[Scan]
initial_time=2016-02-16T00:14:24
final_time=2016-02-16T00:14:43
ip_count=19
run=1030
dataset=3
scan=186
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.81129E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-5.84054E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=4.179E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.67459E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=7.95269E-10
mult1=-1.15563E-8
mult2=-2.74285E-9
rf_tmon=-4.81032E-3
rf_agc=3.37751E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=4.44412E-10
bslens_vset=-6.2E0
bslens_vmon=-6.46919E0
bslens_imon=2.77332E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21989E1
lens5a_imon=2.11641E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12537E2
lens4a_imon=2.0406E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.0555E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04431E2
lens23_imon=1.01887E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05495E1
cs_ea1_imon=2.34682E-5
lens1_vset=-2.7E0
lens1_vmon=-3.19405E0
lens1_imon=1.28323E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64482E1
os_ef1alow_imon=2.99567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.01419E1
cs_ea2_imon=1.44888E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.00216E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=4.14169E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=2.90197E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15536E1
os_ea1_imon=1.99218E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63263E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.40252E0
cs_ionrep_imon=1.3165E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91847E2
cs_nozzle_imon=1.92804E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=3.24255E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=7.07293E-10
tplens_vset=1.4E-1
tplens_vmon=1.41845E0
tplens_imon=-6.06816E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25806E1
iondef3_imon=1.6485E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27056E1
iondef2_imon=1.50905E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02797E2
lens6_imon=2.98038E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=4.06253E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32879E0
ionrepsh_imon=2.07464E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.35014E1
lens5b_imon=2.20171E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.14019E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.21257E-1
os_ea2_imon=-1.70403E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.01607E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71071E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64441E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38559E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=2.86773E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23271E2
cs_ionfoca_imon=6.36051E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01623E1
cs_anode2_imon=2.29831E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.00999E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67872E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.94309E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=3.84009E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-2.02485E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47457E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=1.90914E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-8.42748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9258E3
multa_neg_imon=6.3552E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93813E3
defgrida_imon=7.95855E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.86299E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46757E0
defgridb_imon=4.97483E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33983E1
os_fil1_imon=4.7522E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.26897E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66061E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30798E1
cs_fil1_imon=1.00852E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62318E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66256E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15461E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85083E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28875E-1
cs_fil2_imon=-2.18544E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22448E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.25382E-3
