[Scan]
initial_time=2016-02-16T00:14:50
final_time=2016-02-16T00:15:10
ip_count=19
run=1030
dataset=3
scan=187
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.80034E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.78916E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=3.80552E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.59161E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=8.12507E-10
mult1=-9.87283E-9
mult2=-2.68468E-9
rf_tmon=-4.23604E-3
rf_agc=3.26006E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=3.97062E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.64944E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19742E1
lens5a_imon=1.99642E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53482E1
cs_ef1b_imon=3.05203E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02461E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=2.19357E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00941E0
lens1_imon=1.52391E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64776E1
os_ef1alow_imon=2.97974E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.60319E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83659E1
cs_ef1a_imon=3.00754E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=3.86548E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=2.8866E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=1.90121E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6356E1
os_ef1bup_imon=3.09234E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22437E0
cs_ionrep_imon=1.24642E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.22961E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=7.54011E-10
tplens_vset=1.4E-1
tplens_vmon=1.62787E0
tplens_imon=-1.36074E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26609E1
iondef3_imon=1.50834E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26254E1
iondef2_imon=1.57736E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98717E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.93414E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25741E0
ionrepsh_imon=1.98545E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.2056E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74293E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.7994E-1
os_ea2_imon=-3.37821E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00729E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71484E1
cs_ef2a_imon=3.17783E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6384E0
os_ef2alow_imon=-2.55373E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51473E-1
os_ef2bup_imon=-5.16017E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10926E1
os_restr2_imon=2.87757E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.28477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.27114E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73309E1
iondef1_imon=1.08007E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67896E1
iondef4_imon=1.08607E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.93419E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=4.08924E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11277E0
cs_ionaccel_imon=-1.89343E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47341E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56034E1
einzel_imon=7.78167E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-9.51639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.86564E1
mask2_imon=-6.73619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.88423E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.10036E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.23297E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63293E0
defgridb_imon=6.18885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33974E1
os_fil1_imon=4.75048E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.7334E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66032E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30802E1
cs_fil1_imon=1.00777E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62343E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65573E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.952E-2
os_fil2_imon=-2.45488E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.10325E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.91664E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30401E-1
cs_fil2_imon=-2.368E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27523E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22304E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.97559E-1
