[Scan]
initial_time=2016-02-16T00:15:43
final_time=2016-02-16T00:16:03
ip_count=19
run=1030
dataset=3
scan=189
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.78044E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-5.66769E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=3.99065E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.65534E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=7.75874E-10
mult1=-1.02581E-8
mult2=-2.67669E-9
rf_tmon=-4.66864E-3
rf_agc=3.33216E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=4.06826E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66503E0
bslens_imon=2.43708E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20267E1
lens5a_imon=1.99218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53175E1
cs_ef1b_imon=3.0409E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02231E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0536E1
cs_ea1_imon=2.23286E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03242E0
lens1_imon=1.75397E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64162E1
os_ef1alow_imon=2.99121E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0359E1
cs_ea2_imon=1.5632E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84186E1
cs_ef1a_imon=3.00407E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=3.96311E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11384E1
os_restr1_imon=2.88313E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=1.89024E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.08643E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25741E0
cs_ionrep_imon=1.27014E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01746E1
cs_anode1_imon=3.23726E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=7.3967E-10
tplens_vset=1.4E-1
tplens_vmon=1.56475E0
tplens_imon=-3.73215E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27047E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26957E1
iondef2_imon=1.57842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98466E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=3.95012E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=1.99324E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33852E1
lens5b_imon=2.19675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.13474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.59294E-1
os_ea2_imon=-4.58161E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00697E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61349E0
os_ef2alow_imon=-2.59891E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52632E-1
os_ef2bup_imon=-5.12889E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1073E1
os_restr2_imon=2.87687E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.31627E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01879E1
cs_anode2_imon=2.28469E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72949E1
iondef1_imon=1.10272E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6777E1
iondef4_imon=1.07878E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.90628E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.34382E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12435E0
cs_ionaccel_imon=-1.8135E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56666E1
einzel_imon=7.8894E-6
window_vset=0.0E0
window_vmon=2.15369E-1
window_imon=-9.09936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.86107E1
mask2_imon=-6.24965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.95147E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93674E3
defgrida_imon=6.54987E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.41348E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.19E0
defgridb_imon=5.97295E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33997E1
os_fil1_imon=5.34127E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.99984E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65916E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=1.00855E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62835E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65928E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10396E-2
os_fil2_imon=-2.48963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.58196E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.99257E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29028E-1
cs_fil2_imon=-2.09577E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.16117E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22444E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28006E-3
inlet_lpb_pmon=1.99456E-1
