[Scan]
initial_time=2016-02-16T00:13:57
final_time=2016-02-16T00:14:16
ip_count=19
run=1030
dataset=3
scan=185
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.82036E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.59342E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=4.16124E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.62688E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=8.003E-10
mult1=-8.81326E-9
mult2=-2.73458E-9
rf_tmon=-5.16732E-3
rf_agc=3.30932E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.00567E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.80091E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20337E1
lens5a_imon=1.99569E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12564E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54019E1
cs_ef1b_imon=3.02739E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=2.2192E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01792E0
lens1_imon=1.51034E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.99207E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03588E1
cs_ea2_imon=1.57896E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84676E1
cs_ef1a_imon=3.01514E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.83329E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=2.87422E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15396E1
os_ea1_imon=1.90016E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.09983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.27578E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01551E1
cs_anode1_imon=3.24435E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=7.40695E-10
tplens_vset=1.4E-1
tplens_vmon=1.61319E0
tplens_imon=-1.26308E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26074E1
iondef3_imon=1.49784E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.58508E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0296E2
lens6_imon=2.98584E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=3.97193E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28755E0
ionrepsh_imon=1.99929E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.19396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.87172E-1
os_ea2_imon=-5.37273E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00857E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62218E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38559E-1
os_ef2bup_imon=-5.14949E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10517E1
os_restr2_imon=2.86377E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.31442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02049E1
cs_anode2_imon=2.29182E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73195E1
iondef1_imon=1.08904E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67833E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.92047E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=3.9264E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-2.0717E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=2.30557E-1
window_imon=-1.21035E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39311E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.43688E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.58611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.44049E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=5.98409E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33987E1
os_fil1_imon=5.44896E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.50923E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66178E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30839E1
cs_fil1_imon=1.00845E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63015E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65933E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.25985E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76105E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33018E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22462E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.27052E-3
inlet_lpb_pmon=2.00567E-1
chamber_ion_pmon=1.73459E-7
chamber_cvt_pmon=2.52236E-3
foreline_cvt_pmon=2.52236E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.1186E-1
res40_imon=-2.76366E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=192