chamber_ion_pmon=1.73454E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.53038E-1
res40_imon=-2.54678E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.1884E4	8.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80024E1	-5.00679E-4	-8.80003E1	2.38419E-5	6.07967E-3	9.30786E-2	2.73256E1	-3.26954E1	-3.25765E1	2.6792E1	1.73605E-7	2.51954E-3	2.51954E-3	6.26985E-3	1.9985E-1
2.0E0	6.646E3	1.0E1	3.16E2	1.6E2	-7.3401E-2	-8.80024E1	-5.00679E-4	-8.80002E1	4.29153E-4	5.74589E-3	9.29832E-2	2.73326E1	-3.26605E1	-3.26207E1	2.68009E1	1.73605E-7	2.51886E-3	2.51886E-3	6.26085E-3	1.9994E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80023E1	-6.19888E-4	-8.80002E1	7.15256E-5	5.93662E-3	9.29832E-2	2.73151E1	-3.26797E1	-3.26396E1	2.68388E1	1.735E-7	2.51007E-3	2.51007E-3	6.24323E-3	2.00124E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80024E1	-1.19209E-4	-8.80004E1	2.86102E-4	5.98431E-3	9.32455E-2	2.73129E1	-3.26579E1	-3.26464E1	2.681E1	1.73387E-7	2.51603E-3	2.51603E-3	6.27052E-3	2.00064E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80025E1	-5.00679E-4	-8.80003E1	0.0E0	5.74589E-3	9.2864E-2	2.73123E1	-3.26392E1	-3.26362E1	2.68146E1	1.73605E-7	2.5147E-3	2.5147E-3	6.41439E-3	1.99931E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80025E1	-6.91414E-4	-8.8E1	-2.38419E-5	5.65052E-3	9.29594E-2	2.73039E1	-3.26759E1	-3.26464E1	2.67845E1	1.73605E-7	2.51847E-3	2.51847E-3	6.33977E-3	1.9968E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80023E1	-7.39098E-4	-8.80002E1	2.14577E-4	5.84126E-3	9.29832E-2	2.72544E1	-3.26838E1	-3.26036E1	2.6759E1	1.73605E-7	2.5188E-3	2.5188E-3	6.26916E-3	1.98764E-1
8.0E0	2.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80023E1	-9.05991E-4	-8.80002E1	-7.15256E-5	5.93662E-3	9.32932E-2	2.72919E1	-3.27035E1	-3.25521E1	2.68268E1	1.7368E-7	2.51771E-3	2.51771E-3	6.25827E-3	1.97731E-1
1.2E1	3.16E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80021E1	-5.96046E-4	-8.79997E1	1.19209E-4	5.74589E-3	9.31978E-2	2.72967E1	-3.26266E1	-3.26182E1	2.6804E1	1.73605E-7	2.50882E-3	2.50882E-3	6.36144E-3	1.98153E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80022E1	-4.76837E-4	-8.79999E1	2.14577E-4	5.65052E-3	9.31263E-2	2.73586E1	-3.26326E1	-3.26915E1	2.6786E1	1.73529E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.99283E-1
1.4E1	7.65E2	1.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80019E1	-5.00679E-4	-8.8E1	7.15256E-5	5.84126E-3	9.31263E-2	2.73116E1	-3.26809E1	-3.25947E1	2.68052E1	1.73605E-7	2.51334E-3	2.51334E-3	6.26916E-3	1.99456E-1
1.5E1	7.0E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80023E1	-7.62939E-4	-8.8E1	2.86102E-4	5.65052E-3	9.30548E-2	2.73273E1	-3.26807E1	-3.25659E1	2.68016E1	1.73531E-7	2.51096E-3	2.51096E-3	6.33977E-3	2.01219E-1
1.6E1	3.356E3	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80025E1	-6.19888E-4	-8.8E1	1.43051E-4	5.43594E-3	9.29594E-2	2.72606E1	-3.26404E1	-3.26302E1	2.67794E1	1.73681E-7	2.51581E-3	2.51581E-3	6.30182E-3	2.00285E-1
1.7E1	4.409E4	2.1E1	6.87E2	4.7E2	-7.286E-2	-8.80024E1	-5.96046E-4	-8.80001E1	1.43051E-4	5.74589E-3	9.3174E-2	2.73153E1	-3.2635E1	-3.26284E1	2.68004E1	1.73605E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.01047E-1
1.8E1	1.9874E5	1.06E2	7.27E2	5.0E2	-7.23189E-2	-8.80023E1	-7.39098E-4	-8.80003E1	2.6226E-4	5.65052E-3	9.29356E-2	2.72985E1	-3.26813E1	-3.26717E1	2.67872E1	1.73529E-7	2.51443E-3	2.51443E-3	6.36797E-3	2.00499E-1
1.9E1	2.573E3	3.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80027E1	-8.82149E-4	-8.80001E1	7.15256E-4	5.55515E-3	9.26971E-2	2.73541E1	-3.27257E1	-3.26573E1	2.6752E1	1.7368E-7	2.52099E-3	2.52099E-3	6.26916E-3	1.99803E-1
2.0E1	4.09E2	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80025E1	-9.53674E-4	-8.79999E1	7.62939E-4	5.79357E-3	9.32932E-2	2.72913E1	-3.26422E1	-3.26278E1	2.67986E1	1.73605E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.99977E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80027E1	-1.23978E-3	-8.79999E1	6.19888E-4	5.53131E-3	9.30548E-2	2.73093E1	-3.26699E1	-3.26266E1	2.68316E1	1.73605E-7	2.51443E-3	2.51443E-3	6.36244E-3	1.98764E-1
2.2E1	4.0E1	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80023E1	-9.29832E-4	-8.80002E1	5.48363E-4	6.05583E-3	9.31025E-2	2.73147E1	-3.27167E1	-3.26302E1	2.67716E1	1.73679E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.9968E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80023E1	-1.0252E-3	-8.80001E1	3.09944E-4	5.6982E-3	9.32217E-2	2.73309E1	-3.26254E1	-3.26609E1	2.67896E1	1.73454E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.97559E-1