inlet_lpb_pmon=2.00705E-1
chamber_ion_pmon=1.73457E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32573E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2072E4	7.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80024E1	-2.86102E-4	-8.8E1	3.09944E-4	5.84126E-3	9.3174E-2	2.71824E1	-3.24998E1	-3.26178E1	2.68024E1	1.73605E-7	2.51525E-3	2.51525E-3	6.2752E-3	1.9985E-1
2.0E0	6.58E3	8.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80025E1	-7.62939E-4	-8.79998E1	2.86102E-4	5.6982E-3	9.29594E-2	2.73135E1	-3.26681E1	-3.26494E1	2.6813E1	1.73309E-7	2.50989E-3	2.50989E-3	6.33977E-3	2.00192E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80023E1	-8.10623E-4	-8.79998E1	-2.6226E-4	5.22137E-3	9.2864E-2	2.7285E1	-3.26484E1	-3.26502E1	2.68118E1	1.73454E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.9963E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80025E1	-3.57628E-4	-8.79999E1	2.38419E-5	5.34058E-3	9.29594E-2	2.72835E1	-3.26597E1	-3.26056E1	2.67962E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80025E1	-6.4373E-4	-8.79996E1	1.19209E-4	5.29289E-3	9.29832E-2	2.73171E1	-3.26753E1	-3.26368E1	2.67752E1	1.73383E-7	2.51632E-3	2.51632E-3	6.2645E-3	1.9934E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80026E1	-5.24521E-4	-8.79995E1	-2.6226E-4	5.36442E-3	9.29832E-2	2.72791E1	-3.26071E1	-3.26166E1	2.68406E1	1.73605E-7	2.51225E-3	2.51225E-3	6.3074E-3	1.99283E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80028E1	-5.72205E-4	-8.79997E1	-2.38419E-5	5.6982E-3	9.27687E-2	2.73228E1	-3.26548E1	-3.2596E1	2.683E1	1.73605E-7	2.51552E-3	2.51552E-3	6.34037E-3	1.98592E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80025E1	-2.6226E-4	-8.79998E1	1.19209E-4	5.6982E-3	9.30071E-2	2.73193E1	-3.2695E1	-3.26231E1	2.67995E1	1.7368E-7	2.51116E-3	2.51116E-3	6.26916E-3	1.99803E-1
1.2E1	3.09E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80023E1	-6.19888E-4	-8.80002E1	-1.43051E-4	5.53131E-3	9.27687E-2	2.73069E1	-3.26831E1	-3.26272E1	2.67896E1	1.73454E-7	2.51771E-3	2.51771E-3	6.34588E-3	2.00499E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80022E1	-4.76837E-4	-8.80003E1	1.66893E-4	5.79357E-3	9.29594E-2	2.72799E1	-3.25936E1	-3.26579E1	2.68166E1	1.73457E-7	2.52169E-3	2.52169E-3	6.36687E-3	1.9951E-1
1.4E1	7.92E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80026E1	-7.86781E-4	-8.80005E1	2.14577E-4	5.53131E-3	9.30309E-2	2.73333E1	-3.26693E1	-3.26416E1	2.68034E1	1.73605E-7	2.51443E-3	2.51443E-3	6.28006E-3	1.99977E-1
1.5E1	7.3E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80024E1	-7.86781E-4	-8.80001E1	2.6226E-4	5.72205E-3	9.30786E-2	2.73169E1	-3.27115E1	-3.26148E1	2.6831E1	1.7368E-7	2.5188E-3	2.5188E-3	6.28006E-3	1.98937E-1
1.6E1	3.351E3	3.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80027E1	-5.48363E-4	-8.79999E1	7.15256E-5	5.48363E-3	9.32455E-2	2.73092E1	-3.26767E1	-3.2636E1	2.68273E1	1.73454E-7	2.5188E-3	2.5188E-3	6.38459E-3	1.97903E-1
1.7E1	4.3875E4	1.3E1	6.87E2	4.7E2	-7.26282E-2	-8.80025E1	-5.72205E-4	-8.80001E1	2.86102E-4	6.05583E-3	9.3174E-2	2.73021E1	-3.26933E1	-3.26032E1	2.67926E1	1.73457E-7	2.51417E-3	2.51417E-3	6.26985E-3	1.98661E-1
1.8E1	1.9857E5	1.35E2	7.27E2	5.0E2	-7.30146E-2	-8.80023E1	-7.39098E-4	-8.8E1	2.14577E-4	5.76973E-3	9.31263E-2	2.72868E1	-3.26956E1	-3.27151E1	2.67884E1	1.73383E-7	2.50989E-3	2.50989E-3	6.36144E-3	1.97815E-1
1.9E1	2.547E3	2.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80022E1	-3.8147E-4	-8.80001E1	0.0E0	6.05583E-3	9.32932E-2	2.73159E1	-3.26482E1	-3.25936E1	2.67884E1	1.73529E-7	2.51771E-3	2.51771E-3	6.28006E-3	1.98764E-1
2.0E1	4.49E2	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80025E1	-4.05312E-4	-8.80001E1	0.0E0	5.8651E-3	9.31263E-2	2.73151E1	-3.26467E1	-3.26425E1	2.68123E1	1.73529E-7	2.5188E-3	2.5188E-3	6.34588E-3	1.98764E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80023E1	-6.4373E-4	-8.80003E1	1.66893E-4	6.07967E-3	9.29832E-2	2.73219E1	-3.26639E1	-3.26104E1	2.67752E1	1.73383E-7	2.51525E-3	2.51525E-3	6.34518E-3	1.9934E-1
2.2E1	3.9E1	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80023E1	-6.19888E-4	-8.80002E1	3.57628E-4	5.98431E-3	9.32455E-2	2.73375E1	-3.26561E1	-3.26703E1	2.67671E1	1.73531E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.00534E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80026E1	-7.86781E-4	-8.80002E1	3.09944E-4	5.88894E-3	9.3174E-2	2.73375E1	-3.27056E1	-3.25806E1	2.67872E1	1.73457E-7	2.52492E-3	2.52492E-3	6.25382E-3	2.00705E-1