[Scan]
initial_time=2016-02-16T00:13:30
final_time=2016-02-16T00:13:50
ip_count=19
run=1030
dataset=3
scan=184
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.8289E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.5232E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=3.92485E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.67974E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=7.833E-10
mult1=-9.89692E-9
mult2=-2.8783E-9
rf_tmon=-4.46436E-3
rf_agc=3.37902E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=4.18591E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70038E0
bslens_imon=2.81894E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19755E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12614E2
lens4a_imon=2.05432E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.04469E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02157E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0521E1
cs_ea1_imon=2.20982E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03595E0
lens1_imon=1.47429E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64338E1
os_ef1alow_imon=2.99604E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.58364E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.0173E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=3.67737E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=2.88287E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15654E1
os_ea1_imon=1.87348E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19322E0
cs_ionrep_imon=1.25235E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91948E2
cs_nozzle_imon=1.93607E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=3.25624E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=7.39729E-10
tplens_vset=1.4E-1
tplens_vmon=1.60238E0
tplens_imon=-4.00285E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2653E1
iondef3_imon=1.51299E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26915E1
iondef2_imon=1.59157E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98656E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.00722E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20644E0
ionrepsh_imon=1.97442E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33826E1
lens5b_imon=2.23037E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.24423E-1
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61317E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.42163E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=2.88575E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23106E2
cs_ionfoca_imon=6.33461E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01635E1
cs_anode2_imon=2.26875E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72871E1
iondef1_imon=1.10058E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.93123E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=3.62718E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-1.92394E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02029E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39066E-4
mask2_vset=0.0E0
mask2_vmon=-1.86596E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.54143E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.3554E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.54864E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41359E0
defgridb_imon=6.13189E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33928E1
os_fil1_imon=4.56599E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.22692E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65978E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30808E1
cs_fil1_imon=1.00927E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61897E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65907E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.74038E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90284E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-1.92715E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2083E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22283E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28056E-3
inlet_lpb_pmon=1.9883E-1
