[Scan]
initial_time=2016-02-16T00:10:50
final_time=2016-02-16T00:11:10
ip_count=19
run=1030
dataset=3
scan=178
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.81945E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.77724E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=3.94404E-10
ql3_vset=
ql3_vmon=-8.79996E1
ql3_imon=-1.68896E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=7.86781E-10
mult1=-1.07525E-8
mult2=-2.91728E-9
rf_tmon=-3.83109E-3
rf_agc=3.32796E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=4.4055E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70397E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19836E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.04736E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53447E1
cs_ef1b_imon=3.02596E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02358E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=2.21551E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01767E0
lens1_imon=1.37171E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64788E1
os_ef1alow_imon=2.98982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.55683E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=3.01449E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=4.58467E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11459E1
os_restr1_imon=2.88139E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.154E1
os_ea1_imon=1.88352E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63769E1
os_ef1bup_imon=3.08747E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22437E0
cs_ionrep_imon=1.23297E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0178E1
cs_anode1_imon=3.25567E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=7.5866E-10
tplens_vset=1.4E-1
tplens_vmon=1.64025E0
tplens_imon=-2.2456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25847E1
iondef3_imon=1.49383E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26797E1
iondef2_imon=1.57736E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.28164E-2
ql6_imon=4.20344E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.258E0
ionrepsh_imon=2.01731E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33687E1
lens5b_imon=2.20985E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7453E1
cs_ef2b_imon=3.1469E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.72272E-1
os_ea2_imon=-5.64343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.008E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71345E1
cs_ef2a_imon=3.17192E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61234E0
os_ef2alow_imon=-2.61629E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65374E-1
os_ef2bup_imon=-5.2818E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=2.88591E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.29857E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01914E1
cs_anode2_imon=2.27496E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73311E1
iondef1_imon=1.08538E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67758E1
iondef4_imon=1.08642E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.03434E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=3.39532E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12319E0
cs_ionaccel_imon=-2.09152E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47542E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56283E1
einzel_imon=7.67741E-6
window_vset=0.0E0
window_vmon=2.40275E-1
window_imon=-1.042E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39261E-4
mask2_vset=0.0E0
mask2_vmon=-1.86587E1
mask2_imon=-5.86738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.48781E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.87195E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.06308E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59454E0
defgridb_imon=6.21009E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33977E1
os_fil1_imon=4.28711E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46118E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65937E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30818E1
cs_fil1_imon=1.00765E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61045E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66366E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33189E-2
os_fil2_imon=-2.49542E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.68246E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80527E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.33904E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25785E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22538E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.93959E-1
