[Scan]
initial_time=2016-02-16T00:12:10
final_time=2016-02-16T00:12:30
ip_count=19
run=1030
dataset=3
scan=181
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.84829E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-5.86832E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=3.88074E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.76529E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=8.11362E-10
mult1=-1.05351E-8
mult2=-3.03599E-9
rf_tmon=-4.33218E-3
rf_agc=3.31533E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=4.12977E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63731E0
bslens_imon=2.745E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05199E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53331E1
cs_ef1b_imon=3.03639E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02231E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04723E1
cs_ea1_imon=2.20312E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99113E0
lens1_imon=1.37525E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65078E1
os_ef1alow_imon=2.97557E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03944E1
cs_ea2_imon=1.56249E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84203E1
cs_ef1a_imon=3.02144E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=4.18997E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11332E1
os_restr1_imon=2.87548E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15465E1
os_ea1_imon=1.89236E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63351E1
os_ef1bup_imon=3.10693E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26036E0
cs_ionrep_imon=1.26341E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.9365E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=3.24525E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=7.78103E-10
tplens_vset=1.4E-1
tplens_vmon=1.5907E0
tplens_imon=-7.2365E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26314E1
iondef3_imon=1.48675E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.57382E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=4.39036E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27923E0
ionrepsh_imon=1.98333E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.19923E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74281E1
cs_ef2b_imon=3.11979E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.43956E-1
os_ea2_imon=-4.82936E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71571E1
cs_ef2a_imon=3.20702E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59901E0
os_ef2alow_imon=-2.52245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3178E-1
os_ef2bup_imon=-4.99683E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11089E1
os_restr2_imon=2.86714E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.31238E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02105E1
cs_anode2_imon=2.2628E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73994E1
iondef1_imon=1.10343E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.08816E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.9318E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=3.59225E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09075E0
cs_ionaccel_imon=-2.12975E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56469E1
einzel_imon=7.71912E-6
window_vset=0.0E0
window_vmon=2.34483E-1
window_imon=-1.1393E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39254E-4
mask2_vset=0.0E0
mask2_vmon=-1.86442E1
mask2_imon=-4.58153E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.53382E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93673E3
defgrida_imon=6.64189E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.18696E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=6.14638E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33945E1
os_fil1_imon=4.90107E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.21415E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65916E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30882E1
cs_fil1_imon=1.00815E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63241E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66129E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0913E-2
os_fil2_imon=-2.32745E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.50869E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.92297E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3115E-1