chamber_ion_pmon=1.73309E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.10949E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.1711E4	7.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80027E1	-6.91414E-4	-8.79997E1	3.57628E-4	5.43594E-3	9.26971E-2	2.72821E1	-3.26596E1	-3.26437E1	2.68106E1	1.73454E-7	2.52318E-3	2.52318E-3	6.36244E-3	2.01372E-1
2.0E0	6.54E3	1.1E1	3.16E2	1.6E2	-7.37874E-2	-8.80025E1	-1.04904E-3	-8.79999E1	1.43051E-4	5.26905E-3	9.2864E-2	2.73173E1	-3.26731E1	-3.26401E1	2.67898E1	1.73457E-7	2.51417E-3	2.51417E-3	6.38318E-3	1.9968E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80025E1	-9.05991E-4	-8.80003E1	2.14577E-4	5.57899E-3	9.28879E-2	2.72744E1	-3.26741E1	-3.26324E1	2.68207E1	1.73529E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.00499E-1
4.0E0	0.0E0	2.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80024E1	-7.86781E-4	-8.79995E1	3.33786E-4	5.14984E-3	9.30309E-2	2.73435E1	-3.26849E1	-3.26711E1	2.68166E1	1.73457E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.00192E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80023E1	-6.19888E-4	-8.79996E1	3.33786E-4	5.34058E-3	9.32217E-2	2.72861E1	-3.26523E1	-3.26493E1	2.68192E1	1.73454E-7	2.51771E-3	2.51771E-3	6.26371E-3	1.99283E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80023E1	-4.76837E-4	-8.80002E1	9.53674E-5	5.93662E-3	9.30786E-2	2.73246E1	-3.26154E1	-3.2606E1	2.68064E1	1.73529E-7	2.52099E-3	2.52099E-3	6.26371E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80023E1	-5.96046E-4	-8.80002E1	7.15256E-5	5.8651E-3	9.28879E-2	2.73213E1	-3.26717E1	-3.26404E1	2.68106E1	1.73605E-7	2.51334E-3	2.51334E-3	6.34588E-3	1.98247E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80019E1	-5.96046E-4	-8.80002E1	4.76837E-4	5.74589E-3	9.2864E-2	2.72967E1	-3.26759E1	-3.2614E1	2.68298E1	1.73454E-7	2.51443E-3	2.51443E-3	6.40126E-3	1.98764E-1
1.2E1	3.07E2	1.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80022E1	-7.15256E-4	-8.8E1	5.24521E-4	5.79357E-3	9.31025E-2	2.73051E1	-3.26446E1	-3.26296E1	2.67944E1	1.73529E-7	2.5188E-3	2.5188E-3	6.38459E-3	1.98937E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80021E1	-9.53674E-4	-8.79997E1	3.8147E-4	5.60284E-3	9.29117E-2	2.72201E1	-3.2616E1	-3.2695E1	2.67704E1	1.73531E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.9917E-1
1.4E1	7.83E2	0.0E0	5.66E2	3.82E2	-7.42513E-2	-8.80019E1	-4.05312E-4	-8.79998E1	5.00679E-4	5.60284E-3	9.3174E-2	2.73387E1	-3.26608E1	-3.26537E1	2.68117E1	1.7368E-7	2.51443E-3	2.51443E-3	6.28006E-3	1.97559E-1
1.5E1	7.2E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80027E1	-3.57628E-4	-8.79998E1	4.52995E-4	5.67436E-3	9.31263E-2	2.72831E1	-3.26432E1	-3.26615E1	2.68358E1	1.73605E-7	2.51632E-3	2.51632E-3	6.36687E-3	1.9883E-1
1.6E1	3.36E3	2.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80026E1	-8.10623E-4	-8.79996E1	1.90735E-4	5.53131E-3	9.31263E-2	2.73322E1	-3.26773E1	-3.2613E1	2.67505E1	1.73454E-7	2.51443E-3	2.51443E-3	6.25827E-3	1.99803E-1
1.7E1	4.4609E4	1.5E1	6.87E2	4.7E2	-7.37103E-2	-8.80023E1	-4.76837E-4	-8.8E1	-9.53674E-5	5.81741E-3	9.30786E-2	2.72787E1	-3.26518E1	-3.26344E1	2.67734E1	1.73605E-7	2.51662E-3	2.51662E-3	6.33211E-3	1.98851E-1
1.8E1	2.00423E5	1.1E2	7.27E2	5.0E2	-7.37874E-2	-8.80024E1	-1.66893E-4	-8.80003E1	2.38419E-4	5.53131E-3	9.32455E-2	2.72769E1	-3.26621E1	-3.26639E1	2.67553E1					
1.9E1	2.53E3	4.0E0	7.68E2	5.29E2	-7.286E-2	-8.80025E1	-2.38419E-4	-8.79998E1	1.19209E-4	5.6982E-3	9.31263E-2	2.72877E1	-3.26621E1	-3.26146E1	2.68058E1	1.73529E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99283E-1
2.0E1	3.79E2	0.0E0	8.08E2	5.58E2	-7.36328E-2	-8.80023E1	-1.66893E-4	-8.8E1	1.19209E-4	5.48363E-3	9.32217E-2	2.73099E1	-3.26927E1	-3.26254E1	2.67968E1	1.73457E-7	2.51847E-3	2.51847E-3	6.29128E-3	1.9951E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80023E1	-1.43051E-4	-8.80001E1	3.57628E-4	5.26905E-3	9.29117E-2	2.7288E1	-3.27163E1	-3.26349E1	2.68184E1	1.73379E-7	2.51771E-3	2.51771E-3	6.34588E-3	1.98937E-1
2.2E1	7.1E1	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.8002E1	-4.29153E-4	-8.80001E1	4.05312E-4	5.76973E-3	9.28402E-2	2.73045E1	-3.26107E1	-3.26408E1	2.67914E1	1.73529E-7	2.51116E-3	2.51116E-3	6.36244E-3	1.9911E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80023E1	-4.76837E-4	-8.79999E1	4.29153E-4	5.62668E-3	9.31263E-2	2.72871E1	-3.26915E1	-3.2653E1	2.68064E1	1.73309E-7	2.51417E-3	2.51417E-3	6.28056E-3	1.9883E-1