[Scan]
initial_time=2016-02-16T00:13:04
final_time=2016-02-16T00:13:23
ip_count=19
run=1030
dataset=3
scan=183
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.81582E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.36537E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=3.9885E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.70997E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=7.86316E-10
mult1=-9.49958E-9
mult2=-2.80444E-9
rf_tmon=-5.05317E-3
rf_agc=3.28289E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=3.92437E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67211E0
bslens_imon=2.44062E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19689E1
lens5a_imon=2.01801E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12415E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53346E1
cs_ef1b_imon=3.0364E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02079E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0454E1
cs_ea1_imon=2.21834E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05602E0
lens1_imon=1.27261E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03378E1
cs_ea2_imon=1.61877E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=3.01189E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=3.71027E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=2.87927E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15565E1
os_ea1_imon=1.88175E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.1092E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=1.30234E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93211E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=3.23894E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=7.49588E-10
tplens_vset=1.4E-1
tplens_vmon=1.60132E0
tplens_imon=-6.17468E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26014E1
iondef3_imon=1.47932E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.61664E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.1182E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=2.03819E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33445E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.13803E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.02947E-1
os_ea2_imon=-4.44003E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.16722E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62999E0
os_ef2alow_imon=-2.60509E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80005E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=2.88323E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30495E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01623E1
cs_anode2_imon=2.28101E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73321E1
iondef1_imon=1.1183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6786E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.97843E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=4.05216E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.7113E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.17943E-1
window_imon=-8.75184E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82588E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.8659E1
mask2_imon=-5.25599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.39579E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.26318E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.79928E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65065E0
defgridb_imon=6.73392E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33955E1
os_fil1_imon=5.33484E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.58732E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66033E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30782E1
cs_fil1_imon=1.008E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63021E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6584E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0913E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8888E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.17343E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22474E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=1.99977E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.86031E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2037E4	9.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80023E1	-5.24521E-4	-8.80004E1	6.4373E-4	5.81741E-3	9.32455E-2	2.73016E1	-3.26296E1	-3.26183E1	2.67816E1	1.73531E-7	2.51632E-3	2.51632E-3	6.30202E-3	1.9968E-1
2.0E0	6.67E3	8.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80023E1	-5.24521E-4	-8.80003E1	6.4373E-4	5.57899E-3	9.32693E-2	2.72476E1	-3.26829E1	-3.26144E1	2.68064E1	1.73529E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.98592E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80022E1	-6.19888E-4	-8.80003E1	4.05312E-4	5.65052E-3	9.33886E-2	2.73955E1	-3.26399E1	-3.26926E1	2.67986E1	1.73379E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.98764E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80024E1	-4.29153E-4	-8.8E1	4.76837E-4	5.48363E-3	9.34362E-2	2.73189E1	-3.26585E1	-3.26849E1	2.67728E1	1.73605E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.9917E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80024E1	-9.05991E-4	-8.80002E1	1.43051E-4	5.62668E-3	9.33409E-2	2.73177E1	-3.26567E1	-3.26122E1	2.68052E1	1.73605E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.98592E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80022E1	-4.29153E-4	-8.8E1	4.05312E-4	5.26905E-3	9.31501E-2	2.7288E1	-3.27074E1	-3.26331E1	2.68157E1	1.73457E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.9985E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80021E1	-4.76837E-4	-8.79999E1	0.0E0	5.57899E-3	9.32217E-2	2.73069E1	-3.26518E1	-3.2605E1	2.68214E1	1.73605E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.98247E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80023E1	-6.91414E-4	-8.80002E1	1.19209E-4	5.53131E-3	9.34601E-2	2.72886E1	-3.26201E1	-3.2662E1	2.67764E1	1.73531E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.9934E-1
1.2E1	3.31E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80023E1	-5.72205E-4	-8.79998E1	3.8147E-4	5.53131E-3	9.32217E-2	2.73039E1	-3.26735E1	-3.26518E1	2.67968E1	1.73605E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.9911E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80023E1	-4.29153E-4	-8.80001E1	3.33786E-4	5.36442E-3	9.31025E-2	2.73273E1	-3.26356E1	-3.26152E1	2.67878E1	1.73529E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.9963E-1
1.4E1	8.01E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80022E1	-5.72205E-4	-8.79998E1	-4.76837E-5	5.45979E-3	9.31263E-2	2.73014E1	-3.26829E1	-3.26144E1	2.68382E1	1.73605E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.99977E-1
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80023E1	-9.53674E-5	-8.80001E1	2.86102E-4	5.29289E-3	9.2864E-2	2.73324E1	-3.26607E1	-3.26306E1	2.67659E1	1.73529E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.99456E-1
1.6E1	3.348E3	2.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80025E1	-2.14577E-4	-8.8E1	7.15256E-5	5.31673E-3	9.30071E-2	2.7332E1	-3.26787E1	-3.2593E1	2.6795E1	1.73532E-7	2.51709E-3	2.51709E-3	6.29684E-3	2.00064E-1
1.7E1	4.438E4	2.6E1	6.87E2	4.7E2	-7.27053E-2	-8.80025E1	-5.48363E-4	-8.79999E1	2.86102E-4	5.45979E-3	9.30786E-2	2.72684E1	-3.25906E1	-3.26681E1	2.68484E1	1.73528E-7	2.51025E-3	2.51025E-3	6.32418E-3	2.00818E-1
1.8E1	1.99574E5	1.11E2	7.27E2	5.0E2	-7.30918E-2	-8.80024E1	-2.86102E-4	-8.8E1	3.33786E-4	5.29289E-3	9.31263E-2	2.72567E1	-3.26402E1	-3.26343E1	2.67776E1	1.73605E-7	2.5131E-3	2.5131E-3	6.34518E-3	1.9951E-1
1.9E1	2.524E3	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.8002E1	-5.00679E-4	-8.79998E1	1.43051E-4	5.34058E-3	9.34362E-2	2.73147E1	-3.26687E1	-3.25996E1	2.67553E1	1.73605E-7	2.51334E-3	2.51334E-3	6.34037E-3	1.99283E-1
2.0E1	3.89E2	3.0E0	8.08E2	5.58E2	-7.286E-2	-8.80025E1	-2.14577E-4	-8.79995E1	1.43051E-4	5.57899E-3	9.32455E-2	2.7308E1	-3.2662E1	-3.26248E1	2.67926E1	1.73529E-7	2.51662E-3	2.51662E-3	6.25827E-3	1.99283E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80023E1	1.19209E-4	-8.79997E1	2.38419E-4	5.53131E-3	9.30309E-2	2.72763E1	-3.26512E1	-3.25689E1	2.67523E1	1.73677E-7	2.52025E-3	2.52025E-3	6.3658E-3	1.99061E-1
2.2E1	5.4E1	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80024E1	-2.6226E-4	-8.79996E1	5.24521E-4	5.60284E-3	9.30786E-2	2.726E1	-3.26723E1	-3.26152E1	2.68088E1	1.73454E-7	2.51443E-3	2.51443E-3	6.28552E-3	1.9911E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80023E1	-3.8147E-4	-8.79998E1	2.38419E-5	5.65052E-3	9.31025E-2	2.73321E1	-3.26615E1	-3.26014E1	2.6786E1	1.7368E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.99977E-1