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2069E4	1.4E1	1.47E2	4.1E1	-7.24736E-2	-8.80024E1	-6.67572E-4	-8.8E1	2.86102E-4	6.00815E-3	9.31501E-2	2.73312E1	-3.26961E1	-3.26162E1	2.68233E1	1.73605E-7	2.51248E-3	2.51248E-3	6.36912E-3	1.99048E-1
2.0E0	6.442E3	5.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80025E1	-5.96046E-4	-8.80003E1	5.24521E-4	5.72205E-3	9.30071E-2	2.73039E1	-3.26785E1	-3.26178E1	2.67827E1	1.73459E-7	2.52131E-3	2.52131E-3	6.30212E-3	2.00231E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80024E1	-7.39098E-4	-8.79998E1	4.76837E-4	5.53131E-3	9.30786E-2	2.73132E1	-3.26609E1	-3.26035E1	2.68218E1	1.73387E-7	2.51498E-3	2.51498E-3	6.29157E-3	2.00399E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80025E1	-6.4373E-4	-8.8E1	3.33786E-4	5.67436E-3	9.30071E-2	2.72951E1	-3.25888E1	-3.26431E1	2.68221E1	1.73448E-7	2.51611E-3	2.51611E-3	6.34164E-3	1.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80024E1	-8.34465E-4	-8.8E1	3.33786E-4	5.57899E-3	9.31263E-2	2.73246E1	-3.2652E1	-3.26154E1	2.67858E1	1.73605E-7	2.52061E-3	2.52061E-3	6.25916E-3	1.98491E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80024E1	-6.91414E-4	-8.8E1	5.72205E-4	5.93662E-3	9.32932E-2	2.73081E1	-3.26771E1	-3.26434E1	2.68045E1	1.73605E-7	2.51809E-3	2.51809E-3	6.35099E-3	2.00862E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80027E1	-1.90735E-4	-8.8E1	1.43051E-4	5.45979E-3	9.29117E-2	2.72992E1	-3.26437E1	-3.25894E1	2.67978E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.39421E-2	-8.80021E1	-4.05312E-4	-8.79997E1	3.33786E-4	5.76973E-3	9.27687E-2	2.73303E1	-3.26398E1	-3.26524E1	2.68106E1	1.73605E-7	2.51662E-3	2.51662E-3	6.37905E-3	1.99977E-1
1.2E1	3.13E2	0.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80023E1	-7.86781E-4	-8.8E1	5.24521E-4	5.88894E-3	9.29117E-2	2.72775E1	-3.26777E1	-3.25942E1	2.6789E1	1.7368E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.99977E-1
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80024E1	-4.29153E-4	-8.80001E1	4.29153E-4	5.45979E-3	9.29594E-2	2.73043E1	-3.26495E1	-3.26325E1	2.67867E1	1.73605E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.98764E-1
1.4E1	7.37E2	1.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80024E1	-5.96046E-4	-8.80002E1	5.00679E-4	5.36442E-3	9.30548E-2	2.72915E1	-3.2652E1	-3.26431E1	2.68094E1	1.73655E-7	2.51844E-3	2.51844E-3	6.27461E-3	1.97903E-1
1.5E1	7.8E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80022E1	-4.29153E-4	-8.79997E1	2.86102E-4	5.45979E-3	9.32455E-2	2.72979E1	-3.26789E1	-3.26633E1	2.67986E1	1.73529E-7	2.5199E-3	2.5199E-3	6.23656E-3	1.98764E-1
1.6E1	3.333E3	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80023E1	-6.67572E-4	-8.79997E1	5.24521E-4	5.45979E-3	9.31501E-2	2.72974E1	-3.26773E1	-3.26236E1	2.67908E1	1.73605E-7	2.51954E-3	2.51954E-3	6.2752E-3	1.99E-1
1.7E1	4.4203E4	2.0E1	6.87E2	4.7E2	-7.32464E-2	-8.80023E1	-1.43051E-4	-8.79999E1	6.4373E-4	5.55515E-3	9.30548E-2	2.72889E1	-3.26603E1	-3.2644E1	2.67854E1	1.73529E-7	2.51443E-3	2.51443E-3	6.28006E-3	1.98419E-1
1.8E1	2.00534E5	9.0E1	7.27E2	5.0E2	-7.26282E-2	-8.80023E1	-8.10623E-4	-8.79998E1	3.33786E-4	5.53131E-3	9.29594E-2	2.72949E1	-3.26356E1	-3.26236E1	2.67926E1	1.73605E-7	2.5199E-3	2.5199E-3	6.3514E-3	1.98592E-1
1.9E1	2.471E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80023E1	-5.96046E-4	-8.79997E1	3.09944E-4	5.67436E-3	9.29832E-2	2.72901E1	-3.26957E1	-3.26416E1	2.67998E1	1.73605E-7	2.51443E-3	2.51443E-3	6.37351E-3	1.9911E-1
2.0E1	3.75E2	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80024E1	-3.09944E-4	-8.79999E1	1.90735E-4	5.38826E-3	9.31978E-2	2.73287E1	-3.26531E1	-3.25888E1	2.6819E1	1.73605E-7	2.52276E-3	2.52276E-3	6.36687E-3	1.9917E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80026E1	-2.38419E-5	-8.79999E1	2.6226E-4	5.60284E-3	9.31025E-2	2.73045E1	-3.26703E1	-3.26136E1	2.68036E1	1.73529E-7	2.5199E-3	2.5199E-3	6.35692E-3	1.99456E-1
2.2E1	3.8E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80025E1	-2.86102E-4	-8.79998E1	4.76837E-5	5.65052E-3	9.31263E-2	2.73045E1	-3.26862E1	-3.26195E1	2.68058E1	1.73531E-7	2.50882E-3	2.50882E-3	6.30202E-3	1.9917E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80025E1	-3.09944E-4	-8.79999E1	4.76837E-5	5.29289E-3	9.29594E-2	2.73195E1	-3.26645E1	-3.26074E1	2.67833E1	1.73459E-7	2.52236E-3	2.52236E-3	6.27052E-3	2.00567E-1