cs_fil2_imon=-2.0031E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62854E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2249E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.00021E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.87211E-1
res40_imon=-2.53635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2008E4	1.7E1	1.47E2	4.1E1	-7.43285E-2	-8.80026E1	-6.67572E-4	-8.79998E1	1.66893E-4	5.55515E-3	9.33647E-2	2.73428E1	-3.26531E1	-3.26272E1	2.67914E1	1.73532E-7	2.52236E-3	2.52236E-3	6.28103E-3	1.99227E-1
2.0E0	6.673E3	6.0E0	3.16E2	1.6E2	-7.42513E-2	-8.80023E1	-9.05991E-4	-8.80002E1	2.14577E-4	5.88894E-3	9.35316E-2	2.73149E1	-3.26872E1	-3.26278E1	2.68028E1	1.73457E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.9883E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80024E1	-8.58307E-4	-8.80001E1	4.76837E-5	5.76973E-3	9.32455E-2	2.72918E1	-3.27367E1	-3.25704E1	2.68112E1	1.73605E-7	2.50692E-3	2.50692E-3	6.39172E-3	1.99754E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80024E1	-4.52995E-4	-8.79998E1	4.76837E-5	5.76973E-3	9.31025E-2	2.72877E1	-3.26627E1	-3.26428E1	2.68004E1	1.73605E-7	2.51739E-3	2.51739E-3	6.405E-3	1.9951E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80024E1	-5.96046E-4	-8.8E1	-9.53674E-5	6.03199E-3	9.32932E-2	2.72648E1	-3.26723E1	-3.26152E1	2.68082E1	1.73379E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.99456E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80024E1	-8.82149E-4	-8.80003E1	1.43051E-4	5.74589E-3	9.3317E-2	2.72998E1	-3.2652E1	-3.2603E1	2.67891E1	1.73605E-7	2.52209E-3	2.52209E-3	6.25284E-3	1.9963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80022E1	-9.77516E-4	-8.80002E1	-7.15256E-5	5.57899E-3	9.31978E-2	2.73204E1	-3.26383E1	-3.26199E1	2.67962E1	1.73383E-7	2.51954E-3	2.51954E-3	6.29128E-3	2.00021E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80024E1	-5.24521E-4	-8.80003E1	5.48363E-4	5.48363E-3	9.31978E-2	2.73161E1	-3.2644E1	-3.26359E1	2.6807E1	1.73605E-7	2.51632E-3	2.51632E-3	6.36144E-3	1.9917E-1
1.2E1	2.97E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80023E1	-7.15256E-4	-8.80001E1	2.86102E-4	5.53131E-3	9.30071E-2	2.72552E1	-3.26266E1	-3.25719E1	2.67559E1	1.73605E-7	2.51443E-3	2.51443E-3	6.36244E-3	1.99456E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80023E1	-7.39098E-4	-8.80003E1	4.52995E-4	5.45979E-3	9.31978E-2	2.73399E1	-3.26819E1	-3.26591E1	2.681E1	1.73605E-7	2.51771E-3	2.51771E-3	6.36244E-3	1.98764E-1
1.4E1	7.11E2	1.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80021E1	-7.39098E-4	-8.80004E1	4.29153E-4	5.45979E-3	9.31263E-2	2.73424E1	-3.26452E1	-3.26266E1	2.6774E1	1.73605E-7	2.51334E-3	2.51334E-3	6.36797E-3	1.98419E-1
1.5E1	7.1E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80019E1	-7.86781E-4	-8.8E1	2.86102E-4	5.34058E-3	9.34362E-2	2.73117E1	-3.26621E1	-3.26194E1	2.67704E1	1.73454E-7	2.51552E-3	2.51552E-3	6.39014E-3	1.99803E-1
1.6E1	3.268E3	2.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80021E1	-7.15256E-4	-8.79996E1	2.38419E-4	5.17368E-3	9.34124E-2	2.73009E1	-3.26482E1	-3.26464E1	2.68244E1	1.73303E-7	2.51662E-3	2.51662E-3	6.42355E-3	2.00325E-1
1.7E1	4.396E4	2.2E1	6.87E2	4.7E2	-7.286E-2	-8.80019E1	-6.19888E-4	-8.79995E1	1.19209E-4	5.29289E-3	9.29356E-2	2.7278E1	-3.26767E1	-3.26402E1	2.67787E1	1.73454E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.98937E-1
1.8E1	2.00305E5	1.12E2	7.27E2	5.0E2	-7.36328E-2	-8.80022E1	-5.96046E-4	-8.79999E1	3.57628E-4	5.65052E-3	9.29594E-2	2.73027E1	-3.26844E1	-3.26242E1	2.678E1	1.73532E-7	2.51919E-3	2.51919E-3	6.24954E-3	1.99227E-1
1.9E1	2.55E3	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80025E1	-8.10623E-4	-8.79997E1	2.14577E-4	5.45979E-3	9.30071E-2	2.72941E1	-3.26996E1	-3.26173E1	2.68001E1	1.73605E-7	2.51334E-3	2.51334E-3	6.37351E-3	1.98075E-1
2.0E1	4.17E2	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80024E1	-9.05991E-4	-8.79997E1	3.09944E-4	5.45979E-3	9.2864E-2	2.73161E1	-3.26774E1	-3.26438E1	2.67692E1	1.73532E-7	2.51919E-3	2.51919E-3	6.27052E-3	1.98727E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80023E1	-6.67572E-4	-8.79999E1	3.57628E-4	5.22137E-3	9.32455E-2	2.73303E1	-3.26452E1	-3.26645E1	2.6783E1	1.73451E-7	2.51693E-3	2.51693E-3	6.34099E-3	2.00108E-1
2.2E1	5.3E1	0.0E0	8.89E2	6.17E2	-7.44831E-2	-8.80025E1	-5.72205E-4	-8.79998E1	3.09944E-4	5.05447E-3	9.29594E-2	2.72839E1	-3.26673E1	-3.25977E1	2.67968E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.99283E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80024E1	-5.72205E-4	-8.79998E1	3.09944E-4	5.53131E-3	9.29356E-2	2.73994E1	-3.26639E1	-3.26314E1	2.67974E1	1.73605E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.00021E-1