[Scan]
initial_time=2016-02-16T00:12:37
final_time=2016-02-16T00:12:56
ip_count=19
run=1030
dataset=3
scan=182
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.43285E-2
qbias_imon=-3.79369E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.38711E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=3.63624E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.65052E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=8.32903E-10
mult1=-4.33416E-9
mult2=-2.46311E-9
rf_tmon=-1.13678E-2
rf_agc=2.33779E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=4.12369E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61507E0
bslens_imon=2.31785E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19857E1
lens5a_imon=2.01516E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12602E2
lens4a_imon=2.05342E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53412E1
cs_ef1b_imon=3.03532E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02189E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=2.21811E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03114E0
lens1_imon=1.49232E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.56345E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=3.00829E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.98362E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=2.89657E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15408E1
os_ea1_imon=1.88898E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22326E0
cs_ionrep_imon=1.26929E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=3.25552E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=7.23326E-10
tplens_vset=1.4E-1
tplens_vmon=1.59156E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24343E1
iondef3_imon=1.50866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27119E1
iondef2_imon=1.57391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98638E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=3.98862E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2503E0
ionrepsh_imon=1.99749E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33489E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.53526E-1
os_ea2_imon=-4.65174E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06137E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64321E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37358E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10673E1
os_restr2_imon=2.87891E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.30505E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.28425E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74974E1
iondef1_imon=1.12005E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6786E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=1.94648E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.50451E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.97439E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-8.60768E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39059E-4
mask2_vset=0.0E0
mask2_vmon=-1.8635E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.98484E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9368E3
defgrida_imon=6.03456E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.3035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=6.15352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33968E1
os_fil1_imon=5.13061E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.28698E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66164E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30818E1
cs_fil1_imon=1.0073E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62792E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6579E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17689E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.7582E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.72882E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22444E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.00363E-1
chamber_ion_pmon=1.73605E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.33774E-1
res40_imon=-2.6195E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2234E4	7.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80024E1	-1.90735E-4	-8.79995E1	5.96046E-4	5.88894E-3	9.28879E-2	2.73139E1	-3.26679E1	-3.26443E1	2.68129E1	1.73605E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.9968E-1
2.0E0	6.454E3	7.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80026E1	-4.76837E-4	-8.80001E1	6.4373E-4	5.55515E-3	9.30071E-2	2.72811E1	-3.26837E1	-3.26134E1	2.68088E1	1.73531E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.98491E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80026E1	-5.00679E-4	-8.79999E1	2.38419E-4	5.60284E-3	9.32217E-2	2.73375E1	-3.26384E1	-3.26189E1	2.68259E1	1.73605E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.98937E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80026E1	-7.39098E-4	-8.79997E1	2.6226E-4	5.65052E-3	9.30309E-2	2.72862E1	-3.26638E1	-3.25995E1	2.67902E1	1.73605E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.00325E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80022E1	-3.33786E-4	-8.8E1	5.24521E-4	5.48363E-3	9.31978E-2	2.73112E1	-3.26603E1	-3.26321E1	2.67649E1	1.73383E-7	2.51739E-3	2.51739E-3	6.28592E-3	2.00192E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80023E1	-5.00679E-4	-8.80003E1	2.38419E-4	5.62668E-3	9.33409E-2	2.73275E1	-3.26714E1	-3.26207E1	2.68064E1	1.73605E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.00325E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80024E1	-3.8147E-4	-8.8E1	3.33786E-4	5.76973E-3	9.31263E-2	2.72853E1	-3.27041E1	-3.26164E1	2.6816E1	1.73605E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.00673E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80021E1	-5.48363E-4	-8.80002E1	5.24521E-4	5.91278E-3	9.30071E-2	2.73163E1	-3.26626E1	-3.25824E1	2.68036E1	1.73454E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99977E-1
1.2E1	3.63E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80024E1	-1.0252E-3	-8.79999E1	1.43051E-4	5.93662E-3	9.30071E-2	2.72648E1	-3.26482E1	-3.25972E1	2.67866E1	1.73531E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.00192E-1
1.3E1	1.2E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80024E1	-9.05991E-4	-8.80001E1	2.86102E-4	5.96046E-3	9.31263E-2	2.72913E1	-3.26693E1	-3.259E1	2.67836E1	1.73605E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.00151E-1
1.4E1	7.96E2	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80024E1	-7.15256E-4	-8.79998E1	3.57628E-4	5.43594E-3	9.32932E-2	2.72829E1	-3.26819E1	-3.26314E1	2.68046E1	1.73529E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.00151E-1
1.5E1	8.1E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80022E1	-7.15256E-4	-8.79997E1	5.48363E-4	5.43594E-3	9.30786E-2	2.73213E1	-3.2638E1	-3.26392E1	2.68184E1	1.73605E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.00151E-1
1.6E1	3.249E3	2.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80025E1	-8.10623E-4	-8.79999E1	6.19888E-4	5.45979E-3	9.33409E-2	2.73123E1	-3.26086E1	-3.25365E1	2.68028E1	1.73531E-7	2.52492E-3	2.52492E-3	6.31278E-3	1.9951E-1
1.7E1	4.4386E4	1.0E1	6.87E2	4.7E2	-7.286E-2	-8.80024E1	-4.52995E-4	-8.79999E1	6.67572E-4	5.36442E-3	9.31978E-2	2.73204E1	-3.26673E1	-3.26207E1	2.67565E1	1.73529E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.99283E-1
1.8E1	1.99233E5	9.6E1	7.27E2	5.0E2	-7.24736E-2	-8.80023E1	-3.8147E-4	-8.79997E1	4.76837E-4	5.45979E-3	9.3174E-2	2.72907E1	-3.26368E1	-3.26074E1	2.68388E1	1.73529E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.99803E-1
1.9E1	2.598E3	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80021E1	-7.15256E-4	-8.8E1	1.90735E-4	5.74589E-3	9.31978E-2	2.72582E1	-3.26422E1	-3.2644E1	2.67595E1	1.73454E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.99283E-1
2.0E1	4.08E2	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80025E1	-5.72205E-4	-8.79998E1	4.52995E-4	5.48363E-3	9.32932E-2	2.73195E1	-3.26807E1	-3.2608E1	2.68279E1	1.73228E-7	2.52099E-3	2.52099E-3	6.28552E-3	1.9963E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80025E1	-7.86781E-4	-8.79999E1	2.14577E-4	5.10216E-3	9.29832E-2	2.72691E1	-3.27039E1	-3.25505E1	2.67662E1	1.73457E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.9934E-1
2.2E1	5.4E1	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80024E1	-9.53674E-4	-8.79999E1	2.38419E-4	5.55515E-3	9.31978E-2	2.73358E1	-3.26726E1	-3.26024E1	2.67644E1	1.73454E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.00499E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.43285E-2	-8.80027E1	-1.0252E-3	-8.80001E1	4.29153E-4	5.57899E-3	9.2864E-2	2.74974E1	-3.27119E1	-3.24343E1	2.6786E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.00363E-1