[Scan]
initial_time=2016-02-16T00:11:17
final_time=2016-02-16T00:11:37
ip_count=19
run=1030
dataset=3
scan=179
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.78275E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.63192E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=4.17387E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.68397E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=7.92766E-10
mult1=-9.30693E-9
mult2=-2.8264E-9
rf_tmon=-4.81885E-3
rf_agc=3.35258E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=4.07374E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.73602E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20349E1
lens5a_imon=2.00867E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12568E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=3.03388E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=2.21127E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0732E0
lens1_imon=1.48511E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64248E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.58328E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84682E1
cs_ef1a_imon=3.02631E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.01676E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1164E1
os_restr1_imon=2.89729E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15402E1
os_ea1_imon=1.86231E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63515E1
os_ef1bup_imon=3.06775E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21365E0
cs_ionrep_imon=1.26713E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01563E1
cs_anode1_imon=3.25732E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=7.74074E-10
tplens_vset=1.4E-1
tplens_vmon=1.63362E0
tplens_imon=-2.56087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26488E1
iondef2_imon=1.57175E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98768E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=4.10032E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21785E0
ionrepsh_imon=2.0202E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.19648E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74742E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.5653E-1
os_ea2_imon=-4.79594E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00882E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58795E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81206E-1
os_ef2bup_imon=-5.11705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=2.89404E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.27945E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.29651E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72817E1
iondef1_imon=1.1013E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67872E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.9435E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.63219E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07728E0
cs_ionaccel_imon=-2.03926E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.4754E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=2.41369E-1
window_imon=-1.18512E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39336E-4
mask2_vset=0.0E0
mask2_vmon=-1.86632E1
mask2_imon=-4.10272E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.31432E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.42389E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.44409E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62412E0
defgridb_imon=6.10305E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33959E1
os_fil1_imon=5.22071E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.60534E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65781E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30814E1
cs_fil1_imon=1.00774E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63141E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66104E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.69813E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84741E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31594E-1
cs_fil2_imon=-1.90914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47259E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22499E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.00847E-1
chamber_ion_pmon=1.73379E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.82718E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.1923E4	1.5E1	1.47E2	4.1E1	-7.30918E-2	-8.80025E1	-4.05312E-4	-8.8E1	9.53674E-5	4.98295E-3	9.31263E-2	2.72709E1	-3.27125E1	-3.26104E1	2.67469E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.01547E-1
2.0E0	6.512E3	6.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80025E1	-6.19888E-4	-8.79998E1	5.00679E-4	5.38826E-3	9.3174E-2	2.7355E1	-3.27161E1	-3.26032E1	2.68058E1	1.73529E-7	2.51662E-3	2.51662E-3	6.34588E-3	2.00673E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80025E1	-5.00679E-4	-8.8E1	3.33786E-4	5.36442E-3	9.31501E-2	2.73578E1	-3.26405E1	-3.26301E1	2.67995E1	1.73529E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.99283E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80026E1	-7.86781E-4	-8.8E1	4.29153E-4	5.38826E-3	9.29117E-2	2.73198E1	-3.26658E1	-3.26211E1	2.67978E1	1.73457E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.9934E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80027E1	-5.24521E-4	-8.79999E1	5.00679E-4	5.07832E-3	9.30786E-2	2.73267E1	-3.26639E1	-3.25966E1	2.67929E1	1.73529E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.98937E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80021E1	-6.19888E-4	-8.79997E1	2.38419E-4	5.07832E-3	9.29832E-2	2.73063E1	-3.26384E1	-3.26018E1	2.67682E1	1.73605E-7	2.51443E-3	2.51443E-3	6.26916E-3	1.98075E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80024E1	-5.00679E-4	-8.79997E1	9.53674E-5	5.19753E-3	9.30786E-2	2.73033E1	-3.26434E1	-3.26284E1	2.67932E1	1.73531E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.9934E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80021E1	-6.91414E-4	-8.79999E1	4.76837E-5	5.17368E-3	9.29117E-2	2.7299E1	-3.2637E1	-3.26002E1	2.67992E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.99283E-1
1.2E1	3.37E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80024E1	-5.24521E-4	-8.79997E1	1.66893E-4	5.43594E-3	9.30071E-2	2.72939E1	-3.26455E1	-3.26012E1	2.68065E1	1.73605E-7	2.51623E-3	2.51623E-3	6.30239E-3	1.99072E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80023E1	-7.15256E-4	-8.79998E1	2.14577E-4	5.45979E-3	9.31263E-2	2.72853E1	-3.26134E1	-3.26603E1	2.67722E1	1.73605E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.9968E-1
1.4E1	7.79E2	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80025E1	-3.33786E-4	-8.79998E1	9.53674E-5	5.84126E-3	9.32693E-2	2.73057E1	-3.26921E1	-3.25985E1	2.68244E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99283E-1
1.5E1	8.9E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80023E1	-7.39098E-4	-8.8E1	2.38419E-4	5.48363E-3	9.3317E-2	2.73381E1	-3.26939E1	-3.259E1	2.67788E1	1.73605E-7	2.51359E-3	2.51359E-3	6.32418E-3	1.99401E-1
1.6E1	3.33E3	1.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80026E1	-7.39098E-4	-8.79999E1	2.38419E-4	5.26905E-3	9.31263E-2	2.73204E1	-3.26467E1	-3.2662E1	2.68041E1	1.73529E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.98592E-1
1.7E1	4.4717E4	1.9E1	6.87E2	4.7E2	-7.34782E-2	-8.80026E1	-5.96046E-4	-8.79998E1	3.09944E-4	5.29289E-3	9.33647E-2	2.72957E1	-3.26732E1	-3.26254E1	2.67674E1	1.73531E-7	2.5131E-3	2.5131E-3	6.32896E-3	1.98661E-1
1.8E1	2.01035E5	1.2E2	7.27E2	5.0E2	-7.48695E-2	-8.80026E1	-5.96046E-4	-8.80001E1	5.72205E-4	5.74589E-3	9.3317E-2	2.72985E1	-3.26416E1	-3.26651E1	2.68146E1	1.73457E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.97984E-1
1.9E1	2.577E3	1.0E0	7.68E2	5.29E2	-7.44831E-2	-8.80025E1	-5.00679E-4	-8.79999E1	3.09944E-4	5.43594E-3	9.31025E-2	2.73015E1	-3.26669E1	-3.25918E1	2.68057E1	1.73379E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.9911E-1
2.0E1	3.83E2	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80026E1	-4.29153E-4	-8.79998E1	1.19209E-4	5.65052E-3	9.28402E-2	2.73429E1	-3.26585E1	-3.26182E1	2.6797E1	1.73454E-7	2.51007E-3	2.51007E-3	6.28006E-3	1.98937E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80023E1	-6.19888E-4	-8.79999E1	9.53674E-5	5.67436E-3	9.31025E-2	2.73161E1	-3.26689E1	-3.2648E1	2.67559E1	1.73379E-7	2.51771E-3	2.51771E-3	6.35692E-3	1.98764E-1
2.2E1	6.1E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80024E1	-4.52995E-4	-8.79998E1	-4.76837E-5	5.72205E-3	9.32932E-2	2.73147E1	-3.26446E1	-3.26044E1	2.67686E1	1.73459E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.00064E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80026E1	-5.00679E-4	-8.8E1	2.6226E-4	5.6982E-3	9.28879E-2	2.72817E1	-3.26488E1	-3.26218E1	2.67872E1	1.73379E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00847E-1