.6226E-4	-8.80004E1	2.38419E-4	5.38826E-3	9.30786E-2	2.73228E1	-3.26301E1	-3.26313E1	2.68111E1	1.73454E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.9963E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80028E1	-3.57628E-4	-8.80001E1	4.52995E-4	5.126E-3	9.3174E-2	2.72898E1	-3.26891E1	-3.26364E1	2.68013E1	1.73457E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.00021E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80028E1	-3.09944E-4	-8.79998E1	3.33786E-4	5.31673E-3	9.33409E-2	2.72408E1	-3.27444E1	-3.25455E1	2.67926E1	1.73379E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.98419E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80027E1	-1.90735E-4	-8.8E1	3.8147E-4	5.34058E-3	9.30548E-2	2.72384E1	-3.26314E1	-3.27173E1	2.68064E1	1.73379E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.97388E-1
1.2E1	3.47E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80025E1	-4.76837E-5	-8.79998E1	5.00679E-4	5.62668E-3	9.3174E-2	2.72638E1	-3.26744E1	-3.2626E1	2.68725E1	1.73605E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.97559E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80027E1	-1.66893E-4	-8.8E1	2.14577E-4	5.36442E-3	9.30786E-2	2.73246E1	-3.26301E1	-3.26231E1	2.68142E1	1.73529E-7	2.51443E-3	2.51443E-3	6.34588E-3	1.97216E-1
1.4E1	7.73E2	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80028E1	-2.86102E-4	-8.79996E1	9.53674E-5	5.48363E-3	9.29117E-2	2.73484E1	-3.26879E1	-3.26146E1	2.68184E1	1.73531E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.97647E-1
1.5E1	7.7E1	0.0E0	6.06E2	4.11E2	-7.45602E-2	-8.80025E1	-3.09944E-4	-8.79999E1	2.6226E-4	5.67436E-3	9.27925E-2	2.73159E1	-3.27137E1	-3.26278E1	2.67812E1	1.73605E-7	2.51954E-3	2.51954E-3	6.30202E-3	1.98322E-1
1.6E1	3.378E3	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80027E1	-5.96046E-4	-8.79999E1	2.38419E-4	5.79357E-3	9.27448E-2	2.73057E1	-3.26708E1	-3.26596E1	2.68099E1	1.73605E-7	2.52538E-3	2.52538E-3	6.31837E-3	1.98075E-1
1.7E1	4.4979E4	2.5E1	6.87E2	4.7E2	-7.42513E-2	-8.80027E1	-6.91414E-4	-8.79998E1	1.19209E-4	5.55515E-3	9.2864E-2	2.73279E1	-3.26711E1	-3.26152E1	2.67752E1	1.73383E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9968E-1
1.8E1	2.02395E5	1.07E2	7.27E2	5.0E2	-7.50241E-2	-8.80027E1	-7.62939E-4	-8.80001E1	3.33786E-4	5.81741E-3	9.26971E-2	2.72803E1	-3.26319E1	-3.26425E1	2.67475E1	1.73529E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.9963E-1
1.9E1	2.57E3	2.0E0	7.68E2	5.29E2	-7.49466E-2	-8.80028E1	-3.09944E-4	-8.80003E1	1.90735E-4	5.45979E-3	9.26495E-2	2.73364E1	-3.27062E1	-3.2616E1	2.68695E1	1.73457E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.00534E-1
2.0E1	4.14E2	0.0E0	8.08E2	5.58E2	-7.47149E-2	-8.80026E1	-1.43051E-4	-8.80001E1	9.53674E-5	5.76973E-3	9.2721E-2	2.7254E1	-3.26446E1	-3.26723E1	2.67628E1	1.73454E-7	2.51116E-3	2.51116E-3	6.27461E-3	2.00151E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80028E1	-4.05312E-4	-8.79998E1	5.00679E-4	5.65052E-3	9.29594E-2	2.73219E1	-3.2653E1	-3.26819E1	2.67794E1	1.73454E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98937E-1
2.2E1	6.5E1	0.0E0	8.89E2	6.17E2	-7.39421E-2	-8.80025E1	-2.6226E-4	-8.79998E1	2.86102E-4	5.74589E-3	9.32217E-2	2.73189E1	-3.26981E1	-3.26278E1	2.67764E1	1.73531E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.9951E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80024E1	-2.38419E-4	-8.79999E1	2.86102E-4	5.53131E-3	9.30786E-2	2.72766E1	-3.26471E1	-3.26237E1	2.67798E1	1.73605E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.99456E-1