chamber_ion_pmon=1.7368E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.99751E-1
res40_imon=-2.42515E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.2427E4	1.2E1	1.47E2	4.1E1	-7.32464E-2	-8.80023E1	-1.00136E-3	-8.8E1	4.29153E-4	5.48363E-3	9.3317E-2	2.72915E1	-3.26236E1	-3.26248E1	2.67734E1	1.73605E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.9985E-1
2.0E0	6.606E3	7.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80021E1	-6.91414E-4	-8.79999E1	1.66893E-4	5.4121E-3	9.36031E-2	2.73122E1	-3.26744E1	-3.26213E1	2.677E1					
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80023E1	-1.04904E-3	-8.80001E1	1.43051E-4	5.62668E-3	9.33647E-2	2.73526E1	-3.26681E1	-3.26128E1	2.68719E1	1.73605E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.99977E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80025E1	-9.29832E-4	-8.79998E1	3.09944E-4	5.91278E-3	9.35793E-2	2.72939E1	-3.27003E1	-3.26266E1	2.68088E1	1.73679E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.9968E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80024E1	-6.19888E-4	-8.79999E1	7.15256E-5	5.57899E-3	9.34601E-2	2.72791E1	-3.26284E1	-3.2636E1	2.68018E1	1.73605E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99803E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80022E1	-6.67572E-4	-8.79999E1	3.8147E-4	5.48363E-3	9.3317E-2	2.72895E1	-3.26873E1	-3.26104E1	2.68106E1	1.73605E-7	2.51287E-3	2.51287E-3	6.31798E-3	2.01072E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80022E1	-1.0252E-3	-8.80001E1	3.33786E-4	5.74589E-3	9.34124E-2	2.73265E1	-3.26503E1	-3.26301E1	2.67943E1	1.7368E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.99977E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80024E1	-5.24521E-4	-8.80003E1	2.86102E-4	5.96046E-3	9.34124E-2	2.72903E1	-3.27009E1	-3.26455E1	2.678E1	1.73753E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.00876E-1
1.2E1	3.28E2	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80027E1	-4.76837E-5	-8.80003E1	3.57628E-4	5.98431E-3	9.3174E-2	2.73303E1	-3.27438E1	-3.25473E1	2.68192E1	1.73677E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.00735E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80024E1	-4.29153E-4	-8.80001E1	9.53674E-5	5.84126E-3	9.3317E-2	2.73045E1	-3.27071E1	-3.25733E1	2.68112E1	1.73605E-7	2.51334E-3	2.51334E-3	6.34588E-3	2.00673E-1
1.4E1	7.47E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80026E1	-6.91414E-4	-8.80001E1	4.29153E-4	5.76973E-3	9.35316E-2	2.72945E1	-3.26856E1	-3.26531E1	2.67734E1	1.73753E-7	2.51847E-3	2.51847E-3	6.28592E-3	2.00534E-1
1.5E1	8.2E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80027E1	-5.48363E-4	-8.79999E1	2.86102E-4	5.60284E-3	9.35316E-2	2.73647E1	-3.26349E1	-3.26213E1	2.6795E1	1.73605E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.00192E-1
1.6E1	3.285E3	2.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80028E1	-5.96046E-4	-8.80003E1	5.72205E-4	5.4121E-3	9.34601E-2	2.73285E1	-3.26506E1	-3.26879E1	2.67752E1	1.73679E-7	2.51525E-3	2.51525E-3	6.28592E-3	2.00363E-1
1.7E1	4.4043E4	3.4E1	6.87E2	4.7E2	-7.32464E-2	-8.80027E1	-7.39098E-4	-8.80004E1	7.86781E-4	5.17368E-3	9.30548E-2	2.72949E1	-3.26573E1	-3.26038E1	2.67998E1	1.73605E-7	2.52099E-3	2.52099E-3	6.36797E-3	2.01372E-1
1.8E1	2.00232E5	1.31E2	7.27E2	5.0E2	-7.34782E-2	-8.80024E1	-4.76837E-4	-8.8E1	4.29153E-4	5.22137E-3	9.34601E-2	2.72945E1	-3.26756E1	-3.2606E1	2.67926E1	1.73605E-7	2.52492E-3	2.52492E-3	6.3074E-3	2.00534E-1
1.9E1	2.645E3	1.0E0	7.68E2	5.29E2	-7.41738E-2	-8.80024E1	-4.76837E-4	-8.79999E1	6.67572E-4	5.53131E-3	9.31978E-2	2.72979E1	-3.26753E1	-3.26308E1	2.67878E1	1.73457E-7	2.52169E-3	2.52169E-3	6.25382E-3	2.00876E-1
2.0E1	3.78E2	1.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80024E1	-5.96046E-4	-8.80001E1	5.48363E-4	5.76973E-3	9.32217E-2	2.74439E1	-3.28483E1	-3.26494E1	2.68118E1	1.7368E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.00847E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80024E1	-5.96046E-4	-8.80002E1	4.76837E-4	5.60284E-3	9.33886E-2	2.73195E1	-3.26777E1	-3.25948E1	2.68124E1	1.73605E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.99803E-1
2.2E1	5.4E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80024E1	-2.14577E-4	-8.80001E1	4.76837E-4	5.67436E-3	9.31978E-2	2.73257E1	-3.26915E1	-3.27027E1	2.6774E1	1.73605E-7	2.51552E-3	2.51552E-3	6.28552E-3	1.9911E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80029E1	-1.66893E-4	-8.80001E1	5.48363E-4	5.74589E-3	9.31501E-2	2.72949E1	-3.26957E1	-3.27047E1	2.6777E1	1.7368E-7	2.51334E-3	2.51334E-3	6.28006E-3	1.99456E-1