res40_imon=-2.63366E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2242E4	1.5E1	1.47E2	4.1E1	-7.34782E-2	-8.80024E1	-5.96046E-4	-8.79997E1	1.19209E-4	5.4121E-3	9.29832E-2	2.73187E1	-3.26467E1	-3.26431E1	2.67631E1	1.73605E-7	2.51662E-3	2.51662E-3	6.34588E-3	1.98764E-1
2.0E0	6.904E3	3.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80024E1	-2.38419E-4	-8.79998E1	1.66893E-4	5.55515E-3	9.32217E-2	2.73731E1	-3.26391E1	-3.26416E1	2.68069E1	1.73605E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.9968E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80022E1	-3.09944E-4	-8.79995E1	7.15256E-5	5.29289E-3	9.31025E-2	2.72611E1	-3.26434E1	-3.26614E1	2.67862E1	1.73374E-7	2.51359E-3	2.51359E-3	6.31299E-3	1.99577E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80022E1	-3.09944E-4	-8.8E1	3.57628E-4	5.26905E-3	9.34124E-2	2.72958E1	-3.26666E1	-3.26115E1	2.68018E1	1.73459E-7	2.51498E-3	2.51498E-3	6.31269E-3	1.97069E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80023E1	-4.76837E-4	-8.80003E1	3.09944E-4	5.4121E-3	9.33409E-2	2.73117E1	-3.26807E1	-3.26416E1	2.68004E1	1.73532E-7	2.51709E-3	2.51709E-3	6.29684E-3	1.98727E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37874E-2	-8.80023E1	-4.05312E-4	-8.80002E1	2.38419E-4	5.29289E-3	9.29594E-2	2.73129E1	-3.26699E1	-3.26122E1	2.67824E1	1.73529E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80024E1	-5.48363E-4	-8.80003E1	2.6226E-4	5.60284E-3	9.32217E-2	2.72971E1	-3.26886E1	-3.26146E1	2.67769E1	1.73454E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.00499E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80025E1	-1.0252E-3	-8.80002E1	1.90735E-4	5.29289E-3	9.30786E-2	2.72845E1	-3.26491E1	-3.26404E1	2.68213E1	1.73605E-7	2.51162E-3	2.51162E-3	6.3074E-3	2.00105E-1
1.2E1	3.11E2	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.80024E1	-5.24521E-4	-8.79996E1	0.0E0	5.36442E-3	9.31263E-2	2.73153E1	-3.27077E1	-3.26338E1	2.67776E1	1.73605E-7	2.51838E-3	2.51838E-3	6.31879E-3	2.00787E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80023E1	-5.72205E-4	-8.80001E1	1.19209E-4	5.19753E-3	9.28879E-2	2.73105E1	-3.26723E1	-3.26326E1	2.67932E1	1.73605E-7	2.50898E-3	2.50898E-3	6.31837E-3	1.9911E-1
1.4E1	7.66E2	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80024E1	-7.15256E-4	-8.80001E1	3.57628E-4	5.29289E-3	9.31025E-2	2.7263E1	-3.26657E1	-3.26176E1	2.68226E1	1.73605E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.99977E-1
1.5E1	6.5E1	0.0E0	6.06E2	4.11E2	-7.43285E-2	-8.80023E1	-4.05312E-4	-8.8E1	2.86102E-4	5.36442E-3	9.31978E-2	2.72775E1	-3.26879E1	-3.2644E1	2.68478E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99977E-1
1.6E1	3.292E3	1.0E0	6.47E2	4.41E2	-7.44831E-2	-8.80023E1	-5.00679E-4	-8.79994E1	1.43051E-4	5.53131E-3	9.31025E-2	2.73057E1	-3.26777E1	-3.26609E1	2.68556E1	1.73529E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.98764E-1
1.7E1	4.4646E4	2.5E1	6.87E2	4.7E2	-7.45602E-2	-8.80022E1	-4.52995E-4	-8.79997E1	3.09944E-4	5.36442E-3	9.32455E-2	2.73175E1	-3.26467E1	-3.26691E1	2.68256E1	1.73454E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.98419E-1
1.8E1	2.01945E5	1.58E2	7.27E2	5.0E2	-7.40967E-2	-8.80024E1	-2.38419E-4	-8.8E1	4.29153E-4	5.126E-3	9.3174E-2	2.72684E1	-3.26416E1	-3.26128E1	2.67704E1	1.73379E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.97731E-1
1.9E1	2.537E3	1.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80026E1	-4.52995E-4	-8.79999E1	3.09944E-4	4.98295E-3	9.31263E-2	2.73207E1	-3.26194E1	-3.26476E1	2.68605E1	1.73383E-7	2.5131E-3	2.5131E-3	6.33977E-3	1.96973E-1
2.0E1	4.14E2	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80027E1	-4.29153E-4	-8.79998E1	4.05312E-4	5.34058E-3	9.31263E-2	2.7324E1	-3.26579E1	-3.25947E1	2.67775E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.98592E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80026E1	-5.00679E-4	-8.79998E1	3.33786E-4	5.43594E-3	9.2864E-2	2.73183E1	-3.26032E1	-3.26278E1	2.68304E1	1.73529E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.98075E-1
2.2E1	5.4E1	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80026E1	-7.15256E-4	-8.8E1	2.14577E-4	5.43594E-3	9.29832E-2	2.73213E1	-3.26897E1	-3.25635E1	2.67806E1	1.73457E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.99E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80025E1	-3.09944E-4	-8.79996E1	3.57628E-4	5.60284E-3	9.28164E-2	2.73311E1	-3.26797E1	-3.25847E1	2.67758E1	1.73457E-7	2.52061E-3	2.52061E-3	6.29665E-3	1.9883E-1